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    • 5. 发明授权
    • Method for synthesizing compound semiconductor polycrystals and
apparatus therefor
    • 化合物半导体多晶体的合成方法及其设备
    • US5524571A
    • 1996-06-11
    • US478016
    • 1990-02-09
    • Akihisa KawasakiToshihiro Kotani
    • Akihisa KawasakiToshihiro Kotani
    • B01J3/04C01B19/00C01B25/08C01G9/08C22C1/00C30B15/02
    • C22C1/007B01J3/04C01B19/007C01B25/087C01G9/08Y10T117/1052
    • Herein disclosed are apparatuses for manufacturing compound semiconductor polycrystals comprising a pressure vessel, an upper shaft, a container for a first component fixed to the upper shaft, a heater around the container, a lower shaft, a susceptor and a crucible for charging a second component, a heater for the crucible and a communicating pipe for spatially connecting the container and the crucible optionally provided with a porous member at the lower extremity and/or a cylindrical member for confining a space over a part of the melt surface contained in the crucible from the remaining inner space of the vessel, the apparatuses permitting the substantial reduction of the reaction time and an improvement of the yield of the polycrystals due to the presence of the porous member and/or the cylindrical member separating the inner space of the vessel into two portions.
    • 本文公开了用于制造化合物半导体多晶体的装置,包括压力容器,上轴,用于固定到上轴的第一部件的容器,容器周围的加热器,下轴,基座和用于对第二部件充电的坩埚 ,用于坩埚的加热器和用于空间连接容器和坩埚的连通管,所述坩埚在下端和/或圆柱形构件上任选地设置有多孔构件,用于限制坩埚中包含的熔体表面的一部分上的空间, 容器的剩余内部空间,允许显着减少反应时间的装置以及由于多孔构件和/或将容器的内部空间分离成两个的圆柱形构件的存在而导致的多晶体的产量的提高 部分。