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    • 6. 发明申请
    • Method of Producing Superconductive Oxide Material
    • US20090318296A1
    • 2009-12-24
    • US12227840
    • 2008-02-05
    • Mitsugu SohmaTetsuo TsuchiyaToshiya KumagaiKenichi TsukadaKunihiko KoyanagiTakashi EbisawaHidehiko Ohtu
    • Mitsugu SohmaTetsuo TsuchiyaToshiya KumagaiKenichi TsukadaKunihiko KoyanagiTakashi EbisawaHidehiko Ohtu
    • H01L39/24
    • H01L39/2425C23C18/1216C23C18/1245C23C18/1295C23C18/14H01L39/2451
    • The invention provides a method of efficiently producing a superconductive material more excellent in properties without the occurrence of ablation and so forth, and large in area when executing thermal decomposition of an organic compound of metals, and formation of a superconductive material with heat treatment. The method of producing a superconductive material comprising the step (1) of applying a solution of an organic compound of metals, oxides of the metals forming a superconductive material, onto a support body to be subsequently dried, the provisional baking step (2) of causing organic components of the organic compound of the metals to undergo thermal decomposition, and the main baking process step (3) of causing transformation of the oxides of the metals into the superconductive material, thereby producing an epitaxially-grown superconductive coating material, wherein at the time of irradiation of a surface of the support body coated with the solution of the organic compound of the metals for forming the superconductive material, and/or of a surface of the support body, opposite to the surface coated with the solution of the organic compound of the metals, with the laser light, during a period between the steps (1) and (2), it is executed under the conditions adopting the following range. intensity and the number of pulses of the laser light; 5 mJ/cm2≦intensity of the laser light F≦200 mJ/cm2 1≦the number of pulses P≦198000000 total energy of the laser light; (0.03 J/cm2×a substrate constant)≦total energy≦(89000 J/cm2×a substrate constant) (in the expression, the substrate constant is defined as a number not less than 1 in value, dependent on nature and thickness of the support body) an irradiation condition area surrounded by the straight lines having the following equations; log10 P=K1F+K2 log10 P=K1F+K3 (in the equations, K1 represents a slant connecting between a point F corresponding to an arbitrary point P where transformation into the superconductive material occurs first and a point P corresponding to an arbitrary point F where transformation into the superconductive material occurs first, K2 is a logarithmic value at the point P in F=0 where a value at the point P in F=5 where transformation into the superconductive material occurs first is outwardly inserted along the slant K1, and K3 is a logarithmic value at the point P in F=0 where a value at the point P in F=5 where ablation occurs first is outwardly inserted along the slant K1, where K3>K2 is established).