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    • 2. 发明申请
    • Mask inspection apparatus and image creation method
    • 面膜检查装置及图像制作方法
    • US20100196804A1
    • 2010-08-05
    • US12653792
    • 2009-12-21
    • Tsutomu MurakawaToshimichi IwaiJun MatsumotoTakayuki NakamuraYoshiaki Ogiso
    • Tsutomu MurakawaToshimichi IwaiJun MatsumotoTakayuki NakamuraYoshiaki Ogiso
    • G03F1/00G01N23/00
    • G03F1/86
    • Provided is a mask inspection apparatus including: emitting unit for emitting electron beams onto a sample; electron detecting unit for detecting the quantity of electrons produced, by the emission of the electron beams, from the sample with patterns formed thereon; image processing unit for generating image data for the patterns on the basis of the electron quantity; and controlling unit for controlling the emitting unit, the electron detecting unit, and the image processing unit. The controlling unit calculates, from the size of a designated observation area of the sample, a division number of divisional images that are synthesized to form a joint image that covers the entire designated observation area. The controlling unit determines divisional areas so that adjacent divisional areas partially overlap each other. The controlling unit acquires SEM images for the respective divisional areas. The controlling unit synthesizes the SEM images of the divisional areas on the basis of coordinate data for the divisional areas and on the basis of edge information for patterns included in the overlapping regions, and thereby creates an SEM image of a wide field of view that covers the observation area.
    • 提供了一种掩模检查装置,包括:用于向样品发射电子束的发射单元; 电子检测单元,用于通过发射电子束从形成在其上的图案的样品检测产生的电子量; 图像处理单元,用于基于电子量产生用于图案的图像数据; 以及用于控制发光单元,电子检测单元和图像处理单元的控制单元。 控制单元根据样本的指定观察区域的大小,计算合成为形成覆盖整个指定观察区域的关节图像的分割图像的分割数。 控制单元确定分区,使得相邻的分区彼此部分重叠。 控制单元获取各分区的SEM图像。 控制单元基于分割区域的坐标数据并基于重叠区域中包含的图案的边缘信息来合成分割区域的SEM图像,从而创建覆盖了宽视场的SEM图像 观察区。
    • 5. 发明申请
    • Image processing apparatus, mail processing method and mail processing program
    • 图像处理装置,邮件处理方法和邮件处理程序
    • US20070192421A1
    • 2007-08-16
    • US11635651
    • 2006-12-08
    • Toshimichi Iwai
    • Toshimichi Iwai
    • G06F15/16
    • G06Q10/107
    • An image processing apparatus comprising: a judgment unit for judging whether or not an e-mail received via a network is an e-mail delivered according to a mailing list or an e-mail forwarded after once delivered according to a mailing list; a recording unit; and a control unit for generating a BOX storing the e-mail as associated with the mailing list in said recording unit and storing the e-mail in said BOX if the received e-mail is judged to be an e-mail delivered according to a mailing list or an e-mail forwarded after once delivered according to a mailing list by said judgment unit.
    • 一种图像处理装置,包括:判断单元,用于判断经由网络接收的电子邮件是否是根据邮寄列表发送的电子邮件或根据邮寄列表一次传送后的电子邮件; 记录单元; 以及控制单元,用于生成存储与所述记录单元中的邮件列表相关联的电子邮件的BOX,并且如果所接收的电子邮件被判定为根据一个电子邮件传送的电子邮件,则将该电子邮件存储在所述BOX中 邮件列表或电子邮件一次根据所述判断单元的邮寄名单传送。
    • 8. 发明申请
    • Charged particle beam inspection apparatus and inspection method using charged particle beam
    • 带电粒子束检查装置和带电粒子束的检查方法
    • US20100102225A1
    • 2010-04-29
    • US12653013
    • 2009-12-07
    • Keisuke ItouToshimichi Iwai
    • Keisuke ItouToshimichi Iwai
    • G01N23/00G21K1/08
    • H01J37/28G01B15/00H01J37/20H01J37/266H01J2237/0041H01J2237/10
    • A charged particle beam inspection apparatus includes: an electron gun emitting an electron beam; first and second condenser lenses used to focus the electron beam; a beam control panel disposed between the first and second condenser lenses; and a control unit performing stabilizing processing in which excitation currents respectively supplied to the first condenser lens and the second condenser lens are set to have predetermined values, thereby the current amount of the electron beam passing through an opening of the beam control panel is regulated so that the electron beam to be emitted onto the sample has a larger current amount than that at a measurement, and then the electron beam is emitted onto the sample for a predetermined time period. After the stabilizing processing, the control unit sets the values of the excitation currents back to values for the measurement in order to measure dimensions of the sample, the excitation currents respectively supplied to the first and second condenser lenses.
    • 带电粒子束检查装置包括:发射电子束的电子枪; 用于聚焦电子束的第一和第二聚光透镜; 设置在第一和第二聚光透镜之间的光束控制面板; 以及执行稳定处理的控制单元,其中分别提供给第一聚光透镜和第二聚光透镜的激励电流被设置为具有预定值,从而将通过光束控制面板的开口的电子束的电流量调节为 要发射到样品上的电子束具有比测量时更大的电流量,然后电子束在样品上发射预定时间段。 在稳定处理之后,控制单元将激励电流的值设置为测量值,以便测量样品的尺寸,分别提供给第一和第二聚光透镜的激励电流。