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1. 发明授权

US07244631B1 MEMS surface modification for passive control of charge accumulation 有权
标题翻译： MEMS表面改性用于电荷积累的被动控制
公开(公告)号：US07244631B1
公开(公告)日：2007-07-17
申请号：US11145060
申请日：2005-06-03
申请人： Wilhelmus De Groot , James A. Hunter , Josef Berger
发明人： Wilhelmus De Groot , James A. Hunter , Josef Berger
IPC分类号： H01L21/00
CPC分类号： B81B3/0086
摘要： In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.
摘要翻译：在一个实施例中，处理微机电系统（MEMS）装置的表面的方法降低或消除由于电荷迁移和积累引起的性能劣化。简而言之，该方法可以包括处理MEMS器件的电介质表面以用电中性分子代替羟基，从而将电介质表面从亲水转变为基本上疏水的性质。还公开了使用上述方法处理的表面的MEMS器件。

2. 发明授权

US07202988B1 Diffractive light modulator 有权
$Diffractive light modulator$
标题翻译：衍射光调制器
公开(公告)号：US07202988B1
公开(公告)日：2007-04-10
申请号：US10811435
申请日：2004-03-25
申请人： Alexander P. Payne , Michael J. Dueweke , Wilhelmus De Groot , David T. Amm , Omar S. Leung , James A. Hunter , Brent D. Lunceford , Gregory Beach
发明人： Alexander P. Payne , Michael J. Dueweke , Wilhelmus De Groot , David T. Amm , Omar S. Leung , James A. Hunter , Brent D. Lunceford , Gregory Beach
IPC分类号： G02B26/00 , G02B26/08 , G02F1/29
CPC分类号： G02B26/0808
摘要： In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.
摘要翻译：在所公开的一个实施例中，光调制器可以被配置为具有基本平坦的光学有源调制器元件部分，同时偏转。调制器可以包括基本并行布置的多个调制器元件，每个调制器元件包括在光学活性部分的任一侧上的光学活性部分和支撑部分。此外，光学活性部分可以具有比支撑部分窄的宽度。在所公开的另一实施例中，用于光调制的可移动膜包括基本圆形的光学活性部分和围绕圆形光学活性部分的释放膜部分。基本上圆形的光学活性部分还可以包括被配置为暴露下表面的多个间隙。此外，基本上圆形的光学活性部分在偏转状态下可以基本上是平坦的。

3. 外观设计

USD512090S1 Type font 失效
公开(公告)号：USD512090S1
公开(公告)日：2005-11-29
申请号：US29201672
申请日：2004-03-19
申请人： Lucas Adrianus Wilhelmus de Groot
设计人： Lucas Adrianus Wilhelmus de Groot

4. 发明授权

US06922272B1 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 有权
标题翻译：用于调平多层MEMS器件热应力变化的方法和装置
公开(公告)号：US06922272B1
公开(公告)日：2005-07-26
申请号：US10367440
申请日：2003-02-14
申请人： Wilhelmus de Groot , Dinesh Maheshwari
发明人： Wilhelmus de Groot , Dinesh Maheshwari
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G02B26/00
CPC分类号： B81C1/00666 , B81B2203/0109 , B81C2201/0167 , G02B26/0808
摘要： A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ light modulator, a ribbon is suspended over a substrate, and the ribbon tension is kept constant over a temperature range by adjusting the aggregate thermal coefficient of expansion of the ribbon to match the aggregate thermal coefficient of expansion of the substrate. Various opposition materials have an opposite thermal coefficient of expansion as the aluminum layer of a grating light valve™ light modulator ribbon, using the thermal coefficient of expansion of the substrate as a zero coefficient reference. The adjustment of the thermal coefficient of expansion of the ribbon can be performed variously by thickening existing layers of opposition material or adding additional layers of new opposition material to the ribbon, or reducing the aluminum in aluminum layer. The aluminum layer may be reduced variously by reducing the thickness of the aluminum layer, or reducing the surface area that the aluminum covers, or reducing both the surface area and the thickness. Embodiments may combine the reduction of aluminum with the use of opposition materials.
摘要翻译：诸如光栅光阀（TM）光调制器之类的MEMS器件被非热化，使得偏转MEMS器件的可移动部分所需的力在一个温度范围内保持恒定。在针对光栅光阀（TM）光调制器的MEMS实施例中，色带悬挂在衬底上，并且通过调节色带的聚集体热膨胀系数以匹配聚集体热量，色带张力在温度范围内保持恒定基材膨胀系数。各种对立材料具有与光栅光阀（TM）光调制器带的铝层相反的热膨胀系数，使用基板的热膨胀系数作为零系数参考。色带的热膨胀系数的调整可以通过增加现有的对立材料层或者向色带添加新的对立材料层，或者减少铝层中的铝来进行各种各样的调整。可以通过减少铝层的厚度或减少铝覆盖的表面积或减小表面积和厚度来使铝层各不相同。实施例可以将铝的减少与对立材料的使用相结合。