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    • 1. 发明申请
    • DEVELOPMENT APPARATUS AND DEVELOPMENT METHOD
    • 开发设备和开发方法
    • US20070065145A1
    • 2007-03-22
    • US11559112
    • 2006-11-13
    • Tetsuya KITAMURA
    • Tetsuya KITAMURA
    • G03D5/00
    • G03F7/3021H01L21/6715
    • A development apparatus has a holder which horizontally holds a substrate, a nozzle which supplies a developer to a resist film on the substrate held by the holder, a liquid flow suppressing member whose size in a two-dimensional plane viewing field is equal to or larger than that of the substrate and which has a mesh having many openings and hydrophilic properties with respect to the developer and transmits the developer supplied from the nozzle through the openings of the mesh to form a liquid film of the developer between the mesh and the substrate, and a moving mechanism which movably supports this liquid flow suppressing member, sets the mesh to face the resist film on the substrate and brings the mesh into contact with a surface of the liquid film of the developer or immerges the mesh in the liquid film.
    • 显影装置具有水平地保持基板的保持器,将由显影剂供给到由保持器保持的基板上的抗蚀剂膜的喷嘴,在二维平面视野中的尺寸等于或大于其的尺寸的液体流动抑制构件 并且具有相对于显影剂具有许多开口和亲水性质的网,并且将从喷嘴供给的显影剂透过网孔的开口,以形成网状物和基底之间的显影剂的液膜, 以及移动机构,其可移动地支撑该液体流动抑制构件,将网格设置为面对基板上的抗蚀剂膜,并使网格与显影剂的液膜的表面接触或浸没在液膜中。
    • 2. 发明申请
    • Developing treatment apparatus
    • 开发治疗仪器
    • US20060086460A1
    • 2006-04-27
    • US11243483
    • 2005-10-05
    • Tetsuya KitamuraShuuichi Nishikido
    • Tetsuya KitamuraShuuichi Nishikido
    • C23F1/00C23C16/00
    • H01L21/67184G03F7/3021H01L21/67051H01L21/6715H01L21/67178
    • In the present invention, an outer peripheral plate is provided in a manner to surround a held substrate. A small gap exists between the outer peripheral plate and the outer peripheral portion of the substrate. Gas blowout ports are formed on the upper surface of an inner cup on the rear face side of the substrate. During cleaning of the substrate by a cleaning solution supplied onto the substrate, a gas is blown out from the gas blowout ports to form a gas flow that flows from the rear face side of the substrate and passes by the lower side of the gap outward to the outer peripheral plate side. The liquid such as the cleaning solution leaking through the gap is swept outward by the gas flow and flows along the rear face of the outer peripheral plate to be drained. According to the present invention, the liquid can be prevented from running around to the rear face side of the substrate during developing treatment.
    • 在本发明中,以围绕被保持基板的方式设置外周板。 在外周板和基板的外周部之间存在小间隙。 气体吹出口形成在衬底的背面侧的内杯的上表面上。 在通过供给到基板上的清洗液清洗基板时,从气体吹出口吹出气体,形成从基板的背面侧向外侧经过间隙的下侧的气流, 外周板侧。 诸如通过间隙泄漏的清洁溶液的液体被气流向外扫过,并沿着外周板的后表面流动以排出。 根据本发明,可以防止在显影处理期间液体流到基板的背面侧。
    • 3. 发明授权
    • Recording head for forming images with charged particles
    • 用于形成具有带电粒子的图像的记录头
    • US06332670B1
    • 2001-12-25
    • US09296168
    • 1999-04-22
    • Shigeru KagayamaTetsuya Kitamura
    • Shigeru KagayamaTetsuya Kitamura
    • B41J206
    • B41J2/4155G03G2217/0025
    • A film 33 is adhered using an adhesive layer 32 to the lower surface of an insulation sheet 31 that contacts the peripheral surface of atoner bearing roller. Apertures 34 are formed through the insulation sheet 31, the adhesive layer 32 and the film 33. An indentation portion 37 is formed around each aperture 34 in an upper surface 39 of the insulation sheet 31. Because the insulation sheet 31 and the film 33 are not attached into an integral unit using baking, the resultant member will not warp by differences in thermal expansion of the insulation sheet 31 and the film 33, as would occur if the two were baked together. Because the film 33 is extremely hard and smooth, toner will not pierce into the film 33 .
    • 使用粘合剂层32将薄膜33粘附到绝缘片31的与at轴承辊的圆周面接触的下表面。 孔34通过绝缘片31,粘合剂层32和膜33形成。在绝缘片31的上表面39中的每个孔34周围形成凹口部分37.由于绝缘片31和膜33是 没有通过烘烤而附接到整体单元中,所得到的构件将不会由于绝缘片31和膜33的热膨胀差异而翘曲,如果两者被烘烤在一起,则会发生。 因为胶片33非常硬且光滑,调色剂不会刺入胶片33中。
    • 9. 发明授权
    • Image recording apparatus having aperture electrode with dummy
electrodes for applying toner image onto image receiving sheet
    • 具有用于将调色剂图像施加到图像接收片上的带虚拟电极的孔径电极的图像记录装置
    • US5650809A
    • 1997-07-22
    • US408713
    • 1995-03-22
    • Tetsuya Kitamura
    • Tetsuya Kitamura
    • B41J2/385B41J2/415G03G15/05G03G15/34B41J2/06
    • G03G15/346B41J2/4155G03G2217/0025
    • An image recording apparatus having aperture electrode body formed with a plurality of apertures through which toners pass to deposit onto an image receiving member. The aperture electrode body includes an insulative substrate having the apertures and control electrodes formed over the insulative substrate and each surrounding each aperture. The aperture electrode body has a nature of bending due to difference in thermal expansion coefficient of the insulative substrate and the control electrodes. To provide uniform bending, dummy electrodes are formed over the insulative substrate. The dummy electrodes includes a first set of dummy electrodes positioned at upstream side of the control electrodes with respect to a running direction of the image receiving member. The dummy electrode also includes a second set of dummy electrodes positioned beside the extreme end of the control electrode in the array direction of the apertures.
    • 一种图像记录装置,具有形成有多个孔的孔径电极体,调色剂通过该孔孔沉积到图像接收构件上。 孔径电极体包括具有开口的绝缘衬底和形成在绝缘衬底上并且各自围绕每个孔的控制电极。 孔电极体由于绝缘基板和控制电极的热膨胀系数的差异而具有弯曲的性质。 为了提供均匀的弯曲,在绝缘基板上形成虚拟电极。 虚拟电极包括相对于图像接收部件的行进方向位于控制电极的上游侧的第一组虚拟电极。 虚拟电极还包括在孔的排列方向上位于控制电极的末端旁边的第二组虚拟电极。
    • 10. 发明授权
    • Image recording apparatus with a vibrating particle controller
    • 具有振动粒子控制器的图像记录装置
    • US5357274A
    • 1994-10-18
    • US994317
    • 1992-12-21
    • Tetsuya Kitamura
    • Tetsuya Kitamura
    • B41J2/415G03G15/34
    • B41J2/4155G03G15/346
    • In an image recording apparatus for recording an image on an image recording medium, a particle controller having at least one aperture receives electrically charged particles and selectively allows the electrically charged particles to pass through the aperture. A back electrode is positioned to confront the particle controller, with a space being formed between the back electrode and the particle controller for enabling passage of an image recording medium. The back electrode electrostatically attracts the electrically charged particles having passed through the aperture of the particle controller in a direction toward the back electrode so that the electrically charged particles may be attached to the image recording medium positioned in the space. The particle controller is vibrated with a vibration acceleration having a value equal to or larger than 500 G.
    • 在用于在图像记录介质上记录图像的图像记录装置中,具有至少一个孔的粒子控制器接收带电粒子并选择性地允许带电粒子通过该孔。 背面电极定位成面对粒子控制器,在背面电极和粒子控制器之间形成一个空间,以使图像记录介质能通过。 背面电极静电吸引通过粒子控制器的孔的带电粒子朝向背面电极的方向,使得带电粒子可以附着到位于该空间中的图像记录介质。 粒子控制器以等于或大于500G的振动加速度振动。