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    • 7. 发明授权
    • Method for forming a selective contact and local interconnect in situ
    • 在原位形成选择性接触和局部互连的方法
    • US07858518B2
    • 2010-12-28
    • US10067410
    • 2002-02-04
    • Christopher W. HillWeimin LiGurtej S. Sandhu
    • Christopher W. HillWeimin LiGurtej S. Sandhu
    • H01L21/4763
    • H01L21/76895H01L21/28518H01L21/28562H01L21/28568
    • A process for the in situ formation of a selective contact and a local interconnect on a semiconductor substrate. The exposed semiconductor substrate regions of a semiconductor device structure may be treated in a plasma to enhance the adhesiveness of a selective contact thereto. The semiconductor device structure is positioned within a reaction chamber, wherein a selective contact is deposited onto the exposed semiconductor substrate regions. Any residual selective contact material may be removed from oxide surfaces either intermediately or after selective contact deposition. While the semiconductor device remains in the reaction chamber, a local interconnect is deposited over the semiconductor device structure. The local interconnect may then be patterned. Subsequent layers may be deposited over the local interconnect. The present invention also includes semiconductor device structures formed by the inventive process.
    • 用于在半导体衬底上原位形成选择性接触和局部互连的方法。 可以在等离子体中处理半导体器件结构的暴露的半导体衬底区域以增强与其的选择性接触的粘合性。 半导体器件结构位于反应室内,其中选择性接触沉积在暴露的半导体衬底区域上。 任何残留的选择性接触材料可以在中间或选择性接触沉积之后从氧化物表面去除。 当半导体器件保留在反应室中时,在半导体器件结构上沉积局部互连。 然后可以对局部互连进行图案化。 随后的层可以沉积在局部互连上。 本发明还包括通过本发明方法形成的半导体器件结构。