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    • 1. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE
    • 用于加热处理基板的基板处理装置和基板处理方法
    • US20100330273A1
    • 2010-12-30
    • US12879246
    • 2010-09-10
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • B05D5/06B05D3/02
    • H01L21/67178H01L21/67109H01L21/6719H01L21/67742
    • A substrate coated with a coating solution for an anti-reflective film is placed on a heat treatment plate and is heated. Nitrogen gas flows near the periphery of the heat treatment plate into a heat treatment space. An exhaust outlet is formed in an upper central portion of an inner cover, and the inner cover has an inner wall surface configured in the form of a tapered surface. This produces a smooth flow of nitrogen gas along the tapered surface to smoothly discharge a sublimate produced from the coating solution together with the gas flow outwardly through the exhaust outlet. After the heating process for a predetermined period of time is completed, the cover moves upwardly, and support pins move upwardly to thrust up the substrate from the heat treatment plate, thereby spacing the substrate apart from the heat treatment plate. This gradually decreases the temperature of the substrate. The substrate is placed in a standby condition within a hot plate in this state until the substrate temperature is decreased down to at least a temperature at which the production of the sublimate from the anti-reflective film after firing stops, and thereafter a transport robot transports the substrate out of the hot plate.
    • 将涂有抗反射膜用涂布液的基材置于热处理板上并加热。 氮气在热处理板的周边附近流入热处理空间。 在内盖的上部中央部形成有排气口,内侧盖具有锥面形状的内壁面。 这产生沿着锥形表面的氮气的平稳流动,以便平稳地将从涂覆溶液产生的升华与气流一起向外排出通过排气出口。 在预定时间段的加热过程完成之后,盖向上移动,并且支撑销向上移动以从热处理板推动基板,从而将基板与热处理板隔开。 这就逐渐降低了基板的温度。 在这种状态下,将基板置于热板内的待机状态,直到基板温度降低到至少在点火停止后从抗反射膜产生升华的温度,然后运输机器人运输 基板出热板。
    • 2. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE
    • 用于加热处理基板的基板处理装置和基板处理方法
    • US20080008837A1
    • 2008-01-10
    • US11775742
    • 2007-07-10
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • B05D3/02B05C13/02
    • H01L21/67178H01L21/67109H01L21/6719H01L21/67742
    • A substrate coated with a coating solution for an anti-reflective film is placed on a heat treatment plate and is heated. Nitrogen gas flows near the periphery of the heat treatment plate into a heat treatment space. An exhaust outlet is formed in an upper central portion of an inner cover, and the inner cover has an inner wall surface configured in the form of a tapered surface. This produces a smooth flow of nitrogen gas along the tapered surface to smoothly discharge a sublimate produced from the coating solution together with the gas flow outwardly through the exhaust outlet. After the heating process for a predetermined period of time is completed, the cover moves upwardly, and support pins move upwardly to thrust up the substrate from the heat treatment plate, thereby spacing the substrate apart from the heat treatment plate. This gradually decreases the temperature of the substrate. The substrate is placed in a standby condition within a hot plate in this state until the substrate temperature is decreased down to at least a temperature at which the production of the sublimate from the anti-reflective film after firing stops, and thereafter a transport robot transports the substrate out of the hot plate.
    • 将涂有抗反射膜用涂布液的基材置于热处理板上并加热。 氮气在热处理板的周边附近流入热处理空间。 在内盖的上部中央部形成有排气口,内侧盖具有锥面形状的内壁面。 这产生沿着锥形表面的氮气的平稳流动,以便平稳地将从涂覆溶液产生的升华与气流一起向外排出通过排气出口。 在预定时间段的加热过程完成之后,盖向上移动,并且支撑销向上移动以从热处理板推动基板,从而将基板与热处理板隔开。 这就逐渐降低了基板的温度。 在这种状态下,将基板置于热板内的待机状态,直到基板温度降低到至少在点火停止后从抗反射膜产生升华的温度,然后运输机器人运输 基板出热板。
    • 3. 发明授权
    • Semiautomatic pig deboner and deboning process for pig thigh using same
    • 半自动猪去骨量和猪大腿剔骨过程使用相同
    • US6106384A
    • 2000-08-22
    • US135013
    • 1998-08-17
    • Takayuki MutohKatsumi ToyoshimaYasunori Kubo
    • Takayuki MutohKatsumi ToyoshimaYasunori Kubo
    • A22C17/02A22C17/00A22C17/04
    • A22C17/0093A22C17/004
    • The present invention, in deboning process for a pig thigh in which a pig thigh held by gripping on a transport line is sequentially deboned starting from a hind shank, comprises preliminary processing steps of: gripping the ankle side section of a work by transport/processing means; removing a hip bone, and a sacrum and a caudal vertebrae of the gripped work; and cutting-in for a hind shank and a femur, and the process further comprises the steps of: stripping a meat section around the hind shank after it is processed in the preliminary processing steps; exposing a fibula to detecting the base position of a fibula head as a first sensing step; stripping a meat section around above a joint and cutting an organic tissue exposed by the stripping for separation of leg section muscles; cutting a patelliform bone related section; stripping for the femoral region and detecting the base position of a femur head as a second sensing step; cutting a femur head related section; and separating by cutting the meat section from the bone section to discharge, whereby a hygienic automatic deboning can be realized except the cutting-in for deboning by hand in the first stage.
    • 本发明在猪大腿的剔骨过程中,其中通过在输送线上抓持保持的猪大腿从后肢开始顺序地脱皮,包括预处理步骤:通过运输/加工来夹持作业的踝侧部分 手段; 去除髋骨,骶骨和尾部椎骨的夹紧工作; 并且用于后柄和股骨的切入,并且该方法还包括以下步骤:在预处理步骤中处理之后剥离后柄周围的肉部分; 暴露腓骨以检测腓骨头的基部位置作为第一感测步骤; 剥离关节周围的肉部分,并切割通过剥离暴露的有机组织以分离腿部肌肉; 切断髌骨相关部位; 剥离股骨区域并检测股骨头的基部位置作为第二感测步骤; 切割股骨头相关部分; 通过将骨部从骨部切断而进行分离,从而除了在第一阶段用手进行剔骨之外,可以实现卫生自动剔骨。