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    • 1. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US5859364A
    • 1999-01-12
    • US656075
    • 1996-05-31
    • Akitoshi TodaTakeshi Konada
    • Akitoshi TodaTakeshi Konada
    • G01B9/04G01B21/30G01Q30/04G01Q60/18G01Q70/14G01B11/30
    • G01Q60/22B82Y20/00B82Y35/00G01B9/04Y10S977/87
    • A slide glass with a sample rested thereon is placed on an interior total reflection prism with a matching oil between them. A laser beam is applied through a prism to the sample, and evanescent light is generated on the sample surface. Above the sample, a probe supported at a free end of a cantilever is located, and an objective is provided above the probe. The objective has an angular aperture exceeding a vertical angle of the probe, where the angular aperture indicates an angle from a focal point of the objective to a diameter of entrance pupil. A scattering light detection lens barrel is provided above the objective, and cooperates with the objective to constitute a scattering light detection optical system. The optical system detects scattering light generated when the probe is introduced to the evanescent light.
    • 放置在其上的样品的载玻片放置在内部全反射棱镜之间,其间具有匹配的油。 通过棱镜将激光束施加到样品,并且在样品表面上产生ev逝的光。 在样品上方,位于悬臂的自由端处的探针位于探针上方。 该物镜的角度孔径超过探头的垂直角度,其中角度孔径指示从物镜的焦点到入射光瞳直径的角度。 在物镜上方设有散射光检测镜筒,与物镜配合构成散射光检测光学系统。 光学系统检测当探针被引入渐逝光时产生的散射光。
    • 3. 发明授权
    • Measuring device in a scanning probe microscope
    • 扫描探针显微镜中的测量装置
    • US5136162A
    • 1992-08-04
    • US730475
    • 1991-07-16
    • Hirofumi MiyamotoTsugiko TakaseHiroshi KajimuraAkitoshi Toda
    • Hirofumi MiyamotoTsugiko TakaseHiroshi KajimuraAkitoshi Toda
    • G01B7/34G01N37/00G01Q30/18G01Q60/10G01Q70/08G05D3/12H01J37/252H01J37/26H01J37/28H01L41/09
    • G01Q60/16B82Y35/00G01Q10/04G01Q20/04Y10S977/86
    • A probe for scanning a sample is attached to a probe electrode supported by a cylindrical piezoelectric actuator. The actuator has four drive electrodes on its periphery, and deforms in the three axial directions in accordance with the voltage applied to the drive electrodes. A girdling electrode is provided between the actuator and the probe electrode. The girdling electrode is insulated from the probe electrode and the drive electrodes by insulator members provided on its upper and lower surfaces. A bias voltage signal S1 is input to an operational amplifier of which the output is connected to the girdling electrode. The amplifier is a voltage follower for equalizing the potential of the girdling electrode to that of the bias voltage signal S1. An operational amplifier has a non-inversion input to which the bias voltage signal S1 is input, and an inversion input connected to the probe electrode. While equalizing the potential of the probe electrode to that of the bias input voltage S1, the amplifier converts a tunnel current flowing between the probe and the sample to a voltage signal S2. An operational amplifier subtracts a bias voltage component from the voltage signal S2, and outputs a tunnel current signal S3.
    • 用于扫描样品的探针连接到由圆柱形压电致动器支撑的探针电极。 致动器在其周围具有四个驱动电极,并且根据施加到驱动电极的电压在三个轴向方向上变形。 在致动器和探针电极之间提供环形电极。 环形电极通过设置在其上表面和下表面上的绝缘体与探针电极和驱动电极绝缘。 偏置电压信号S1输入到输出与环绕电极连接的运算放大器。 放大器是用于使环形电极的电位与偏置电压信号S1的电位相等的电压跟随器。 运算放大器具有输入偏置电压信号S1的非反相输入端和连接到探针电极的反相输入端。 在使探针电极的电位与偏置输入电压S1的电位相等的同时,放大器将在探头和样品之间流动的隧道电流转换为电压信号S2。 运算放大器从电压信号S2中减去偏置电压分量,并输出隧道电流信号S3。
    • 8. 发明授权
    • Cantilever for scanning probe microscopy
    • 悬臂扫描探针显微镜
    • US06694805B2
    • 2004-02-24
    • US10122205
    • 2002-04-16
    • Koichi ShiotaniMasashi KitazawaKenji SatoAkitoshi Toda
    • Koichi ShiotaniMasashi KitazawaKenji SatoAkitoshi Toda
    • G01B528
    • G01Q70/16G01Q70/10
    • A cantilever for Scanning Probe Microscopy including: a support portion; a lever portion extended from the support portion; and a probe portion provided at an free end of the lever portion, said probe portion being configured by two triangular thin plates each having one side respectively being one of the different two sides of a V-like notch formed on the free end of the lever, where the thin plates are caused to face each other while having the other side in common. The cantilever for Scanning Probe Microscopy is thereby achieved as having a probe portion which is light in weight and high in rigidity and is readily positioned in alignment and by which measurement at high resolution is steadily possible
    • 扫描探针显微镜的悬臂包括:支撑部分; 从所述支撑部延伸的杆部; 以及探针部,设置在所述杆部的自由端,所述探针部由两个三角形薄板构成,所述两个三角形薄板分别具有形成在所述杆的自由端上的V形切口的不同两侧之一 ,其中使薄板彼此面对,同时使另一侧相同。 因此,扫描探针显微镜的悬臂具有重量轻且刚性高的探针部分,并且容易定位成对准,并且可以稳定地以高分辨率进行测量