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    • 6. 发明授权
    • Deformable mirror device and apparatus for observing retina of eye using the same
    • 可变形镜装置及使用其的眼睛视网膜观察装置
    • US07744220B2
    • 2010-06-29
    • US12186142
    • 2008-08-05
    • Kei MasunishiAkihiro KogaRyo FurukawaOsamu NishimuraAkio KobayashiHiroyuki Kawashima
    • Kei MasunishiAkihiro KogaRyo FurukawaOsamu NishimuraAkio KobayashiHiroyuki Kawashima
    • A61B3/10G02B26/00G02B5/08
    • G02B26/0825A61B3/10
    • A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.
    • 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 设置在基板上的间隔件; 支撑构件,设置在所述间隔件上方,并且具有从所述支撑构件的面向所述基板的第一面穿过到与所述第一面相对的所述支撑构件的第二面的开口; 可变电极膜,形成在所述支撑构件的所述第一面的下方,以与所述电极相对并且覆盖所述开口; 设置在所述可变形电极膜和所述支撑构件之间的绝缘膜; 以及反射膜,设置在与电极相对的可变形电极膜的表面上以与开口重叠。 电极通过从包括与开口的中心对应的位置的区域径向延伸的多个槽电绝缘。
    • 9. 发明授权
    • Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor
    • 该静电致动器包括选择性地设置移动模式和第一和第二保持模式之一的开关电路及其驱动方法
    • US07482728B2
    • 2009-01-27
    • US11233091
    • 2005-09-23
    • Akihiro KogaMasayuki SekimuraToshikatsu Akiba
    • Akihiro KogaMasayuki SekimuraToshikatsu Akiba
    • H02N1/00G02B7/04G02B7/08
    • H02N1/004H04N5/23287
    • The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.
    • 本发明提供了具有小功耗的静电致动器,并且还提供了其驱动方法。 静电致动器包括分别形成有第一和第二定子电极的第一和第二基板以及布置在第一和第二定子电极之间的可动部分。 可移动部分具有分别定位成面对第一和第二定子电极的第一和第二表面。 在第一和第二移动模式中,响应于来自驱动电路的信号电压,可移动部分在第一和第二基板之间稍微移动。 此外,在保持模式中,可移动部分由第一和第二定子电极中的一个保持,并且在该状态下,将保持可动部分的定子电极和由定子电极保持的可动部分中的至少一个保持电 浮动