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1. 发明授权

US08906599B2 Enhanced scanner throughput system and method 有权
标题翻译：增强扫描仪吞吐量系统和方法
公开(公告)号：US08906599B2
公开(公告)日：2014-12-09
申请号：US13473695
申请日：2012-05-17
申请人： Yu-Mei Liu , Chin-Hsiang Lin , Heng-Hsin Liu , Heng-Jen Lee , I-Hsiung Huang , Chih-Wei Lin
发明人： Yu-Mei Liu , Chin-Hsiang Lin , Heng-Hsin Liu , Heng-Jen Lee , I-Hsiung Huang , Chih-Wei Lin
IPC分类号： G03F7/20
CPC分类号： G03F7/70358
摘要： A method and system to improve scanner throughput is provided. An image from a reticle is projected onto a substrate using a continuous linear scanning procedure in which an entire column of die or cells of die is scanned continuously, i.e. without stepping to a different location. Each scan includes translating a substrate with respect to a fixed beam. While the substrate is translated, the reticle is also translated. When a first die or cell of die is projected onto the substrate, the reticle translates along a direction opposite the scan direction and as the scan continues along the same direction, the reticle then translates in the opposite direction of the substrate thereby forming an inverted pattern on the next die or cell. The time associated with exposing the substrate is minimized as the stepping operation only occurs after a complete column of cells is scanned.
摘要翻译：提供了一种提高扫描仪吞吐量的方法和系统。使用连续线性扫描程序将来自掩模版的图像投影到基板上，其中连续扫描整列管芯或裸片的单元，即不进入不同的位置。每个扫描包括相对于固定光束平移衬底。当底物被翻译时，掩模版也被翻译。当模具的第一裸片或裸片投影到衬底上时，标线沿着与扫描方向相反的方向平移，并且随着扫描沿着相同的方向继续，标线片然后沿着衬底的相反方向平移，从而形成倒置图案在下一个死亡或细胞。与曝光底物相关的时间最小化，因为步进操作仅在扫描完整的单元格列之后才发生。

2. 外观设计

USD416877S Liquid crystal display 失效
公开(公告)号：USD416877S
公开(公告)日：1999-11-23
申请号：US96193
申请日：1998-11-05
申请人： Yu-Mei Liu , Yuan-Shie Chang
设计人： Yu-Mei Liu , Yuan-Shie Chang

3. 发明申请

US20130309612A1 ENHANCED SCANNER THROUGHPUT SYSTEM AND METHOD 有权
标题翻译：增强扫描仪通过系统和方法
公开(公告)号：US20130309612A1
公开(公告)日：2013-11-21
申请号：US13473695
申请日：2012-05-17
申请人： Yu-Mei LIU , Chin-Hsiang LIN , Heng-Hsin LIU , Heng-Jen LEE , I-Hsiung HUANG , Chih-Wei LIN
发明人： Yu-Mei LIU , Chin-Hsiang LIN , Heng-Hsin LIU , Heng-Jen LEE , I-Hsiung HUANG , Chih-Wei LIN
IPC分类号： G03F7/20
CPC分类号： G03F7/70358
摘要： A method and system to improve scanner throughput is provided. An image from a reticle is projected onto a substrate using a continuous linear scanning procedure in which an entire column of die or cells of die is scanned continuously, i.e. without stepping to a different location. Each scan includes translating a substrate with respect to a fixed beam. While the substrate is translated, the reticle is also translated. When a first die or cell of die is projected onto the substrate, the reticle translates along a direction opposite the scan direction and as the scan continues along the same direction, the reticle then translates in the opposite direction of the substrate thereby forming an inverted pattern on the next die or cell. The time associated with exposing the substrate is minimized as the stepping operation only occurs after a complete column of cells is scanned.
摘要翻译：提供了一种提高扫描仪吞吐量的方法和系统。使用连续线性扫描程序将来自掩模版的图像投影到基板上，其中连续扫描整列管芯或裸片的单元，即不进入不同的位置。每个扫描包括相对于固定光束平移衬底。当底物被翻译时，掩模版也被翻译。当模具的第一裸片或裸片投影到衬底上时，标线沿着与扫描方向相反的方向平移，并且随着扫描沿着相同的方向继续，标线片然后在衬底的相反方向上平移，从而形成倒置图案在下一个死亡或细胞。与曝光底物相关的时间最小化，因为步进操作仅在扫描完整的单元格列之后才发生。

4. 外观设计

USD442587S1 Computer monitor 失效
标题翻译：电脑显示器
公开(公告)号：USD442587S1
公开(公告)日：2001-05-22
申请号：US29124683
申请日：2000-06-09
申请人： Yuan-Shie Chang , Yu-Mei Liu , Shu-Fen Ke
设计人： Yuan-Shie Chang , Yu-Mei Liu , Shu-Fen Ke

5. 外观设计

USD440968S1 Liquid crystal display monitor 失效
标题翻译：液晶显示器
公开(公告)号：USD440968S1
公开(公告)日：2001-04-24
申请号：US29124684
申请日：2000-06-09
申请人： Yuan-Shie Chang , Yu-Mei Liu , Shu-Fen Ke
设计人： Yuan-Shie Chang , Yu-Mei Liu , Shu-Fen Ke

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