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    • 3. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE
    • 用于加热处理基板的基板处理装置和基板处理方法
    • US20100330273A1
    • 2010-12-30
    • US12879246
    • 2010-09-10
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • B05D5/06B05D3/02
    • H01L21/67178H01L21/67109H01L21/6719H01L21/67742
    • A substrate coated with a coating solution for an anti-reflective film is placed on a heat treatment plate and is heated. Nitrogen gas flows near the periphery of the heat treatment plate into a heat treatment space. An exhaust outlet is formed in an upper central portion of an inner cover, and the inner cover has an inner wall surface configured in the form of a tapered surface. This produces a smooth flow of nitrogen gas along the tapered surface to smoothly discharge a sublimate produced from the coating solution together with the gas flow outwardly through the exhaust outlet. After the heating process for a predetermined period of time is completed, the cover moves upwardly, and support pins move upwardly to thrust up the substrate from the heat treatment plate, thereby spacing the substrate apart from the heat treatment plate. This gradually decreases the temperature of the substrate. The substrate is placed in a standby condition within a hot plate in this state until the substrate temperature is decreased down to at least a temperature at which the production of the sublimate from the anti-reflective film after firing stops, and thereafter a transport robot transports the substrate out of the hot plate.
    • 将涂有抗反射膜用涂布液的基材置于热处理板上并加热。 氮气在热处理板的周边附近流入热处理空间。 在内盖的上部中央部形成有排气口,内侧盖具有锥面形状的内壁面。 这产生沿着锥形表面的氮气的平稳流动,以便平稳地将从涂覆溶液产生的升华与气流一起向外排出通过排气出口。 在预定时间段的加热过程完成之后,盖向上移动,并且支撑销向上移动以从热处理板推动基板,从而将基板与热处理板隔开。 这就逐渐降低了基板的温度。 在这种状态下,将基板置于热板内的待机状态,直到基板温度降低到至少在点火停止后从抗反射膜产生升华的温度,然后运输机器人运输 基板出热板。
    • 5. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE
    • 用于加热处理基板的基板处理装置和基板处理方法
    • US20080008837A1
    • 2008-01-10
    • US11775742
    • 2007-07-10
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • Yasuhiro SHIBAYasunori KUBOTakuya WADA
    • B05D3/02B05C13/02
    • H01L21/67178H01L21/67109H01L21/6719H01L21/67742
    • A substrate coated with a coating solution for an anti-reflective film is placed on a heat treatment plate and is heated. Nitrogen gas flows near the periphery of the heat treatment plate into a heat treatment space. An exhaust outlet is formed in an upper central portion of an inner cover, and the inner cover has an inner wall surface configured in the form of a tapered surface. This produces a smooth flow of nitrogen gas along the tapered surface to smoothly discharge a sublimate produced from the coating solution together with the gas flow outwardly through the exhaust outlet. After the heating process for a predetermined period of time is completed, the cover moves upwardly, and support pins move upwardly to thrust up the substrate from the heat treatment plate, thereby spacing the substrate apart from the heat treatment plate. This gradually decreases the temperature of the substrate. The substrate is placed in a standby condition within a hot plate in this state until the substrate temperature is decreased down to at least a temperature at which the production of the sublimate from the anti-reflective film after firing stops, and thereafter a transport robot transports the substrate out of the hot plate.
    • 将涂有抗反射膜用涂布液的基材置于热处理板上并加热。 氮气在热处理板的周边附近流入热处理空间。 在内盖的上部中央部形成有排气口,内侧盖具有锥面形状的内壁面。 这产生沿着锥形表面的氮气的平稳流动,以便平稳地将从涂覆溶液产生的升华与气流一起向外排出通过排气出口。 在预定时间段的加热过程完成之后,盖向上移动,并且支撑销向上移动以从热处理板推动基板,从而将基板与热处理板隔开。 这就逐渐降低了基板的温度。 在这种状态下,将基板置于热板内的待机状态,直到基板温度降低到至少在点火停止后从抗反射膜产生升华的温度,然后运输机器人运输 基板出热板。
    • 7. 发明申请
    • Information recording processing device, information reproduction processing device, information recording medium and method, and computer program
    • 信息记录处理装置,信息再现处理装置,信息记录介质和方法以及计算机程序
    • US20060291357A1
    • 2006-12-28
    • US10571307
    • 2004-09-01
    • Tsutomu IchinoseShunsuke FurukawaTakuya Wada
    • Tsutomu IchinoseShunsuke FurukawaTakuya Wada
    • G11B19/04
    • G11B20/00086G11B20/1426
    • A device, a medium, and a method for recording and reproducing additional data difficult to analyze on an information recording medium are provided. When additional data is recorded onto the information recording medium, or additional data such for example as key information applied to a content decryption process, key generating information, content reproduction control information, or copy control information is recorded on the information recording medium, the parity of data of a recording frame in which to insert the additional data is calculated, and the value of a DC control bit in the frame in which to store the additional data is determined and set on the basis of information indicating whether the parity is even parity or odd parity and the bit value information [0] or [1] of the additional data. At a time of reproduction, the constituent bit [0] or [1] of the additional data is obtained by only detecting the parity of the recording frame.
    • 提供了一种用于记录和再现在信息记录介质上难以分析的附加数据的设备,介质和方法。 当附加数据被记录到信息记录介质上时,或者例如作为应用于内容解密处理的密钥信息的附加数据,密钥产生信息,内容再现控制信息或复制控制信息被记录在信息记录介质上, 计算其中插入附加数据的记录帧的数据,并且基于指示奇偶校验是偶校验的信息来确定和设置存储附加数据的帧中的DC控制位的值 或奇校验位和附加数据的位值信息[0]或[1]。 在再现时,仅通过检测记录帧的奇偶校验来获得附加数据的构成位[0]或[1]。
    • 8. 发明申请
    • Information recording processing device, information reproduction processing device, information recording medium and method, and computer program
    • 信息记录处理装置,信息再现处理装置,信息记录介质和方法以及计算机程序
    • US20060285465A1
    • 2006-12-21
    • US10569009
    • 2004-09-01
    • Tsutomu IchinoseShunsuke FurukawaTakuya Wada
    • Tsutomu IchinoseShunsuke FurukawaTakuya Wada
    • G11B7/00G11B20/12
    • G11B20/1426G11B20/00086
    • A device, a medium, and a method for recording and reproducing additional data difficult to analyze on an information recording medium are provided. When additional data is recorded onto the information recording medium, or additional data such for example as key information applied to a content decryption process, content reproduction control information, or copy control information is recorded on the information recording medium, the parity of a data-changeable data unit, for example user control data (UCD) is set to even parity or odd parity by controlling constituent bits of the user control data according to constituent bit information [0] or [1] of the additional data and according to whether the parity of a specific additional data-corresponding recording frame selected is even parity or odd parity. At a time of reproduction, the additional constituent bit information [0] or [1] is obtained by detecting the parity of the additional data-corresponding recording frame and the parity of the constituent data of the user control data (UCD).
    • 提供了一种用于记录和再现在信息记录介质上难以分析的附加数据的设备,介质和方法。 当附加数据被记录到信息记录介质上时,或者附加数据例如作为应用于内容解密处理的密钥信息的附加数据,内容再现控制信息或复制控制信息被记录在信息记录介质上, 通过根据附加数据的构成比特信息[0]或[1]控制用户控制数据的组成比特,可变数据单元(例如用户控制数据(UCD))被设置为偶校验或奇校验, 所选择的特定附加数据对应记录帧的奇偶校验是偶校验或奇校验。 在再现时,通过检测附加数据对应记录帧的奇偶校验和用户控制数据(UCD)的组成数据的奇偶校验来获得附加组成位信息[0]或[1]。