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1. 发明授权

US08546770B2 Charged particle beam device and sample observation method 有权
标题翻译：带电粒子束装置和样品观察方法
公开(公告)号：US08546770B2
公开(公告)日：2013-10-01
申请号：US13515717
申请日：2010-11-11
申请人： Akinari Morikawa , Takeshi Sato , Eiko Nakazawa , Susumu Kuwabata
发明人： Akinari Morikawa , Takeshi Sato , Eiko Nakazawa , Susumu Kuwabata
IPC分类号： H01J40/00 , H01J47/00
CPC分类号： H01J37/305 , G01N1/2813 , H01J37/28 , H01J2237/004 , H01J2237/0203 , H01J2237/31745 , H01J2237/31749
摘要： There is provided a charged particle beam device which has a mechanism adjusting the shape of an ionic liquid droplet to be adhered to a sample and the thickness of a film of the ionic liquid, in such a manner that they are suitable for various types of observations by an electronic microscope and the like, and for processing using ion beams. The charged particle beam device is characterized in that it includes an ionic liquid holding member having an opening, an ionic liquid supplying unit for filling an ionic liquid into the opening, an observation unit for observing an adhesion state of the ionic liquid, and charged particle beam generating units for radiating charged particle beams, and can adjust the thickness of an ionic liquid droplet to be filled in the opening, when the charged particle beam device observes a sample in a state where it is floating in the ionic liquid by being dispersed into the ionic liquid or on a surface of the ionic liquid.
摘要翻译：提供一种带电粒子束装置，其具有调节待粘附到样品上的离子液滴的形状和离子液体的膜厚度的机构，使得它们适合于各种类型的观察通过电子显微镜等，并且使用离子束进行处理。带电粒子束装置的特征在于它包括具有开口的离子液体保持构件，用于将离子液体填充到开口中的离子液体供给单元，用于观察离子液体的粘附状态的观察单元和带电粒子用于照射带电粒子束的光束产生单元，并且当带电粒子束装置通过分散在离子液体中漂浮在离子液体中的状态下观察样品时，可以调节要填充在开口中的离子液滴的厚度离子液体或离子液体的表面上。

2. 发明申请

US20120292507A1 Charged Particle Beam Device and Sample Observation Method 有权
标题翻译：带电粒子束装置和样品观察方法
公开(公告)号：US20120292507A1
公开(公告)日：2012-11-22
申请号：US13515717
申请日：2010-11-11
申请人： Akinari Morikawa , Takeshi Sato , Eiko Nakazawa , Susumu Kuwabata
发明人： Akinari Morikawa , Takeshi Sato , Eiko Nakazawa , Susumu Kuwabata
IPC分类号： G01N23/20
CPC分类号： H01J37/305 , G01N1/2813 , H01J37/28 , H01J2237/004 , H01J2237/0203 , H01J2237/31745 , H01J2237/31749
摘要： There is provided a charged particle beam device which has a mechanism adjusting the shape of an ionic liquid droplet to be adhered to a sample and the thickness of a film of the ionic liquid, in such a manner that they are suitable for various types of observations by an electronic microscope and the like, and for processing using ion beams.The charged particle beam device is characterized in that it includes an ionic liquid holding member having an opening, an ionic liquid supplying unit for filling an ionic liquid into the opening, an observation unit for observing an adhesion state of the ionic liquid, and charged particle beam generating units for radiating charged particle beams, and can adjust the thickness of an ionic liquid droplet to be filled in the opening, when the charged particle beam device observes a sample in a state where it is floating in the ionic liquid by being dispersed into the ionic liquid or on a surface of the ionic liquid.
摘要翻译：提供一种带电粒子束装置，其具有调节待粘附到样品上的离子液滴的形状和离子液体的膜厚度的机构，使得它们适合于各种类型的观察通过电子显微镜等，并且使用离子束进行处理。带电粒子束装置的特征在于它包括具有开口的离子液体保持构件，用于将离子液体填充到开口中的离子液体供给单元，用于观察离子液体的粘附状态的观察单元和带电粒子用于照射带电粒子束的光束产生单元，并且当带电粒子束装置通过分散在离子液体中漂浮在离子液体中的状态下观察样品时，可以调节要填充在开口中的离子液滴的厚度离子液体或离子液体的表面上。

3. 发明授权

US08785883B2 Transmission electron microscope, and method of observing specimen 有权
标题翻译：透射电子显微镜，观察样品的方法
公开(公告)号：US08785883B2
公开(公告)日：2014-07-22
申请号：US12918619
申请日：2009-04-27
申请人： Eiko Nakazawa , Hiroyuki Kobayashi , Susumu Kuwabata
发明人： Eiko Nakazawa , Hiroyuki Kobayashi , Susumu Kuwabata
IPC分类号： G01N23/00 , G21K5/08 , H01J37/26 , H01J37/30
CPC分类号： H01J37/20 , G01N1/2813 , G01N23/04 , G01N23/2251 , G01N2001/4027 , H01J37/26 , H01J37/261 , H01J37/3007 , H01J2237/2002 , H01J2237/20214 , H01J2237/204 , H01J2237/206
摘要： Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
摘要翻译：提供能够在不使样本变形的情况下观察样本的形状的装置。通过允许具有开口的样本保持构件（例如，微网和网格）来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。此外，在试样保持构件附近设置有注入离子液体（离子液体导入机构）和/或电极的机构。当电极施加电压时，样品在离子液体中移动或变形。可以观察样品移动或变形。此外，在试样保持构件附近，设置蒸发装置，以使得能够在蒸发时将试样充入离子液体中。此外，在样本保持构件附近，提供微毛细管以将液态样本充入离子液体中。注意，试样保持构件被设计成可旋转。

4. 发明申请

US20110057100A1 Transmission Electron Microscope, and Method of Observing Specimen 有权
标题翻译：透射电子显微镜和观察样品的方法
公开(公告)号：US20110057100A1
公开(公告)日：2011-03-10
申请号：US12918619
申请日：2009-04-27
申请人： Eiko Nakazawa , Hiroyuki Kobayashi , Susumu Kuwabata
发明人： Eiko Nakazawa , Hiroyuki Kobayashi , Susumu Kuwabata
IPC分类号： G01N23/04 , G01N23/00
CPC分类号： H01J37/20 , G01N1/2813 , G01N23/04 , G01N23/2251 , G01N2001/4027 , H01J37/26 , H01J37/261 , H01J37/3007 , H01J2237/2002 , H01J2237/20214 , H01J2237/204 , H01J2237/206
摘要： Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
摘要翻译：提供能够在不使样本变形的情况下观察样本的形状的装置。通过允许具有开口的样本保持构件（例如，微网和网格）来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。此外，在试样保持构件附近设置有注入离子液体（离子液体导入机构）和/或电极的机构。当电极施加电压时，样品在离子液体中移动或变形。可以观察样品移动或变形。此外，在试样保持构件附近，设置蒸发装置，以使得能够在蒸发时将试样充入离子液体中。此外，在样本保持部件附近，设置微毛细管，以将液态标本充入离子液体。注意，试样保持构件被设计成可旋转。

5. 发明申请

US20090218507A1 CHARGED PARTICLE BEAM DEVICE 失效
标题翻译：充电颗粒光束装置
公开(公告)号：US20090218507A1
公开(公告)日：2009-09-03
申请号：US12389838
申请日：2009-02-20
申请人： Akiko Fujisawa , Hiroyuki Kobayashi , Eiko Nakazawa
发明人： Akiko Fujisawa , Hiroyuki Kobayashi , Eiko Nakazawa
IPC分类号： H01J3/14
CPC分类号： H01J37/1471 , H01J37/26 , H01J2237/024 , H01J2237/065 , H01J2237/1501 , H01J2237/2802
摘要： The present invention provides a charged particle beam device which can effectively restrain misalignment of an optical axis even if a position of an anode is changed. The present invention is a charged particle beam device comprising a cathode provided with a charged particle source which emits a charged particle, an anode which applies an electric field to the emitted charged particle, a charged particle beam deflector which deflects an orbit of a charged particle beam having passed the anode, and a charged particle beam detector which detects the charged particle beam from a sample to which the charged particle is irradiated, wherein a distance changing mechanism which changes a distance between the cathode and the anode, corresponding to a charged particle amount emitted from the charged particle source and a deflection amount control mechanism which detects a condition of the deflector under which the charged particle dose detected from the sample scanned by deflecting the charged particle beam in the changed distance becomes a desired size and controls deflection of the deflector at sample measurement on the basis of the condition are provided.
摘要翻译：本发明提供一种带电粒子束装置，即使改变阳极的位置，也能够有效地抑制光轴的未对准。本发明是一种带电粒子束装置，它包括一个阴极，该阴极设有带电粒子源，该粒子源发射一个带电粒子，一个向发射的带电粒子施加电场的阳极，一个带电粒子束偏转器，它使带电粒子的轨道偏转通过阳极的光束和从被照射带电粒子的样品检测带电粒子束的带电粒子束检测器，其中改变对应于带电粒子的阴极和阳极之间的距离的距离改变机构从所述带电粒子源发射的量;以及偏转量控制机构，其检测所述偏转器的状态，在所述偏转量条件下，通过使所述带电粒子束在变化的距离偏转而被扫描的样本中检测到的带电粒子剂量成为期望的尺寸，提供了基于条件的样品测量的偏转器。

6. 发明授权

US06875983B2 Electron microscope and means to set observation conditions 有权
标题翻译：电子显微镜和设置观察条件的手段
公开(公告)号：US06875983B2
公开(公告)日：2005-04-05
申请号：US10098774
申请日：2002-03-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.
摘要翻译：本发明的目的是提供一种能够在重新开始样品观察时提高工作效率的电子显微镜。一种用于控制观察条件设置装置的控制单元，包括电子枪控制单元，照射透镜控制单元，物镜控制单元，放大透镜系统控制单元和样本台控制单元，被提供。当指定某个样品的图像数据时，检索样品的观察条件数据。然后，根据观察条件数据，在电子显微镜上自动恢复与保存样品的图像数据时相同的观察条件。结果，与存储的图像相同的图像被忠实地恢复。

7. 发明授权

US09013572B2 Method for observing sample and electronic microscope 有权
标题翻译：观察样品和电子显微镜的方法
公开(公告)号：US09013572B2
公开(公告)日：2015-04-21
申请号：US13126638
申请日：2009-10-19
申请人： Akiko Fujisawa , Hiroyuki Kobayashi , Eiko Nakazawa
发明人： Akiko Fujisawa , Hiroyuki Kobayashi , Eiko Nakazawa
IPC分类号： G06K9/00 , H04N7/18 , H01J37/28 , H01J37/22
CPC分类号： G02B21/008 , H01J37/222 , H01J37/28 , H01J2237/221 , H01J2237/226
摘要： A sample observation method of the present invention comprises a step of defining, with respect to an electron microscope image, an outline of an observation object with respect to a sample (3), or a plurality of points located along the outline, and a step of arranging a plurality of fields of view for an electron microscope along the outline, wherein electron microscope images of the plurality of fields of view that have been defined and arranged along the shape of the observation object through each of the above-mentioned steps are acquired. It is thus made possible to provide a sample observation method that is capable of selectively acquiring, with respect to observation objects of various shapes, an electron microscope image based on a field of view definition that is in accordance with the shape of the observation object, as well as an electron microscope apparatus that realizes such a sample observation method.
摘要翻译：本发明的样本观察方法包括相对于电子显微镜图像定义关于样本（3）的观察对象的轮廓或沿着轮廓的多个点的步骤，以及步骤沿着轮廓布置电子显微镜的多个视野，其中通过上述步骤沿着观察对象的形状定义和布置的多个视场的电子显微镜图像被获取。因此，能够提供一种能够根据与观察对象的形状相对应的视场定义，针对各种形状的观察对象选择性地获取电子显微镜图像的样本观察方法，以及实现这种样品观察方法的电子显微镜装置。

8. 发明授权

US08164058B2 Specimen observation method 有权
标题翻译：标本观察法
公开(公告)号：US08164058B2
公开(公告)日：2012-04-24
申请号：US12501822
申请日：2009-07-13
申请人： Eiko Nakazawa , Masahiro Tomita , Hiroyuki Kobayashi
发明人： Eiko Nakazawa , Masahiro Tomita , Hiroyuki Kobayashi
IPC分类号： G21K7/00
CPC分类号： G01N23/2252 , H01J37/222 , H01J37/226 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/221 , H01J2237/2807
摘要： It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.
摘要翻译：本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域在带电粒子束装置中，其代表是电子显微镜。在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置通过用带电粒子束照射检测X射线。

9. 发明授权

US07041977B2 Electron microscope 失效
公开(公告)号：US07041977B2
公开(公告)日：2006-05-09
申请号：US11052200
申请日：2005-02-08
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.

10. 发明申请

US20060011838A1 Sample observation method and transmission electron microscope 有权
标题翻译：样品观察法和透射电子显微镜
公开(公告)号：US20060011838A1
公开(公告)日：2006-01-19
申请号：US11228400
申请日：2005-09-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： G21K7/00
CPC分类号： G06K9/00147 , H01J37/26 , H01J2237/221
摘要： Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
摘要翻译：对作为参考图像倾斜的物体的透射图像和通过该透射图像的极坐标变换获得的图像进行准备，并且通过样本中的物体的透射图像的极坐标变换获得的图像建立相关性。

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