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    • 3. 发明授权
    • Air bearing for MEMS based motor
    • 基于MEMS的电机的空气轴承
    • US07088019B2
    • 2006-08-08
    • US10730472
    • 2003-12-08
    • Akio TakadaChing Biing YeoCheow Tong ChengShun Kayama
    • Akio TakadaChing Biing YeoCheow Tong ChengShun Kayama
    • H02K7/08
    • H02K21/24B81B5/00B81B2201/0242B81B2201/038F16C17/045F16C17/10F16C33/107H02K7/088
    • A MEMS (micro-electromechanical system) device having a rotor 44, a stator 43 and a shaft 27 connected to the stator 43 and around which the rotor 44 rotates. Grooves 47 are formed in a portion of the rotor 44, such that when the rotor 44 rotates an air bearing is formed for supporting the rotor 44 and maintaining its distance from the shaft 27 and stator 43. The rotor 44 is formed from joining two substrates 13, 23. One of the substrates 13 includes a surface having openings 7 including frustoconical walls, and one of the substrates 23 includes a surface having openings 15 including walls perpendicular to the surface of the substrate. The openings in the two substrates are in register with each other so that pairs of the openings form chambers 24. Each chamber 24 is provided with a shaft 27, which is positioned with a wide section of the shaft trapped in the chamber 24. The wide section of the shaft has a frustoconical surface facing the frustoconical walls of the chamber 24.
    • 具有转子44,定子43和连接到定子43并且转子44旋转的轴27的MEMS(微机电系统)装置。 凹槽47形成在转子44的一部分中,使得当转子44旋转时,形成用于支撑转子44并保持其与轴27和定子43的距离的空气轴承。 转子44通过连接两个基板13,23而形成。 基板13中的一个包括具有包括截头圆锥形壁的开口7的表面,并且其中一个基板23包括具有开口15的表面,该表面具有垂直于基板表面的壁。 两个基板中的开口彼此对准,使得成对的开口形成室24。 每个室24设置有轴27,轴27被定位成具有被捕获在室24中的轴的宽部分。 轴的宽部分具有面向腔室24的截头圆锥形壁的截头圆锥体表面。