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    • 3. 发明申请
    • ACTUATOR AND STORAGE DEVICE
    • 执行器和存储设备
    • US20120230079A1
    • 2012-09-13
    • US13235652
    • 2011-09-19
    • Yongfang LiYasushi TomizawaHiroaki NakamuraAkihiro Koga
    • Yongfang LiYasushi TomizawaHiroaki NakamuraAkihiro Koga
    • G11C11/22H02N1/00
    • H02N1/008
    • In one embodiment, an actuator has a movable member, a frame, and first and second electrodes. Each of the first electrodes has a pair of first and second planes perpendicular to a third direction which is orthogonal to the first and the second directions approximately. The second electrodes are provided alternately with the first electrode respectively and with a distance from the first electrode. Each of the second electrodes has a pair of third and fourth planes perpendicular to the third direction. The first and the second planes have a deviation in the third direction with respect to the third and the fourth planes, respectively. The amount of the deviation is larger than a maximum value of the amount of displacement of the movable member in the third direction. The amount of displacement is produced by gravity when a component of the gravity in the third direction is maximum.
    • 在一个实施例中,致动器具有可动构件,框架以及第一和第二电极。 每个第一电极具有垂直于大致与第一和第二方向正交的第三方向的一对第一和第二平面。 第二电极分别与第一电极交替设置,并且距离第一电极一定距离。 每个第二电极具有垂直于第三方向的一对第三和第四平面。 第一和第二平面分别相对于第三和第四平面在第三方向上具有偏差。 偏差量大于可动件在第三方向上的位移量的最大值。 当第三方向的重力分量最大时,位移量由重力产生。
    • 4. 发明申请
    • ACTUATOR
    • 执行机构
    • US20120073940A1
    • 2012-03-29
    • US13070250
    • 2011-03-23
    • Kei MASUNISHITamio IkehashiYasushi TomizawaAkihiro Koga
    • Kei MASUNISHITamio IkehashiYasushi TomizawaAkihiro Koga
    • H01H57/00
    • H01H59/0009H01G5/18
    • According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region.
    • 根据一个实施例,致动器包括基板,设置在基板上的下电极,上电极,支架和驱动单元。 上电极与下电极相对。 支撑件支撑上电极。 驱动单元连接在下电极和上电极之间,并提供驱动电压。 下电极和上电极彼此接触的驱动电压被定义为引入电压。 下电极和上电极之间的电容被定义为引入电容。 存在第一区域和第二区域。 在第二区域中,当电位差的绝对值进一步增加时,电容比的变化率比第一区域变化更慢。 驱动单元在第二区域中馈送驱动电压。
    • 7. 发明授权
    • Deformable mirror apparatus
    • 可变形镜装置
    • US07682030B2
    • 2010-03-23
    • US12032871
    • 2008-02-18
    • Kei MasunishiAkihiro KogaRyo FurukawaTetsuya KugimiyaAkio KobayashiHiroyuki Kawashima
    • Kei MasunishiAkihiro KogaRyo FurukawaTetsuya KugimiyaAkio KobayashiHiroyuki Kawashima
    • G02B7/188G02B26/00G02B26/08
    • G02B26/0825
    • It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.
    • 可以提供可变形为复杂形状(高阶形状)的可变形反射镜装置。 可变形反射镜装置包括:基板; 设置在所述基板上的多个电极; 固定在所述基板上方的间隔件,具有第一开口,所述第一开口从所述间隔件的面向所述基板的第一面穿过所述间隔件的与所述第一面相反的第二面,所述第二面围绕所述电极,并且在所述第二面上具有台阶 ; 驱动部,其具有设置成覆盖所述间隔件的台阶并且与所述电极相对的膜部;壳体部,其在所述膜部露出并支撑所述膜部的底面具有开口部, 以及设置在所述膜部上的反射膜; 以及电压发生器,其被配置为分别在所述电极上产生预定的电压图案。