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    • 2. 发明授权
    • Double-side polishing process with reduced scratch rate and device for carrying out the process
    • 减少划伤率的双面抛光工艺和进行该工艺的装置
    • US06645862B2
    • 2003-11-11
    • US09989550
    • 2001-11-20
    • Guido WenskiJohann GlasThomas AltmannGerhard Heier
    • Guido WenskiJohann GlasThomas AltmannGerhard Heier
    • H01L21302
    • H01L21/02024B24B37/0056B24B37/08
    • A process for producing semiconductor wafers by double-sided polishing between two rotating, upper and lower polishing plates, which are covered with polishing cloth, while an alkaline polishing abrasive with colloidal solid fractions is being supplied, the semiconductor wafers being guided by carriers which have circumferential gear teeth and are set in rotation by complementary outer gear teeth and inner gear teeth of the polishing machine, which is distinguished by the following process steps: (a) at least one of the two sets of gear teeth of the polishing machine is at least from time to time sprayed with a liquid which substantially comprises water, (b) the alkaline polishing abrasive is fed continuously to the semiconductor wafers in a closed supply device. There is also a device which is suitable for carrying out the process.
    • 在提供具有胶体固体部分的碱性抛光磨料的同时,在被抛光布覆盖的两个旋转,上和下抛光板之间通过双面抛光来生产半导体晶片的方法,半导体晶片由具有 周向齿轮齿,并由抛光机的互补外齿轮齿和内齿轮齿旋转,其特征在于以下工艺步骤:(a)抛光机的两组齿轮齿中的至少一个处于 至少不时地用基本上包含水的液体喷雾,(b)碱性抛光磨料在封闭的供应装置中连续地供给到半导体晶片。 还有一种适用于执行该过程的装置。
    • 6. 发明授权
    • Process for the double-side polishing of semiconductor wafers and carrier for carrying out the process
    • 用于半导体晶片和载体的双面抛光的工艺用于实施该工艺
    • US06514424B2
    • 2003-02-04
    • US09826135
    • 2001-04-04
    • Guido WenskiGerhard HeierWolfgang WinklerThomas Altmann
    • Guido WenskiGerhard HeierWolfgang WinklerThomas Altmann
    • H01L2100
    • B24B41/067B24B37/08H01L21/02024
    • A process for the double-side polishing of semiconductor wafers between two polishing plates which rotate in opposite directions and are covered with polishing cloth, so that at least 2 &mgr;m of semiconductor material is removed. The semiconductor wafers lay in plastic-lined cutouts in a set of a plurality of planar carriers which are made from steel and the mean thickness of which is 2 to 20 &mgr;m smaller than the mean thickness of the fully polished semiconductor wafers. The set comprises only those carriers whose difference in thickness is at most 5 &mgr;m, and each carrier belonging to the set has at least one unambiguous identification feature which assigns it to the set. An item of information contained in the identification feature is used in order for the plastic linings to be exchanged at fixed intervals and to ensure that the semiconductor wafers remain in the same order after the polishing as before the polishing. There is also a carrier which is suitable for carrying out the process.
    • 在两个抛光板之间进行双面抛光的方法,该两个抛光板以相反的方向旋转并被抛光布覆盖,以至于除去了至少2微米的半导体材料。 半导体晶片放置在由钢制成的多组平面载体的一组塑料衬里的切口中,其平均厚度比完全抛光的半导体晶片的平均厚度小2至20μm。 该集合仅包括厚度差为5mum以下的载波,属于该集合的每个载波具有至少一个明确的识别特征,将其分配给该集合。 使用包含在识别特征中的信息项目,以便以固定的间隔更换塑料衬里,并确保半导体晶片在抛光之后保持与抛光之前相同的顺序。 还有一个适用于执行该过程的载体。
    • 7. 发明申请
    • DETERMINATION AND PREDICTION OF THE EXPRESSION OF TRAITS OF PLANTS FROM THE METABOLITE PROFILE AS A BIOMARKER
    • US20100145625A1
    • 2010-06-10
    • US12520845
    • 2007-12-21
    • Thomas AltmannLothar WillmitzerJoachim SelbigRhonda C. MeyerMatthias SteinfathJan LisecOliver Fiehn
    • Thomas AltmannLothar WillmitzerJoachim SelbigRhonda C. MeyerMatthias SteinfathJan LisecOliver Fiehn
    • G06F19/00G06F15/18G06N5/02C12Q1/68G06F17/10
    • G01N33/5097G01N30/7206
    • The present invention relates to a method for determining the correlation between the metabolite profiles (MPs) and the expression or potential for expression of a trait of a group of plants, and further to a method for determining or predicting the expression of a trait of a plant by taking advantage of the determined MP of said plant and a determined correlation between the MPs and the expression or potential for the expression of said trait in a group of plants.Particularly, the present invention relates to a method for determining or predicting the biomass production/growth rate of a plant by taking advantage of the determined MP of said plant and a determined correlation between the MPs and the biomass production/growth rate or the potential for biomass production/growth rate of a group of plants.The present invention also relates to a method for breeding of a plant that takes advantage of a method of determining the expression or potential for expression of a trait of said plant according to any one of the methods as disclosed, and selecting said plant on the basis of the expression or potential for expression of said trait. Furthermore, the present invention relates to a method for identifying quantitative trait loci (QTLs) for a trait or for the potential for expression of a trait of a group of plants comprising the step of identifying QTLs for metabolite combinations showing correlation with the expression or potential for expression of said trait of said group of plants.The present invention also relates to and a method for identifying a candidate gene involved in the determination of expression or potential for expression of a trait of a plant comprising the step of isolating a gene corresponding to any one of the QTLs as identified by the corresponding method of the present invention.Additionally, the present invention relates to a method of screening for a plant that exhibits a desired expression or potential for expression of a trait as well as to a method of determining whether a treatment influences the expression or potential for expression of a trait of a plant.
    • 8. 发明申请
    • Method And Device For Producing High Purity Polycrystalline Silicon With A Reduced Dopant Content
    • 用于生产具有降低掺杂剂含量的高纯度多晶硅的方法和装置
    • US20080038178A1
    • 2008-02-14
    • US11834135
    • 2007-08-06
    • Thomas AltmannHans-Peter SendlingerIvo Crossmann
    • Thomas AltmannHans-Peter SendlingerIvo Crossmann
    • C01B33/035
    • C01B33/029C01B33/03C01B33/035
    • In the batch production of high purity polycrystalline silicon, in which a U-shaped silicon carrier body is fastened in an open deposition reactor, the deposition reactor is hermetically sealed, the U-shaped carrier body is heated electrical current, a silicon-containing reaction gas and hydrogen are introduced into the reactor through a supply line so that silicon from the reaction gas is deposited on the carrier body, the diameter of the carrier body increases and a waste gas formed is removed from the deposition reactor through a discharge line, and, after a desired diameter of the polysilicon rod is reached, deposition is terminated, the carrier body is cooled to room temperature, the reactor is opened, the carrier body is removed from the reactor and a second U-shaped silicon carrier body made of silicon is fastened in the deposition reactor, an inert gas is fed through the supply and discharge lines into the open reactor from at least the time when the reactor is opened to extract the first carrier body with deposited silicon, until at least the time when the reactor is closed in order to deposit silicon on the second carrier body.
    • 在批量生产高纯度多晶硅的过程中,U型硅载体主体紧固在开放式沉积反应器中,沉积反应器被气密密封,U形载体主体被加热电流,含硅反应 气体和氢气通过供应管线被引入反应器中,使得来自反应气体的硅沉积在载体上,载体主体的直径增加,并且形成的废气通过排出管线从沉积反应器中除去, 在达到多晶硅棒的期望直径之后,终止沉积,将载体主体冷却至室温,反应器打开,载体从反应器中取出,第二U形硅载体由硅制成 被固定在沉积反应器中,惰性气体至少从反应器打开到外部的时候通过供给和排出管线进入开放式反应器 将具有沉积硅的第一载体体直到至少反应器关闭的时间以将硅沉积在第二载体上。
    • 10. 发明授权
    • Method and device for producing high purity polycrystalline silicon with a reduced dopant content
    • 用于生产具有降低的掺杂剂含量的高纯度多晶硅的方法和装置
    • US07927571B2
    • 2011-04-19
    • US11834135
    • 2007-08-06
    • Thomas AltmannHans Peter SendlingerIvo Croessmann
    • Thomas AltmannHans Peter SendlingerIvo Croessmann
    • C01B33/035H01L21/322C30B25/00C30B35/00
    • C01B33/029C01B33/03C01B33/035
    • In the batch production of high purity polycrystalline silicon, in which a U-shaped silicon carrier body is fastened in an open deposition reactor, the deposition reactor is hermetically sealed, the U-shaped carrier body is heated electrical current, a silicon-containing reaction gas and hydrogen are introduced into the reactor through a supply line so that silicon from the reaction gas is deposited on the carrier body, the diameter of the carrier body increases and a waste gas formed is removed from the deposition reactor through a discharge line, and, after a desired diameter of the polysilicon rod is reached, deposition is terminated, the carrier body is cooled to room temperature, the reactor is opened, the carrier body is removed from the reactor and a second U-shaped silicon carrier body made of silicon is fastened in the deposition reactor, an inert gas is fed through the supply and discharge lines into the open reactor from at least the time when the reactor is opened to extract the first carrier body with deposited silicon, until at least the time when the reactor is closed in order to deposit silicon on the second carrier body.
    • 在批量生产高纯度多晶硅的过程中,U型硅载体主体紧固在开放式沉积反应器中,沉积反应器被气密密封,U形载体主体被加热电流,含硅反应 气体和氢气通过供应管线被引入反应器中,使得来自反应气体的硅沉积在载体上,载体主体的直径增加,并且形成的废气通过排出管线从沉积反应器中除去, 在达到多晶硅棒的期望直径之后,终止沉积,将载体主体冷却至室温,反应器打开,载体从反应器中取出,第二U形硅载体由硅制成 被固定在沉积反应器中,惰性气体至少从反应器打开到外部的时候通过供给和排出管线进入开放式反应器 将具有沉积硅的第一载体体直到至少反应器关闭的时间以将硅沉积在第二载体上。