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    • 1. 发明授权
    • Defect inspection device and inspection method
    • 缺陷检查装置及检验方法
    • US08599369B2
    • 2013-12-03
    • US13378418
    • 2010-06-09
    • Yuta UranoShigenobu MaruyamaToshiyuki NakaoToshifumi Honda
    • Yuta UranoShigenobu MaruyamaToshiyuki NakaoToshifumi Honda
    • G01N21/47G01N21/55
    • G01N21/9501G01N2021/8861G01N2021/8874
    • A defect inspection method wherein illumination light having a substantially uniform illumination intensity distribution in a certain direction on the surface of a specimen is radiated onto the surface of the specimen; wherein multiple components of those scattered light beams from the surface of the specimen which are emitted mutually different directions are detected, thereby obtaining corresponding multiple scattered light beam detection signals; wherein the multiple scattered light beam detection signals is subjected to processing, thereby determining the presence of defects; wherein the corresponding multiple scattered light detecting signals is processed with respect to all of the spots determined to be defective by the processing, thereby determining the sizes of defects; and wherein the defect locations on the specimen and the defect sizes are displayed with respect to all of the spots determined to be defective by the processing.
    • 一种缺陷检查方法,其中将在试样表面上沿某一方向具有基本均匀的照明强度分布的照明光辐射到样品的表面上; 其中检测出来自样本表面的这些散射光束相互不同方向发射的多个分量,从而获得相应的多个散射光束检测信号; 其中对所述多个散射光束检测信号进行处理,由此确定缺陷的存在; 其中相应的多个散射光检测信号相对于通过处理确定为有缺陷的所有点进行处理,从而确定缺陷的尺寸; 并且其中相对于通过处理确定为有缺陷的所有点显示样本上的缺陷位置和缺陷尺寸。
    • 5. 发明申请
    • Inspection Apparatus
    • 检验仪器
    • US20120140211A1
    • 2012-06-07
    • US13368764
    • 2012-02-08
    • Yoshimasa OSHIMAYuta URANOToshiyuki NAKAO
    • Yoshimasa OSHIMAYuta URANOToshiyuki NAKAO
    • G01N21/47
    • G01N21/9501G01N21/21G01N21/47G01N21/94G01N2021/4707G01N2021/4709G01N2021/8864
    • An inspection apparatus and method for detecting defects and haze on a surface of a sample includes illumination optics which emit light to illuminate an inspection region on the surface of the sample from an oblique direction relative to the inspection region, first detection optics which detect first scattered light from the inspection region and having a beam analyzer through an optical path, second detection optics which detect second scattered light from the inspection region, the second scattered light being scattered from a direction different than a direction of the first scattered light, and a signal-processing unit which treats different processings for a first signal of the detected first scattered light and for a second signal of the detected second scattered light and detecting defects and haze on the surface of the sample on the basis of at least one of the first signal and the second signal.
    • 用于检测样品表面的缺陷和雾度的检查装置和方法包括发射光的照明光学器件,以从相对于检查区域的倾斜方向照射样品表面上的检查区域,第一检测光学器件检测第一散射 来自检查区域的光并且具有通过光路的光束分析器,第二检测光学器件检测来自检查区域的第二散射光,第二散射光从不同于第一散射光的方向的方向散射,以及信号 处理单元,其针对检测到的第一散射光的第一信号和检测到的第二散射光的第二信号处理不同的处理,并且基于第一信号中的至少一个检测样品的表面上的缺陷和雾度 和第二个信号。
    • 6. 发明申请
    • DEFECT INSPECTION DEVICE AND INSPECTION METHOD
    • 缺陷检查装置和检查方法
    • US20120133928A1
    • 2012-05-31
    • US13378418
    • 2010-06-09
    • Yuta UranoShigenobu MaruyamaToshiyuki NakaoToshifumi Honda
    • Yuta UranoShigenobu MaruyamaToshiyuki NakaoToshifumi Honda
    • G01N21/47G01N21/55
    • G01N21/9501G01N2021/8861G01N2021/8874
    • A defect inspection method wherein illumination light having a substantially uniform illumination intensity distribution in a certain direction on the surface of a specimen is radiated onto the surface of the specimen; wherein multiple components of those scattered light beams from the surface of the specimen which are emitted mutually different directions are detected, thereby obtaining corresponding multiple scattered light beam detection signals; wherein the multiple scattered light beam detection signals is subjected to processing, thereby determining the presence of defects; wherein the corresponding multiple scattered light detecting signals is processed with respect to all of the spots determined to be defective by the processing, thereby determining the sizes of defects; and wherein the defect locations on the specimen and the defect sizes are displayed with respect to all of the spots determined to be defective by the processing.
    • 一种缺陷检查方法,其中将在试样表面上沿某一方向具有基本均匀的照明强度分布的照明光辐射到样品的表面上; 其中检测出来自样本表面的这些散射光束相互不同方向发射的多个分量,从而获得相应的多个散射光束检测信号; 其中对所述多个散射光束检测信号进行处理,由此确定缺陷的存在; 其中相应的多个散射光检测信号相对于通过处理确定为有缺陷的所有点进行处理,从而确定缺陷的尺寸; 并且其中相对于通过处理确定为有缺陷的所有点显示样本上的缺陷位置和缺陷尺寸。
    • 8. 发明申请
    • FLAT SURFACE INSPECTION APPARATUS
    • 平面检查装置
    • US20110242524A1
    • 2011-10-06
    • US13007433
    • 2011-01-14
    • YUKI SHIMIZUJunguo XuShigeo NakamuraToshiyuki NakaoToshihiko NakataToshifumi Honda
    • YUKI SHIMIZUJunguo XuShigeo NakamuraToshiyuki NakaoToshihiko NakataToshifumi Honda
    • G01N21/00
    • G01N21/9501G01N21/47
    • An object is to provide a flat surface inspection apparatus that can prevent sliders from being damaged and detect micro defects. A flat surface inspection apparatus includes: a measured subject; a stage that supports the measured subject; a spindle that rotates the stage; a first part having light sources applying light beam onto the measured subject, a scattered-light-detecting section, a signal processing section that converts the scattered light into information about a first defect, and a first memory section that stores therein the information about the first defect; and a second part having sliders mounted with a contact sensor that detects a second defect smaller than the first defect, a loading/unloading mechanism that flies the slider over the measured subject, a slider control section that controls the loading/unloading mechanism based on the information about the first defects and second defects.
    • 本发明的目的是提供一种能够防止滑块损坏并检测微缺陷的平面检查装置。 平面检查装置包括:测量对象; 支持被测科目的阶段; 旋转舞台的主轴; 具有将光束施加到测量对象上的第一部分,散射光检测部分,将散射光转换成关于第一缺陷的信息的信号处理部分,以及存储关于第一缺陷的信息的第一存储部分 第一缺陷; 以及第二部分,其具有安装有接触传感器的滑块,所述接触传感器检测到比所述第一缺陷小的第二缺陷;在所述测量对象上飞行所述滑块的装载/卸载机构;滑块控制部,其基于所述滑块控制部 关于第一个缺陷和第二个缺陷的信息。
    • 9. 发明申请
    • Method And Its Apparatus For Inspecting Defects
    • 检测缺陷的方法及其设备
    • US20110211191A1
    • 2011-09-01
    • US13107637
    • 2011-05-13
    • Yuta UranoToshiyuki NakaoYoshimasa Oshima
    • Yuta UranoToshiyuki NakaoYoshimasa Oshima
    • G01N21/00
    • G01N21/9501G01N21/9503
    • A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.
    • 缺陷检查装置能够以高灵敏度和高速检查诸如半导体衬底或薄膜衬底的样品的顶部和边缘表面上存在的极小缺陷。 缺陷检查装置具有照明光学系统,多个检测光学单元和信号处理器。 一个或多个检测光学单元接收从样品的边缘部分衍射的光或从夹持样品的边缘把手衍射的光。 一个或多个检测光学单元基于通过监视由检测光学单元接收的衍射光的强度而获得的信号来屏蔽由检测光学单元接收的衍射光,以便检查位于边缘部分附近的样本部分 以及位于边缘把手附近的样品部分。
    • 10. 发明授权
    • Defect inspection method
    • 缺陷检查方法
    • US07916288B2
    • 2011-03-29
    • US12713500
    • 2010-02-26
    • Toshiyuki NakaoYoshimasa OshimaYuta Urano
    • Toshiyuki NakaoYoshimasa OshimaYuta Urano
    • G01N21/00
    • G01N21/9501G01N2021/887
    • A method for inspecting a defect of a surface of a sample, includes irradiating a laser beam on the sample surface a plurality of times so that at least part of an illumination field of the laser beam on the sample surface illuminates a first area of the sample surface each of the plurality of times, detecting a plurality of scattered light rays from the first area caused by the plurality of times of irradiation, correcting errors of detection timings for the plurality of scattered light rays detected in the detection step, and determining a defect on the sample surface based on the plurality of scattered light rays in accordance with the correcting errors of detection timings.
    • 用于检查样品表面的缺陷的方法包括将多个激光束照射在样品表面上多次,使得样品表面上的激光束的照明场的至少一部分照射样品的第一区域 在多次照射中检测来自第一区域的多个散射光,校正检测步骤中检测到的多个散射光的检测定时的误差,并且确定缺陷 根据检测定时的校正误差,基于多个散射光线在样品表面上。