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    • 3. 发明授权
    • Magnetic recording medium and method of manufacturing
    • 磁记录介质及其制造方法
    • US09028704B2
    • 2015-05-12
    • US13659749
    • 2012-10-24
    • Kazutaka TakizawaAkira WatanabeKaori KimuraTakeshi IwasakiAkihiko Takeo
    • Kazutaka TakizawaAkira WatanabeKaori KimuraTakeshi IwasakiAkihiko Takeo
    • B44C1/22G11B5/31
    • G11B5/3163G11B5/3116G11B5/82G11B5/855
    • A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
    • 磁记录介质的制造方法如下:在基板上形成磁记录层; 形成下层和金属剥离层,其与磁性记录层上的下层依次形成合金,并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层,并从磁记录层的上侧除去在合金剥离层上形成的层。
    • 10. 发明授权
    • Manufacturing method of magnetic recording medium
    • 磁记录介质的制造方法
    • US08703621B2
    • 2014-04-22
    • US13542072
    • 2012-07-05
    • Kaori KimuraKazutaka TakizawaMasatoshi SakuraiAkihiko Takeo
    • Kaori KimuraKazutaka TakizawaMasatoshi SakuraiAkihiko Takeo
    • H01L21/302H01L21/461
    • G11B5/855
    • A manufacturing method of a magnetic recording medium according to one embodiment includes forming a mask layer having a pattern regularly arranged in a longitudinal direction on a magnetic recording medium containing a substrate and a magnetic recording layer, forming a recording portion having a magnetic pattern and a non-recording portion by patterning the magnetic recording layer, and submitting the mask layer to a peeling liquid to peel the mask layer. The mask layer contains a lamination layer of a lift-off layer, a first hard mask, and a second hard mask. The second hard mask is formed of a material that is different from the material of the first hard disk and the material is dissolvable in the same peeling liquid as the peeling liquid that dissolves the lift-off layer.
    • 根据一个实施例的磁记录介质的制造方法包括在包含基板和磁记录层的磁记录介质上形成具有沿纵向规则排列的图案的掩模层,形成具有磁性图案的记录部分和 通过图案化磁记录层,并将掩模层提交到剥离液体以剥离掩模层,从而形成非记录部分。 掩模层包含剥离层,第一硬掩模和第二硬掩模的层压层。 第二硬掩模由与第一硬盘的材料不同的材料形成,并且该材料可溶解在与溶解剥离层的剥离液相同的剥离液中。