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    • 3. 发明申请
    • Charged particle beam inspection apparatus and inspection method using charged particle beam
    • 带电粒子束检查装置和带电粒子束的检查方法
    • US20100102225A1
    • 2010-04-29
    • US12653013
    • 2009-12-07
    • Keisuke ItouToshimichi Iwai
    • Keisuke ItouToshimichi Iwai
    • G01N23/00G21K1/08
    • H01J37/28G01B15/00H01J37/20H01J37/266H01J2237/0041H01J2237/10
    • A charged particle beam inspection apparatus includes: an electron gun emitting an electron beam; first and second condenser lenses used to focus the electron beam; a beam control panel disposed between the first and second condenser lenses; and a control unit performing stabilizing processing in which excitation currents respectively supplied to the first condenser lens and the second condenser lens are set to have predetermined values, thereby the current amount of the electron beam passing through an opening of the beam control panel is regulated so that the electron beam to be emitted onto the sample has a larger current amount than that at a measurement, and then the electron beam is emitted onto the sample for a predetermined time period. After the stabilizing processing, the control unit sets the values of the excitation currents back to values for the measurement in order to measure dimensions of the sample, the excitation currents respectively supplied to the first and second condenser lenses.
    • 带电粒子束检查装置包括:发射电子束的电子枪; 用于聚焦电子束的第一和第二聚光透镜; 设置在第一和第二聚光透镜之间的光束控制面板; 以及执行稳定处理的控制单元,其中分别提供给第一聚光透镜和第二聚光透镜的激励电流被设置为具有预定值,从而将通过光束控制面板的开口的电子束的电流量调节为 要发射到样品上的电子束具有比测量时更大的电流量,然后电子束在样品上发射预定时间段。 在稳定处理之后,控制单元将激励电流的值设置为测量值,以便测量样品的尺寸,分别提供给第一和第二聚光透镜的激励电流。