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    • 1. 发明授权
    • Method of manufacturing a light emitting diode using LPE at different
temperatures
    • 在不同温度下使用LPE制造发光二极管的方法
    • US5652178A
    • 1997-07-29
    • US466279
    • 1995-06-06
    • Tadasu IzumiMasamichi HaradaYukari Inoguchi
    • Tadasu IzumiMasamichi HaradaYukari Inoguchi
    • H01L33/00H01L21/20
    • H01L33/0062
    • A method of manufacturing a light emitting diode, which includes the steps of bringing a semiconductor substrate of p-type or n-type into contact with a growth solution at a high temperature and thereafter, lowering the temperature so as to form a monocrystalline epitaxial layer of the same type as the semiconductor substrate on the semiconductor substrate, subsequently, further lowering the above temperature to form a first monocrystalline epitaxial layer of a reverse type to the epitaxial layer on the epitaxial layer and then, cutting off the growth solution to form an epitaxial wafer as a result, a growth solution to contact the first epitaxial layer of a epitaxial wafer at a high temperature, and thereafter, the temperature is lowered to form a second monocrystalline epitaxial layer of the same kind and type as the first epitaxial layer on the first epitaxial layer.
    • 一种制造发光二极管的方法,其包括以下步骤:使p型或n型半导体衬底在高温下与生长溶液接触,然后降低温度以形成单晶外延层 与半导体衬底上的半导体衬底相同的类型,随后进一步降低上述温度以形成与外延层上的外延层相反类型的第一单晶外延层,然后切断生长溶液以形成 外延晶片的结果是在高温下与外延晶片的第一外延层接触的生长溶液,然后降低温度以形成与第一外延层相同种类和类型的第二单晶外延层, 第一个外延层。