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    • 3. 发明授权
    • Transmission electron microscope, and method of observing specimen
    • 透射电子显微镜,观察样品的方法
    • US08785883B2
    • 2014-07-22
    • US12918619
    • 2009-04-27
    • Eiko NakazawaHiroyuki KobayashiSusumu Kuwabata
    • Eiko NakazawaHiroyuki KobayashiSusumu Kuwabata
    • G01N23/00G21K5/08H01J37/26H01J37/30
    • H01J37/20G01N1/2813G01N23/04G01N23/2251G01N2001/4027H01J37/26H01J37/261H01J37/3007H01J2237/2002H01J2237/20214H01J2237/204H01J2237/206
    • Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
    • 提供能够在不使样本变形的情况下观察样本的形状的装置。 通过允许具有开口的样本保持构件(例如,微网和网格)来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。 此外,在试样保持构件附近设置有注入离子液体(离子液体导入机构)和/或电极的机构。 当电极施加电压时,样品在离子液体中移动或变形。 可以观察样品移动或变形。 此外,在试样保持构件附近,设置蒸发装置,以使得能够在蒸发时将试样充入离子液体中。 此外,在样本保持构件附近,提供微毛细管以将液态样本充入离子液体中。 注意,试样保持构件被设计成可旋转。
    • 5. 发明申请
    • Transmission Electron Microscope, and Method of Observing Specimen
    • 透射电子显微镜和观察样品的方法
    • US20110057100A1
    • 2011-03-10
    • US12918619
    • 2009-04-27
    • Eiko NakazawaHiroyuki KobayashiSusumu Kuwabata
    • Eiko NakazawaHiroyuki KobayashiSusumu Kuwabata
    • G01N23/04G01N23/00
    • H01J37/20G01N1/2813G01N23/04G01N23/2251G01N2001/4027H01J37/26H01J37/261H01J37/3007H01J2237/2002H01J2237/20214H01J2237/204H01J2237/206
    • Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
    • 提供能够在不使样本变形的情况下观察样本的形状的装置。 通过允许具有开口的样本保持构件(例如,微网和网格)来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。 此外,在试样保持构件附近设置有注入离子液体(离子液体导入机构)和/或电极的机构。 当电极施加电压时,样品在离子液体中移动或变形。 可以观察样品移动或变形。 此外,在试样保持构件附近,设置蒸发装置,以使得能够在蒸发时将试样充入离子液体中。 此外,在样本保持部件附近,设置微毛细管,以将液态标本充入离子液体。 注意,试样保持构件被设计成可旋转。
    • 9. 发明申请
    • Charged Particle Beam Device and Sample Observation Method
    • 带电粒子束装置和样品观察方法
    • US20120292507A1
    • 2012-11-22
    • US13515717
    • 2010-11-11
    • Akinari MorikawaTakeshi SatoEiko NakazawaSusumu Kuwabata
    • Akinari MorikawaTakeshi SatoEiko NakazawaSusumu Kuwabata
    • G01N23/20
    • H01J37/305G01N1/2813H01J37/28H01J2237/004H01J2237/0203H01J2237/31745H01J2237/31749
    • There is provided a charged particle beam device which has a mechanism adjusting the shape of an ionic liquid droplet to be adhered to a sample and the thickness of a film of the ionic liquid, in such a manner that they are suitable for various types of observations by an electronic microscope and the like, and for processing using ion beams.The charged particle beam device is characterized in that it includes an ionic liquid holding member having an opening, an ionic liquid supplying unit for filling an ionic liquid into the opening, an observation unit for observing an adhesion state of the ionic liquid, and charged particle beam generating units for radiating charged particle beams, and can adjust the thickness of an ionic liquid droplet to be filled in the opening, when the charged particle beam device observes a sample in a state where it is floating in the ionic liquid by being dispersed into the ionic liquid or on a surface of the ionic liquid.
    • 提供一种带电粒子束装置,其具有调节待粘附到样品上的离子液滴的形状和离子液体的膜厚度的机构,使得它们适合于各种类型的观察 通过电子显微镜等,并且使用离子束进行处理。 带电粒子束装置的特征在于它包括具有开口的离子液体保持构件,用于将离子液体填充到开口中的离子液体供给单元,用于观察离子液体的粘附状态的观察单元和带电粒子 用于照射带电粒子束的光束产生单元,并且当带电粒子束装置通过分散在离子液体中漂浮在离子液体中的状态下观察样品时,可以调节要填充在开口中的离子液滴的厚度 离子液体或离子液体的表面上。