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    • 9. 发明授权
    • Stock unit for storing carriers
    • 存储承运人的库存单位
    • US5284412A
    • 1994-02-08
    • US740136
    • 1991-08-05
    • Hirotsugu ShiraiwaTakashi Tanahashi
    • Hirotsugu ShiraiwaTakashi Tanahashi
    • H01L21/677B65G1/04
    • H01L21/67769Y10S414/14
    • A stock unit for storing carriers has a stock unit body, a plurality of carrier mounting shelves provided in a side wall of the stock unit body at predetermined spaces in a vertical direction, a carrier station, provided in the lower portion of the stock unit body, receiving and sending a carrier between the stock unit and a carrier part provided in the outside of the stock unit body, a carrier transport device, provided in the lower portion of the stock unit body, for transporting the carrier from the inside of the stock unit body to wafer transfer device provided in the outside of the stock unit body, and a carrier arm mechanism gripping at least one carrier, receiving and sending the carrier between the carrier station and the carrier transport device, and between the carrier mounting shelves and the carrier transport device regardless of the operation of the carrier transport device.
    • 用于存放托架的库存单元具有库存单元主体,在垂直方向上的预定空间处设置在库单元主体的侧壁中的多个托架安装架,设置在库单元主体的下部的承载站 在所述库存单元和设置在所述库存单元的外部的承载部之间接收和发送承载件,设置在所述库存单元主体的下部中的用于从所述库存内部运送所述承运人的承运人运输装置 设置在储存单元主体的外部的单元体对晶片转移装置,以及夹持至少一个载体的承载臂机构,在承载站和载体输送装置之间以及载体安装架之间和载体安装架之间接收和发送载体 载波传输设备,而不管载波传输设备的操作。
    • 10. 发明授权
    • Analog displacement type electromagnetic valve
    • 模拟位移式电磁阀
    • US4170339A
    • 1979-10-09
    • US785773
    • 1977-04-07
    • Yasukiyo UedaKeijiro MoriKeiichi MoriTakashi TanahashiShigeru Shirai
    • Yasukiyo UedaKeijiro MoriKeiichi MoriTakashi TanahashiShigeru Shirai
    • G05D23/24F16K31/06H01F7/13H01F7/14
    • F16K31/0682
    • An electromagnetic valve comprises a magnetic circuit formed by a stationary core and a movable core, or armature pivoted at one end of the stationary core and rotatable continuously between first and second positions with a free end positioned in opposed relation to the other end of the stationary core with an air gap therebetween. The armature is spring biased so as to remain in the first position and carries a valve head for engagement with a valve seat. The opposing ends of the stationary and movable cores are so shaped as to form in the air gap a first working section in which the main magnetic flux generates a vector component transverse to the length of the armature and a second working section in which the main magnetic flux generates a vector component parallel to the length of the armature. The resulting vector makes the angular displacement of the armature linearly proportional to the supply current.
    • 电磁阀包括由固定铁芯和可动铁芯形成的磁路,或者在固定铁芯的一端枢转并且可在第一和第二位置之间连续旋转的电枢,其自由端位于与固定铁芯的另一端相对的位置 芯之间具有气隙。 电枢被弹簧偏压以便保持在第一位置并且承载用于与阀座接合的阀头。 固定和可动铁芯的相对端被成形为在气隙中形成第一工作部分,其中主磁通量产生横向于电枢长度的矢量分量;以及第二工作部分,其中主磁 磁通产生平行于电枢长度的矢量分量。 所得矢量使电枢的角位移与电源电流成线性比例。