专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07494286B2 Laser module and method for manufacturing the same 失效
标题翻译：激光模块及其制造方法
公开(公告)号：US07494286B2
公开(公告)日：2009-02-24
申请号：US10534438
申请日：2003-11-12
申请人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
发明人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
IPC分类号： G02B6/36 , G02B6/12
CPC分类号： G02B6/42 , G02B6/4239 , G02F1/3775 , H01S5/0092 , H01S5/02208 , H01S5/02252
摘要： Efficient coupling structures are important for the realization of reliable and economical integrated optical circuit applications. This paper presents a new approach for the simulation of an anisotropic plasma etching process in silicon based on a string point model as well as the realization and the results of etching processes in silicon, silicon dioxide, silicon oxinitride and silicon nitride which are fundamental for the fabrication of coupling structures. The connections to active and passive components were fabricated using plasma etching and deposition processes which are compatible with C-MOS or BIC-MOS technology. The realized waveguide-detector structures with vertical and horizontal silicon PIN-diodes exhibit efficiencies close to 90% for wavelength below 1.1 micrometers. The diodes can detect signals of modulation frequencies of more than 400 MHz due to horizontal light injection and capacitances less than 1 pF. Fiber-detector coupling structures with U-grooves for the fiber alignment containing such detectors show similar results. The necessary accuracy of the etched depth of the U-grooves for fiber-detector coupling is +/−2 micrometers in contrast to a fiber-waveguide coupling which requires a reproducible accuracy of the process better than 0.5 micrometers. A reduction of coupling losses due to the necessary close tolerances is accomplished by waveguide tapers. The simulation, realization and results for such structures are presented in the paper. Also laser diode—fiber connections require extremely close tolerances. The design of a micro-optical bench realized by plasma etching and a selfaligning soldering process is presented, which allows such tolerances.
摘要翻译：高效的耦合结构对于实现可靠且经济的集成光电路应用很重要。本文提出了一种基于串点模型模拟硅中各向异性等离子体蚀刻工艺的新方法，以及硅，二氧化硅，氮氧化硅和氮化硅中蚀刻过程的实现和结果，这些都是基于耦合结构的制造。使用与C-MOS或BIC-MOS技术兼容的等离子体蚀刻和沉积工艺制造与主动和无源部件的连接。实现的具有垂直和水平硅PIN二极管的波导检测器结构对于低于1.1微米的波长表现出接近90％的效率。由于水平光注入和小于1 pF的电容，二极管可以检测超过400 MHz的调制频率信号。具有用于包含这种检测器的光纤对准的U形槽的光纤检测器耦合结构显示相似的结果。与光纤 - 波导耦合相比，用于光纤 - 检测器耦合的U形槽的蚀刻深度所需的精度为+/- 2微米，这需要该工艺的可重复精度优于0.5微米。由于必要的紧公差导致的耦合损耗的减小是通过波导锥度实现的。本文提出了这种结构的仿真，实现和结果。激光二极管 - 光纤连接也需要极其公差。提出了通过等离子体蚀刻和自对准焊接工艺实现的微光学台架的设计，其允许这种公差。

2. 发明申请

US20060034570A1 Laser module and its fabrication method 失效
标题翻译：激光模组及其制作方法
公开(公告)号：US20060034570A1
公开(公告)日：2006-02-16
申请号：US10534438
申请日：2003-11-12
申请人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
发明人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
IPC分类号： G02B6/36
CPC分类号： G02B6/42 , G02B6/4239 , G02F1/3775 , H01S5/0092 , H01S5/02208 , H01S5/02252
摘要： A laser module includes: a sub-mount; a semiconductor laser secured to a surface of the sub-mount; and an optical waveguide device joined to the surface of the sub-mount by an adhesive layer so that the optical waveguide device is coupled optically with the semiconductor laser. A first groove is formed at the surface of the sub-mount at a region corresponding to an incident end side of the optical waveguide device, the first groove being formed parallel to an outgoing end face of the semiconductor laser with a predetermined space therefrom. The adhesive layer is formed so that an end of the adhesive layer on the incident end side of the optical waveguide device is positioned within a range from a position abutting with a distal edge of the first groove distant from the semiconductor laser to an inside of the first groove and does not contact with the outgoing end face of the semiconductor laser. Since the adhesive layer can be positioned within a preferable range, coupling misalignment resulting from distortion due to a temperature change can be suppressed.
摘要翻译：激光模块包括：子安装座; 半导体激光器，其固定到所述副安装座的表面; 以及通过粘合层与子座的表面接合的光波导器件，使得光波导器件与半导体激光器光耦合。在与所述光波导装置的入射端侧对应的区域的所述副安装座的表面形成有第一槽，所述第一槽与所述半导体激光器的出射端面平行地形成有预定的间隔。粘合剂层形成为使得光波导装置的入射端侧的粘合剂层的端部位于与远离半导体激光器的第一凹槽的远端边缘邻接的位置的范围内并且不与半导体激光器的出射端面接触。由于粘合剂层可以位于优选范围内，所以可以抑制由于温度变化引起的变形引起的耦合失准。

3. 发明授权

US07082146B2 Device and method for inspecting wavelength-variable semiconductor laser, and method for inspecting coherent source 失效
标题翻译：用于检测波长可变半导体激光器的装置和方法以及检查相干光源的方法
公开(公告)号：US07082146B2
公开(公告)日：2006-07-25
申请号：US11197624
申请日：2005-08-04
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： H01S3/10
CPC分类号： G01J1/4257 , H01S5/0014 , H01S5/005 , H01S5/0092 , H01S5/06256
摘要： A method for easily and quickly evaluating the wavelength variability properties of a wavelength-variable semiconductor laser is provided. An inspection device includes a power source for supplying current to a wavelength-variable DBR semiconductor laser having an active region, a phase control region, and a DBR region, a photo-detector for detecting an output intensity of laser beam emitted from the wavelength-variable DBR semiconductor laser, and a transmission type wavelength-selection element that can be inserted into a light path from the wavelength-variable DBR semiconductor laser to the photo-detector. In a state where the transmission type wavelength-selection element is inserted into the light path from the wavelength-variable DBR semiconductor laser to the photo-detector, at least one of a phase current that is supplied to the phase control region and a DBR current that is supplied to the DBR region is changed with respect to a predetermined active current that is supplied to the active region, and the output intensity of the laser beam after the laser beam has passed through the transmission type wavelength-selection element is detected by the photo-detector.
摘要翻译：提供了一种容易且快速地评估波长可变半导体激光器的波长变异性的方法。检查装置包括用于向具有有源区域的波长可变DBR半导体激光器提供电流的电源，相位控制区域和DBR区域，用于检测从波长范围发射的激光束的输出强度的光电检测器，可变DBR半导体激光器和可以插入到从波长可变DBR半导体激光器到光检测器的光路中的透射型波长选择元件。在将透射型波长选择元件从波长可变DBR半导体激光器插入到光检测器的光路中的状态下，提供给相位控制区域的相电流和DBR电流中的至少一个提供给DBR区域的电压相对于提供给有源区域的预定有功电流而改变，并且激光束已经通过透射型波长选择元件之后的激光束的输出强度由光电探测器。

4. 发明申请

US20050276288A1 Device and method for inspecting wavelength-variable semiconductor laser, and method for inspecting coherent source 失效
标题翻译：用于检测波长可变半导体激光器的装置和方法以及检查相干光源的方法
公开(公告)号：US20050276288A1
公开(公告)日：2005-12-15
申请号：US11197624
申请日：2005-08-04
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： G01J1/42 , H01S3/10 , H01S5/00 , H01S5/06 , H01S5/0625
CPC分类号： G01J1/4257 , H01S5/0014 , H01S5/005 , H01S5/0092 , H01S5/06256
摘要： A method for easily and quickly evaluating the wavelength variability properties of a wavelength-variable semiconductor laser is provided. An inspection device includes a power source for supplying current to a wavelength-variable DBR semiconductor laser having an active region, a phase control region, and a DBR region, a photo-detector for detecting an output intensity of laser beam emitted from the wavelength-variable DBR semiconductor laser, and a transmission type wavelength-selection element that can be inserted into a light path from the wavelength-variable DBR semiconductor laser to the photo-detector. In a state where the transmission type wavelength-selection element is inserted into the light path from the wavelength-variable DBR semiconductor laser to the photo-detector, at least one of a phase current that is supplied to the phase control region and a DBR current that is supplied to the DBR region is changed with respect to a predetermined active current that is supplied to the active region, and the output intensity of the laser beam after the laser beam has passed through the transmission type wavelength-selection element is detected by the photo-detector.
摘要翻译：提供了一种容易且快速地评估波长可变半导体激光器的波长变异性的方法。检查装置包括用于向具有有源区域的波长可变DBR半导体激光器提供电流的电源，相位控制区域和DBR区域，用于检测从波长范围发射的激光束的输出强度的光电检测器，可变DBR半导体激光器和可以插入到从波长可变DBR半导体激光器到光检测器的光路中的透射型波长选择元件。在透射型波长选择元件从波长可变DBR半导体激光器插入到光检测器的光路中的状态下，提供给相位控制区域的相电流和DBR电流中的至少一个提供给DBR区域的电压相对于提供给有源区域的预定有功电流而改变，并且激光束已经通过透射型波长选择元件之后的激光束的输出强度由光电探测器。

5. 发明授权

US06621962B2 Optical waveguide device integrated module and method of manufacturing the same 有权
标题翻译：光波导器件集成模块及其制造方法
公开(公告)号：US06621962B2
公开(公告)日：2003-09-16
申请号：US10321050
申请日：2002-12-16
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： G02B626
CPC分类号： G02B6/42 , G02B6/4219 , G02B6/4231 , G02F1/37 , H01L24/29 , H01L24/32 , H01L2224/83192 , H01S5/0092 , H01S5/02252 , H01S5/02272 , H01S5/0612 , H01S5/125
摘要： A semiconductor laser and an optical waveguide device with an optical waveguide formed at a surface of its substrate are provided on a submount. The semiconductor laser and the optical waveguide device are mounted with an active layer and a surface at which the optical waveguide is formed facing the submount, respectively. The submount is combined with the semiconductor laser or the optical waveguide device to form one body using an adhesive with a spacer, which maintains a substantially uniform distance therebetween, being interposed therebetween, so that position adjustment in the height direction can be made automatically and mounting can be carried out with high-precision optical coupling. Thus, an optical waveguide device integrated module and a method of manufacturing the same are provided, in which a semiconductor laser and a planar optical waveguide device are mounted with their positions in the height direction controlled with high precision.
摘要翻译：半导体激光器和其基板表面上形成有光波导的光波导器件设置在基座上。半导体激光器和光波导器件分别安装有有源层和形成面向子安装座的光波导的表面。底座与半导体激光器或光波导器件组合，以使用具有间隔件的粘合剂形成一体，其间保持基本上均匀的间隔，从而可以自动地进行位置调节和高度方向的安装可以用高精度光耦合进行。因此，提供了一种光波导器件集成模块及其制造方法，其中半导体激光器和平面光波导器件以其精度高度控制的位置安装。

6. 发明授权

US06519077B1 OPTICAL WAVEGUIDE, OPTICAL WAVELENGTH CONVERSION DEVICE, METHOD FOR PRODUCING THE SAME, SHORT WAVELENGTH LIGHT GENERATION APPARATUS USING THE SAME, OPTICAL INFORMATION PROCESSING APPARATUS USING THE SAME, COHERENT LIGHT GENERATION APPARATUS USING THE SAME, AND OPTICAL SYSTEM USING THE SAME 有权
标题翻译：光波导，光波长转换装置，其生产方法，使用该光学波长的光生成装置，使用该光学信息处理装置的光信号处理装置，使用该光学信号处理装置的相干光生成装置和使用该光学系统的光学系统
公开(公告)号：US06519077B1
公开(公告)日：2003-02-11
申请号：US09534134
申请日：2000-03-23
申请人： Kiminori Mizuuchi , Kazuhisa Yamamoto , Yasuo Kitaoka , Toshifumi Yokoyama
发明人： Kiminori Mizuuchi , Kazuhisa Yamamoto , Yasuo Kitaoka , Toshifumi Yokoyama
IPC分类号： G02F1365
CPC分类号： G02F1/365 , G02B6/1345 , G02B6/14 , G02B6/32 , G02B6/4204 , G02B6/4246 , G02B2006/121 , G02B2006/12169 , G02F1/3775 , G02F2001/3548
摘要： An optical waveguide of the present invention includes: a nonlinear optical crystal; a first ion exchange region provided in the vicinity of a portion of a surface of the nonlinear optical crystal; and a second ion exchange region provided in the surface of the nonlinear optical crystal. The second ion exchange region covers a greater area of the surface than an area covered by the first ion exchange region. The second ion exchange region includes a region having an extent of 0.02 &mgr;m to 0.2 &mgr;m along a depth direction in which an ion exchange ratio varies along the depth direction.
摘要翻译：本发明的光波导包括：非线性光学晶体; 设置在所述非线性光学晶体的表面的一部分附近的第一离子交换区域; 以及设置在所述非线性光学晶体的表面中的第二离子交换区域。第二离子交换区域覆盖比由第一离子交换区域覆盖的区域更大的表面积。第二离子交换区域沿离子交换比沿深度方向变化的深度方向具有0.02μm〜0.2μm的范围的区域。

7. 发明授权

US06614966B2 Optical waveguide device integrated module and method of manufacturing the same 有权
公开(公告)号：US06614966B2
公开(公告)日：2003-09-02
申请号：US09801223
申请日：2001-03-07
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： G02B626
CPC分类号： G02B6/42 , G02B6/4219 , G02B6/4231 , G02F1/37 , H01L24/29 , H01L24/32 , H01L2224/83192 , H01S5/0092 , H01S5/02252 , H01S5/02272 , H01S5/0612 , H01S5/125
摘要： A semiconductor laser and an optical waveguide device with an optical waveguide formed at a surface of its substrate are provided on a submount. The semiconductor laser and the optical waveguide device are mounted with an active layer and a surface at which the optical waveguide is formed facing the submount, respectively. The submount is combined with the semiconductor laser or the optical waveguide device to form one body using an adhesive with a spacer, which maintains a substantially uniform distance therebetween, being interposed therebetween, so that position adjustment in the height direction can be made automatically and mounting can be carried out with high-precision optical coupling. Thus, an optical waveguide device integrated module and a method of manufacturing the same are provided, in which a semiconductor laser and a planar optical waveguide device are mounted with their positions in the height direction controlled with high precision.

8. 发明授权

US07593151B2 Display unit and scanning method therefor 有权
标题翻译：显示单元及其扫描方法
公开(公告)号：US07593151B2
公开(公告)日：2009-09-22
申请号：US10582340
申请日：2004-12-09
申请人： Toshifumi Yokoyama , Ken'ichi Kasazumi , Akihiro Morikawa , Kiminori Mizuuchi , Kazuhisa Yamamoto
发明人： Toshifumi Yokoyama , Ken'ichi Kasazumi , Akihiro Morikawa , Kiminori Mizuuchi , Kazuhisa Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/125 , G02B26/123 , H04N3/08 , H04N9/3129 , Y10S359/90
摘要： In a display unit which makes coherent light perform scanning on a screen to display an image, it is necessary to rotate a polygon mirror at ultrahigh speed for display of a high resolution image such as HDTV, and therefore, a high-performance polygon mirror must be employed, and further, noise and power consumption during rotation of the polygon mirror cause problems.Mirrors for multiple reflection (6a) and (6b) are inserted in a coherent light scanning optical system, whereby plural scanning lines can be obtained while one plane of the polygon mirror (5) scans one line of coherent light, leading to reduction in the rpm of the polygon mirror.
摘要翻译：在使相干光在屏幕上进行扫描以显示图像的显示单元中，需要以超高速度旋转多面镜以显示诸如HDTV的高分辨率图像，因此，高性能多面镜必须并且进一步地，在多面镜旋转期间的噪声和功率消耗导致问题。多反射镜（6a）和（6b）的反射镜被插入到相干光扫描光学系统中，从而可以获得多个扫描线，而多面镜（5）的一个平面扫描一条相干光，导致多角镜的转速。

9. 发明申请

US20070081220A1 Display unit and scanning method therefor 有权
标题翻译：显示单元及其扫描方法
公开(公告)号：US20070081220A1
公开(公告)日：2007-04-12
申请号：US10582340
申请日：2004-12-09
申请人： Toshifumi Yokoyama , Ken'ichi Kasazumi , Akihiro Morikawa , Kiminori Mizuuchi , Kazuhisa Yamamoto
发明人： Toshifumi Yokoyama , Ken'ichi Kasazumi , Akihiro Morikawa , Kiminori Mizuuchi , Kazuhisa Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/125 , G02B26/123 , H04N3/08 , H04N9/3129 , Y10S359/90
摘要： In a display unit which makes coherent light perform scanning on a screen to display an image, it is necessary to rotate a polygon mirror at ultrahigh speed for display of a high resolution image such as HDTV, and therefore, a high-performance polygon mirror must be employed, and further, noise and power consumption during rotation of the polygon mirror cause problems. Mirrors for multiple reflection (6a) and (6b) are inserted in a coherent light scanning optical system, whereby plural scanning lines can be obtained while one plane of the polygon mirror (5) scans one line of coherent light, leading to reduction in the rpm of the polygon mirror.
摘要翻译：在使相干光在屏幕上进行扫描以显示图像的显示单元中，需要以超高速度旋转多面镜以显示诸如HDTV的高分辨率图像，因此，高性能多面镜必须并且进一步地，在多面镜旋转期间的噪声和功率消耗导致问题。多反射镜（6a）和（6b）的反射镜被插入相干光扫描光学系统中，从而可以获得多个扫描线，同时多面镜（5）的一个平面扫描一条相干光线，从而减少在多面镜的转速。

10. 发明授权

US08287131B2 Wavelength conversion laser 有权
标题翻译：波长转换激光
公开(公告)号：US08287131B2
公开(公告)日：2012-10-16
申请号：US12744769
申请日：2008-11-25
申请人： Tetsuro Mizushima , Toshifumi Yokoyama , Tatsuo Itoh , Kenji Nakayama , Kiminori Mizuuchi , Kazuhisa Yamamoto
发明人： Tetsuro Mizushima , Toshifumi Yokoyama , Tatsuo Itoh , Kenji Nakayama , Kiminori Mizuuchi , Kazuhisa Yamamoto
IPC分类号： G03B21/00 , H01S3/093 , H01S3/10 , H01S3/04
CPC分类号： H01S3/109 , G02F1/3558 , H01S3/025 , H01S3/07 , H01S3/08086 , H01S3/09415 , H01S3/1671 , H01S3/1673 , H01S3/2375
摘要： A wavelength conversion laser is provided with a solid-state laser having a cavity, and a wavelength converting element arranged within the cavity. The solid-state laser includes two or more types of laser crystals and oscillates solid-state laser light of multiple wavelengths. The wavelength converting element converts the solid-state laser light of multiple wavelengths into light of second harmonic waves and sum-frequency wave of multiple wavelengths and simultaneously generates the second harmonic waves and sum-frequency wave of multiple wavelengths. The wavelength conversion laser outputs converted wavelength light having a broad spectral width and low coherency, thereby enabling it to carry out highly efficient and stable high-output oscillation.
摘要翻译：波长转换激光器设置有具有空腔的固态激光器和布置在空腔内的波长转换元件。固体激光器包括两种或更多种类型的激光晶体并振荡多个波长的固态激光。波长转换元件将多个波长的固态激光转换为二次谐波和多个波长的和频波的光，同时产生多个波长的二次谐波和和频波。波长转换激光器输出具有宽光谱宽度和低相干性的转换波长光，从而使其能够执行高效稳定的高输出振荡。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式