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1. 发明授权

US06715363B1 Method and apparatus for strain amplification for piezoelectric transducers 失效
标题翻译：压电换能器应变放大的方法和装置
公开(公告)号：US06715363B1
公开(公告)日：2004-04-06
申请号：US09252972
申请日：1999-02-19
申请人： Kan Deng , Fred Schloss , Paul A. Wlodkowski , Thurston L. Brooks, III
发明人： Kan Deng , Fred Schloss , Paul A. Wlodkowski , Thurston L. Brooks, III
IPC分类号： G01B716
CPC分类号： B06B1/161 , G01L1/16 , G01P15/0922
摘要： A method and apparatus for mechanical strain amplification for enhanced piezoelectric transduction. The device consists of a piezoelectric element elevated above the neutral axis of a supporting, micromachined, photoetched substrate by use of castellations on the substrate. By elevating the piezoelectric element above the neutral axis, the charge sensitivity of the device is increased which facilitates the development of high-sensitivity, low-noise transducers. There is a limit to charge sensitivity because the optimal elevation is a function of the physical properties of the supporting structure and the piezoelectric element. Accordingly, a mathematical formulation and finite element analysis (FEA) are provided to define the optimal height of the castellated substrate. The recognition of limits to the castellation height has further led to the discovery of using the relaxor-ferroelectric, single crystal class of materials in the present invention. Because the modulus of these materials is an order of magnitude less than that of piezoelectric ceramics, their use in the method of strain amplification is synergistic due to enhanced piezoelectric coefficients and the ability to extend castellation height. Furthermore, the simplicity of the transducer design, and the fact that its components are selected from photoetched, micromachined parts, result in unprecedented low costs of manufacturing for industrial-grade sensors. This method and apparatus for mechanical strain amplification is integral to a diverse group of piezoelectric-based transducers and sensors, such as accelerometers, velocity sensors, mechanical impedance heads, and hydrophones.
摘要翻译：用于增强压电转换的机械应变放大的方法和装置。该器件由在衬底上通过使用蓖麻的支撑，微机械加工的光刻基片的中性轴上方升高的压电元件组成。通过将压电元件提升到中性轴之上，器件的电荷敏感性增加，这有助于高灵敏度，低噪声换能器的发展。由于最佳仰角是支撑结构和压电元件的物理性能的函数，所以对灵敏度进行充电是有限制的。因此，提供了数学公式和有限元分析（FEA）来定义蓖麻底物的最佳高度。识别到城堡高度的限制进一步导致在本发明中发现使用弛豫 - 铁电单晶类的材料。由于这些材料的模量比压电陶瓷的模量小一个数量级，因此在应变放大方法中的应用由于增强的压电系数和延伸地毯高度的能力是协同的。此外，传感器设计的简单性以及其组件选自光刻机，微加工部件的事实导致了工业级传感器制造的前所未有的低成本。这种用于机械应变放大的方法和装置是不同组的基于压电的换能器和传感器，例如加速度计，速度传感器，机械阻抗头和水听器。

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