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1. 发明申请

US20080245965A1 Charged Particle System 有权
标题翻译：带电粒子系统
公开(公告)号：US20080245965A1
公开(公告)日：2008-10-09
申请号：US12098127
申请日：2008-04-04
申请人： Akiyuki Sugiyama , Hidetoshi Morokuma , Yutaka Hojo , Yukio Yoshizawa
发明人： Akiyuki Sugiyama , Hidetoshi Morokuma , Yutaka Hojo , Yukio Yoshizawa
IPC分类号： G01N23/00
CPC分类号： H01J37/3056 , B82Y10/00 , B82Y40/00 , H01J37/265 , H01J37/28 , H01J37/3045 , H01J37/3174 , H01J2237/22 , H01J2237/2817 , H01J2237/31745
摘要： To provide a charged particle system capable of facilitating comparison between an actual pattern and an ideal pattern using not only two-dimensional CAD data but also three-dimensional CAD data. According to the present invention, using information about the angle of irradiation of a sample with a charged particle beam, a two-dimensional display of an ideal pattern (design data, such as CAD data, for example) is converted into a three-dimensional display, and the three-dimensional ideal pattern is displayed with an observation image. If the three-dimensional ideal pattern is superimposed on the observation image, comparison thereof can be easily carried out. Examples of the ideal pattern include a circuit pattern (CAD data) based on semiconductor design information, an exposure mask pattern based on an exposure mask used for exposure of a semiconductor wafer, and an exposure simulation pattern based on exposure simulation based on the exposure mask and an exposure condition can be used, and at least one of these patterns is displayed three-dimensionally.
摘要翻译：为了提供一种带电粒子系统，其能够利用不仅二维CAD数据而且还可以利用三维CAD数据来实现实际图案与理想图案之间的比较。根据本发明，使用带有带电粒子束的样本的照射角度的信息，将理想图案（例如，CAD数据等设计数据）的二维显示转换成三维显示，并且用观察图像显示三维理想图案。如果将三维理想图案叠加在观察图像上，则可以容易地进行比较。理想图案的实例包括基于半导体设计信息的电路图案（CAD数据），基于用于半导体晶片曝光的曝光掩模的曝光掩模图案和基于曝光掩模的曝光模拟的曝光模拟图案并且可以使用曝光条件，并且这些图案中的至少一个被三维地显示。

2. 发明授权

US07772554B2 Charged particle system 有权
标题翻译：带电粒子系统
公开(公告)号：US07772554B2
公开(公告)日：2010-08-10
申请号：US12098127
申请日：2008-04-04
申请人： Akiyuki Sugiyama , Hidetoshi Morokuma , Yutaka Hojo , Yukio Yoshizawa
发明人： Akiyuki Sugiyama , Hidetoshi Morokuma , Yutaka Hojo , Yukio Yoshizawa
IPC分类号： G01N23/00
CPC分类号： H01J37/3056 , B82Y10/00 , B82Y40/00 , H01J37/265 , H01J37/28 , H01J37/3045 , H01J37/3174 , H01J2237/22 , H01J2237/2817 , H01J2237/31745
摘要： To provide a charged particle system capable of facilitating comparison between an actual pattern and an ideal pattern using not only two-dimensional CAD data but also three-dimensional CAD data. According to the present invention, using information about the angle of irradiation of a sample with a charged particle beam, a two-dimensional display of an ideal pattern (design data, such as CAD data, for example) is converted into a three-dimensional display, and the three-dimensional ideal pattern is displayed with an observation image. If the three-dimensional ideal pattern is superimposed on the observation image, comparison thereof can be easily carried out. Examples of the ideal pattern include a circuit pattern (CAD data) based on semiconductor design information, an exposure mask pattern based on an exposure mask used for exposure of a semiconductor wafer, and an exposure simulation pattern based on exposure simulation based on the exposure mask and an exposure condition can be used, and at least one of these patterns is displayed three-dimensionally.
摘要翻译：为了提供一种带电粒子系统，其能够利用不仅二维CAD数据而且还可以利用三维CAD数据来实现实际图案与理想图案之间的比较。根据本发明，使用带有带电粒子束的样本的照射角度的信息，将理想图案（例如，CAD数据等设计数据）的二维显示转换成三维显示，并且用观察图像显示三维理想图案。如果将三维理想图案叠加在观察图像上，则可以容易地进行比较。理想图案的实例包括基于半导体设计信息的电路图案（CAD数据），基于用于半导体晶片曝光的曝光掩模的曝光掩模图案和基于曝光掩模的曝光模拟的曝光模拟图案并且可以使用曝光条件，并且这些图案中的至少一个被三维地显示。

3. 发明授权

US09199393B2 High-shear melt-kneader and method of high shearing 有权
标题翻译：高剪切熔融捏合机和高剪切方法
公开(公告)号：US09199393B2
公开(公告)日：2015-12-01
申请号：US13147925
申请日：2010-02-02
申请人： Hiroshi Shimizu , Yongjin Li , Yukio Yoshizawa , Takayuki Takahashi , Ken-ichi Toyoshima
发明人： Hiroshi Shimizu , Yongjin Li , Yukio Yoshizawa , Takayuki Takahashi , Ken-ichi Toyoshima
IPC分类号： B29B7/28 , B29B7/14 , B29B7/88
CPC分类号： B29B7/28 , B29B7/14 , B29B7/88
摘要： A high-shear melt-kneader includes a high-shear unit (20) having an internal feedback-type screw (23) configured to apply high-shear stress to a melted resin, resin pressure sensors (33) for configured to detect a front portion resin pressure in the vicinity of an inlet of the internal feedback-type screw and a rear portion resin pressure in the vicinity of an outlet, and a control device configured to appropriately control a material supplying amount, a material temperature, a kneading time, and a screw rotation speed according to pressure values detected by the sensors. The control device controls the conditions such that waveforms with the lapse of time of the front and rear portion resin pressures are similar to each other and show variation to a steady state after formation of a predetermined peak value, and the front and rear portion resin pressures form a predetermined pressure difference with the lapse of time. According to the high-shear melt-kneader, it is possible to improve high-shear efficiency, increase precision of nano dispersion of a material, and stably and finely disperse/mix internal structures of immiscible polymer blend-based, polymer/filler-based and polymer blend/filler-based materials to a nano level.
摘要翻译：高剪切熔融捏合机包括具有内部反馈型螺杆（23）的高剪切单元（20），该内部反馈型螺杆（23）被配置为向熔融树脂施加高剪切应力;树脂压力传感器（33），用于检测前端在内反馈型螺杆的入口附近的部分树脂压力和出口附近的后部树脂压力，以及控制装置，其被配置为适当地控制材料供给量，材料温度，混炼时间，以及根据由传感器检测的压力值的螺杆转速。控制装置控制使得前后树脂压力经过时间的波形彼此相似的条件，并且在形成预定峰值之后显示到稳定状态的变化，并且前部和后部树脂压力随着时间的流逝形成预定的压力差。根据高剪切熔融捏合机，可以提高高剪切效率，提高材料的纳米分散体的精度，并且可以稳定和细分散/混合不混溶聚合物共混物，基于聚合物/填料的内部结构和聚合物共混物/填料基材料达到纳米级。

4. 发明授权

US08710464B2 Specimen preparation device, and control method in specimen preparation device 失效
标题翻译：样品制备装置及样品制备装置的控制方法
公开(公告)号：US08710464B2
公开(公告)日：2014-04-29
申请号：US13203807
申请日：2009-10-23
申请人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： G21K5/08
CPC分类号： G01N1/286
摘要： Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means for transferring the excised specimen and a specimen holder capable of holding the excised specimen, and the relative movement of the excised specimen and the specimen, and the like are recognized with high accuracy by image recognition. In the sampling of a minute specimen using a focused ion beam, the detection of an end point of processing for separation of the excised specimen from the specimen, and the like are automatically performed. Thus, for example, unmanned specimen excision becomes possible, and preparation of a lot of specimens becomes possible.
摘要翻译：自动进行切片样品与试样的分离等。在成为试样和除了所述区域以外的区域的切除试样的区域中，或者在用于转移切除的试样的转移装置和能够保持切除的试样的试样保持器的区域中提供用于提高图像识别精度的标记，通过图像识别以高精度识别切除的样本和样本的相对运动等。在使用聚焦离子束对分钟标本的取样中，自动执行用于将切出的样品与试样分离的处理终点的检测等。因此，例如，无人标本切除成为可能，并且可以制备大量标本。

5. 发明授权

US08629394B2 Charged particle beam device and method for correcting position with respect to charged particle beam 失效
标题翻译：带电粒子束装置和相对于带电粒子束校正位置的方法
公开(公告)号：US08629394B2
公开(公告)日：2014-01-14
申请号：US13202498
申请日：2009-10-23
申请人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： G01N31/00 , G01N33/00
CPC分类号： H01J37/28 , H01J37/153 , H01J37/3005 , H01J37/3045 , H01J37/3056 , H01J2237/15 , H01J2237/1536 , H01J2237/20207 , H01J2237/221 , H01J2237/30483 , H01J2237/31745
摘要： An object of the present invention is to eliminate a distortion in an image even if there is an angular difference between the deflection direction of the charged particle beam and the tilt axis of a specimen, and to accurately observe and process the specimen. When the deflection direction of the charged particle beam is not parallel to the tilt axis of the specimen, the deflection rotation angle to the observation direction of the charged particle beam is determined, and the deflection pattern is changed. Thereby the distortion in the image is corrected. The deflection pattern is changed to a parallelogram. A distortion-free image is obtained even if the specimen is tilted, and the specimen can be observed and processed with high accuracy. This allows automatically recognizing the position correction mark to perform observation and processing after correcting the positional relation.
摘要翻译：本发明的目的是消除图像中的变形，即使在带电粒子束的偏转方向与试样的倾斜轴之间存在角度差，也能够精确地观察和处理试样。当带电粒子束的偏转方向与试样的倾斜轴不平行时，确定与带电粒子束的观察方向的偏转旋转角度，改变偏转图案。从而校正图像中的失真。偏转图案变为平行四边形。即使样品倾斜，也能获得无变形的图像，能够高精度地观察和加工样品。这允许在校正位置关系之后自动识别位置校正标记以执行观察和处理。

6. 发明授权

US5598931A Sifter frame for powder particle sifter 失效
标题翻译：筛分机筛粉筛分机
公开(公告)号：US5598931A
公开(公告)日：1997-02-04
申请号：US335578
申请日：1994-11-07
申请人： Yasunobu Hosogoshi , Toshio Maruo , Yasuo Sakata , Katsumasa Morita , Takefumi Ibori , Harumi Kubota , Toshio Douzono , Kanemitsu Nakagawa , Kunio Sugihara , Yukio Yoshizawa , Yoshiaki Aridome , Shoji Yamanaka
发明人： Yasunobu Hosogoshi , Toshio Maruo , Yasuo Sakata , Katsumasa Morita , Takefumi Ibori , Harumi Kubota , Toshio Douzono , Kanemitsu Nakagawa , Kunio Sugihara , Yukio Yoshizawa , Yoshiaki Aridome , Shoji Yamanaka
IPC分类号： B07B1/38 , B07B1/46 , B07B1/49
CPC分类号： B07B1/4618 , B07B1/38 , B07B1/46
摘要： A sifter frame is composed of a pair of frame elements including an outer frame and an inner frame, and the outer frame is formed from a frame member having the same height and includes a pair of fine powder dropping ports, a rough powder dropping port and a rectangular fine powder receiving plate disposed in a region surrounded by these openings and one of the outer block frame members and the inner frame is fitted with the space above the receiving plate. A pair of the outer frame members of the inner frame in contact with the fine powder dropping ports of the inner frame are projected more to the rough powder dropping port than the outer block frame members of the inner frame in contact with the rough powder dropping port of the outer frame, receiving portions are provided with the outer frame in correspondence with the above arrangement so that the projected portions of the inner frame are placed thereon as well as the surfaces where the projected portions are engaged with the receiving portions are formed to an arc shape in order to that a depressing force of an upper stage sifter frame is applied to the engaging surfaces where the inner frame of a lower stage sifter frame is engaged with the outer frame thereof as a sealing force. With the above arrangement, there is provided a novel stacking type sifter frame by which the mixture of rough powder with fine powder can be securely prevented while limiting a portion to be periodicially replaced to a minimum necessary portion.
摘要翻译：筛子框架由包括外框架和内框架的一对框架元件构成，外框架由具有相同高度的框架构件形成，并且包括一对细粉末滴入口，粗粉末滴入口和设置在由这些开口包围的区域中的矩形细粉末容纳板和外块体框架构件和内框架中的一个嵌合有容纳板上方的空间。与内部框架的细粉末滴下口接触的内框架的一对外框架构件比与内部框架的外部框架构件相比突出地更多地与粗粉末滴落口外框架的接收部分设置有与上述布置相对应的外框架，使得内框架的突出部分被放置在其上，并且突出部分与接收部分接合的表面形成为为了使下级筛子框架的内框架与其外框架接合的接合表面施加上级筛分框架的压下力作为密封力。通过上述布置，提供了一种新颖的堆叠式筛子框架，通过该框架可以可靠地防止粗粉末与细粉末的混合物，同时将要周期性更换的部分限制在最小必需部分。

7. 发明授权

US5664686A Sifter frame for powder particle sifter 失效
标题翻译：筛分机筛粉筛分机
公开(公告)号：US5664686A
公开(公告)日：1997-09-09
申请号：US662065
申请日：1996-06-12
申请人： Yasunobu Hosogoshi , Toshio Maruo , Yasuo Sakata , Katsumasa Morita , Takefumi Ibori , Harumi Kubota , Toshio Douzono , Kanemitsu Nakagawa , Kunio Sugihara , Yukio Yoshizawa , Yoshiaki Aridome , Shoji Yamanaka
发明人： Yasunobu Hosogoshi , Toshio Maruo , Yasuo Sakata , Katsumasa Morita , Takefumi Ibori , Harumi Kubota , Toshio Douzono , Kanemitsu Nakagawa , Kunio Sugihara , Yukio Yoshizawa , Yoshiaki Aridome , Shoji Yamanaka
IPC分类号： B07B1/38 , B07B1/46 , B07B1/49
CPC分类号： B07B1/4618 , B07B1/38 , B07B1/46
摘要： A sifter frame is composed of a pair of frame elements including an outer frame and an inner frame, and the outer frame is formed from a frame member having the same height and includes a pair of fine powder dropping ports, a rough powder dropping port and a rectangular fine powder receiving plate disposed in a region surrounded by these openings and one of the outer block frame members and the inner frame is fitted with the space above the receiving plate. A pair of the outer frame members of the inner frame in contact with the fine powder dropping ports of the inner frame are projected more to the rough powder dropping port than the outer block frame members of the inner frame in contact with the rough powder dropping port of the outer frame, receiving portions are provided with the outer frame in correspondence with the above arrangement so that the projected portions of the inner frame are placed thereon as well as the surfaces where the projected portions are engaged with the receiving portions are formed to an arc shape in order to that a depressing force of an upper stage sifter frame is applied to the engaging surfaces where the inner frame of a lower stage sifter frame is engaged with the outer frame thereof as a sealing force. With the above arrangement, there is provided a novel stacking type sifter frame by which the mixture of rough powder with fine powder can be securely prevented while limiting a portion to be periodically replaced to a minimum necessary portion.
摘要翻译：筛子框架由包括外框架和内框架的一对框架元件构成，外框架由具有相同高度的框架构件形成，并且包括一对细粉末滴入口，粗粉末滴入口和设置在由这些开口包围的区域中的矩形细粉末容纳板和外块体框架构件和内框架中的一个嵌合有容纳板上方的空间。与内部框架的细粉末滴下口接触的内框架的一对外框架构件比与内部框架的外部框架构件相比突出地更多地与粗粉末滴落口外框架的接收部分设置有与上述布置相对应的外框架，使得内框架的突出部分被放置在其上，并且突出部分与接收部分接合的表面形成为为了使下级筛子框架的内框架与其外框架接合的接合表面施加上级筛分框架的压下力作为密封力。通过上述结构，提供了一种新颖的堆叠式筛子框架，通过该框架可以可靠地防止粗粉末与细粉末的混合，同时将要定期更换的部分限制在最小必需部分。

8. 发明授权

US5492658A Gate-cut and ejection control apparatus and control method for an injection molding machine 失效
标题翻译：注射成型机的切断喷射控制装置及控制方法
公开(公告)号：US5492658A
公开(公告)日：1996-02-20
申请号：US356207
申请日：1994-12-19
申请人： Masakazu Ohno , Yukio Yoshizawa , Shoji Miyajima , Sumio Sato , Toshio Inage , Motohiro Kobayashi
发明人： Masakazu Ohno , Yukio Yoshizawa , Shoji Miyajima , Sumio Sato , Toshio Inage , Motohiro Kobayashi
IPC分类号： B29C45/38 , B29C45/40 , B29C45/76
CPC分类号： B29C45/40 , B29C45/38 , B29C45/7626 , B29C2045/764 , Y10S425/051
摘要： The present intention intends to operate an ejector which carries out gate cut and product ejection in an injection molding machine, at optimal speeds, respectively. According to the present invention, a control unit for controlling hydraulic or electric drive means for operating one or more than one ejector pin comprises operation speed setting means for gate cut and another operation speed setting means for product ejection. Such a structure enables to carry out gate cut by operating an ejector unit controlled by an ejector unit operation speed setting means for a gate cut and, subsequently, to carry out a product ejection from metallic molds by operating the ejector unit controlled by another ejector unit operation speed setting means for product ejection. The ejector unit is set at a comparatively high operation speed for gate cut so that no gate trace will remain, and at a comparatively low operation speed for product ejection so that no cracks will be generated in the product.
摘要翻译：目的在于以最佳速度分别在注射成型机中进行浇口切割和产品喷射的喷射器。根据本发明，用于控制用于操作一个或多个顶针的液压或电驱动装置的控制单元包括用于闸板切割的操作速度设定装置和用于产品喷射的另一操作速度设定装置。这种结构能够通过操作由喷射器单元操作的喷射器单元进行闸板切割，喷射器单元操作速度设定装置用于浇口切割，并且随后通过操作由另一个喷射器单元控制的喷射器单元从金属模具执行产品喷射用于产品喷射的操作速度设定装置。喷射器单元被设置为相对较高的操作速度以进行栅极切割，使得不会留下栅极迹线，并且以相对低的操作速度进行产品喷射，使得产品中不会产生裂纹。

9. 发明申请

US20110309245A1 SPECIMEN PREPARATION DEVICE, AND CONTROL METHOD IN SPECIMEN PREPARATION DEVICE 失效
标题翻译：样品制备装置，以及样品制备装置中的控制方法
公开(公告)号：US20110309245A1
公开(公告)日：2011-12-22
申请号：US13203807
申请日：2009-10-23
申请人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： G21K5/10 , G01N23/02
CPC分类号： G01N1/286
摘要： Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means for transferring the excised specimen and a specimen holder capable of holding the excised specimen, and the relative movement of the excised specimen and the specimen, and the like are recognized with high accuracy by image recognition. In the sampling of a minute specimen using a focused ion beam, the detection of an end point of processing for separation of the excised specimen from the specimen, and the like are automatically performed. Thus, for example, unmanned specimen excision becomes possible, and preparation of a lot of specimens becomes possible.
摘要翻译：自动进行切片样品与试样的分离等。在成为试样和除了所述区域以外的区域的切除试样的区域中，或者在用于转移切除的试样的转移装置和能够保持切除的试样的试样保持器的区域中提供用于提高图像识别精度的标记，通过图像识别以高精度识别切除的样本和样本的相对运动等。在使用聚焦离子束对分钟标本的取样中，自动执行用于将切出的样品与试样分离的处理终点的检测等。因此，例如，无人标本切除成为可能，并且可以制备大量标本。

10. 发明申请

US20110297826A1 CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING POSITION WITH RESPECT TO CHARGED PARTICLE BEAM 失效
标题翻译：充电颗粒光束装置和相对于充电颗粒光束校正位置的方法
公开(公告)号：US20110297826A1
公开(公告)日：2011-12-08
申请号：US13202498
申请日：2009-10-23
申请人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/153 , H01J37/3005 , H01J37/3045 , H01J37/3056 , H01J2237/15 , H01J2237/1536 , H01J2237/20207 , H01J2237/221 , H01J2237/30483 , H01J2237/31745
摘要： An object of the present invention is to eliminate a distortion in an image even if there is an angular difference between the deflection direction of the charged particle beam and the tilt axis of a specimen, and to accurately observe and process the specimen. When the deflection direction of the charged particle beam is not parallel to the tilt axis of the specimen, the deflection rotation angle to the observation direction of the charged particle beam is determined, and the deflection pattern is changed. Thereby the distortion in the image is corrected. The deflection pattern is changed to a parallelogram. A distortion-free image is obtained even if the specimen is tilted, and the specimen can be observed and processed with high accuracy. This allows automatically recognizing the position correction mark to perform observation and processing after correcting the positional relation.
摘要翻译：本发明的目的是消除图像中的变形，即使在带电粒子束的偏转方向与试样的倾斜轴之间存在角度差，也能够精确地观察和处理试样。当带电粒子束的偏转方向与试样的倾斜轴不平行时，确定与带电粒子束的观察方向的偏转旋转角度，改变偏转图案。从而校正图像中的失真。偏转图案变为平行四边形。即使样品倾斜，也能获得无变形的图像，能够高精度地观察和加工样品。这允许在校正位置关系之后自动识别位置校正标记以执行观察和处理。

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