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    • 3. 发明授权
    • CMOS off-chip driver circuit
    • CMOS片外驱动电路
    • US06198316B1
    • 2001-03-06
    • US09397249
    • 1999-09-16
    • David John KrolakTerrance Wayne Kueper
    • David John KrolakTerrance Wayne Kueper
    • H03B100
    • H03K19/00315
    • An improved off-chip driver circuit is disclosed which will properly transition from an active mode to a high impedance mode. The circuit includes first and second input nodes for receiving a first and second input signal respectively. An input composite transmission gate including a p-channel transistor in parallel with an n-channel transistor to receive the first input signal is provided in the circuit. A push-pull circuit is also included which includes the pull-up transistor disposed between a voltage supply and an output node and a first pull-down transistor disposed between ground and the output node. The pull-up transistor has a gate electrode for receiving the first input signal provided by the input composite transmission gate. The first pull-down transistor has a gate electrode for receiving the second input signal. A control transistor is included and is coupled between the gate electrode of the pull-up transistor and the output node. The control transistor has a gate electrode connected to a first point of reference potential. An auxiliary transistor is provided coupled between the first input node and a gate electrode of the p-channel transistor for establishing and maintaining a voltage at the gate electrode of the p-channel transistor during a transition of the circuit from an active mode to a high impedance mode sufficient to provide a proper transition from the active mode to the high impedance mode. A biasing transistor is also provided having a gate electrode directly connected to the output node and coupled to the voltage supply for biasing an N-well in which the pull-up transistor, the control transistor, and the auxiliary transistor are situated.
    • 公开了一种改进的片外驱动电路,其将适当地从有源模式转换到高阻抗模式。 电路包括用于分别接收第一和第二输入信号的第一和第二输入节点。 在电路中提供包括与n沟道晶体管并联的p沟道晶体管以接收第一输入信号的输入复合传输门。 还包括推挽电路,其包括设置在电压源和输出节点之间的上拉晶体管和设置在地和输出节点之间的第一下拉晶体管。 上拉晶体管具有用于接收由输入复合传输门提供的第一输入信号的栅电极。 第一下拉晶体管具有用于接收第二输入信号的栅电极。 包括一个控制晶体管,并且耦合在上拉晶体管的栅电极和输出节点之间。 控制晶体管具有连接到第一参考电位点的栅电极。 辅助晶体管被耦合在第一输入节点和p沟道晶体管的栅电极之间,用于在电路从有源模式转换到高电平期间建立和维持p沟道晶体管的栅电极处的电压 阻抗模式足以提供从有源模式到高阻抗模式的适当转换。 还提供一种偏置晶体管,其栅极电极直接连接到输出节点并耦合到电压源,用于偏置上拉晶体管,控制晶体管和辅助晶体管所在的N阱。
    • 10. 发明授权
    • Polysilicon conductor width measurement for 3-dimensional FETs
    • 三维FET的多晶硅导体宽度测量
    • US07227183B2
    • 2007-06-05
    • US10944622
    • 2004-09-17
    • Richard Lee DonzeWilliam Paul HovisTerrance Wayne KueperJohn Edward Sheets, IIJon Robert Tetzloff
    • Richard Lee DonzeWilliam Paul HovisTerrance Wayne KueperJohn Edward Sheets, IIJon Robert Tetzloff
    • H01L21/66
    • H01L27/1203H01L22/34H01L29/785
    • An apparatus and method is disclosed for determining polysilicon conductor width for 3-dimensional field effect transistors (FinFETs). Two or more resistors are constructed using a topology in which polysilicon conductors are formed over a plurality of silicon “fins”. A first resistor has a first line width. A second resistor has a second line width. The second line width is slightly different than the first line width. Advantageously, the first line width is equal to the nominal design width used to make FET gates in the particular semiconductor technology. Resistance measurements of the resistors and subsequent calculations using the resistance measurements are used to determine the actual polysilicon conductor width produced by the semiconductor process. A composite test structure not only allows calculation of the polysilicon conductor width, but provides proof that differences in the widths used in the calculations do not introduce objectionable etching characteristics of the polysilicon conductors.
    • 公开了一种用于确定三维场效应晶体管(FinFET)的多晶硅导体宽度的装置和方法。 使用其中在多个硅“鳍”上形成多晶硅导体的拓扑构造两个或更多个电阻器。 第一电阻器具有第一线宽度。 第二电阻具有第二线宽。 第二行宽度与第一行宽度略有不同。 有利地,第一线宽度等于在特定半导体技术中用于制造FET栅极的标称设计宽度。 电阻的电阻测量和使用电阻测量的随后的计算用于确定由半导体工艺产生的实际多晶硅导体宽度。 复合测试结构不仅允许计算多晶硅导体宽度,而且提供了在计算中使用的宽度差不会引起多晶硅导体的不良刻蚀特性的证据。