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    • 1. 发明授权
    • Apparatus for automatically inspecting powdery products for the presence
of foreign substances
    • 用于自动检查粉状产品中是否存在异物的装置
    • US5469752A
    • 1995-11-28
    • US167029
    • 1993-12-16
    • Hajime KitamuraMasaru TakeuchiHideo YoshikoshiMikio KitaiTakashi ChinoYuji NogamiHajime YashiroKeisuke Kato
    • Hajime KitamuraMasaru TakeuchiHideo YoshikoshiMikio KitaiTakashi ChinoYuji NogamiHajime YashiroKeisuke Kato
    • G01N21/85G01N33/44G01V8/10H04N7/18G01N21/29
    • G01N33/442G01N21/85
    • An apparatus for automatically and continuously inspecting a powdery product for the presence of foreign substances as contaminants, which permits highly precise inspection of powdery products, comprises static charge eliminator 10 for eliminating electrostatic charges generated on a powdery sample supplied to the apparatus; hopper 41 for receiving and storing the powdery sample whose electrostatic charges have been eliminated and dropped onto the hopper through static charge eliminator 10; conveyor 42 for conveying the powdery sample, as a subject to be photographed, discharged from hopper 41 and spread over conveyor 42 in the form of a layer having a uniform thickness; and video camera 43 for photographing, over a predetermined visual field, the powdery sample on the subject-conveyor. Images taken by video camera 43 do not include those originated from dark spots due to unevenness of the powdery sample distribution, but includes only those originated from foreign substances even when inspecting a powdery sample which is liable to be electrically charged such as a vinyl chloride resin, since the powdery sample is not agglomerated.
    • 用于自动连续地检测粉状产品的外来物质作为污染物的存在,其允许对粉末产品进行高精度检测的装置包括静电消除器10,用于消除在提供给设备的粉末样品上产生的静电电荷; 漏斗41,用于接收和存储静电荷被去除并通过静电消除器10落到料斗上的粉末样品; 用于输送粉状样品的输送器42作为待拍摄对象,从料斗41排出并以具有均匀厚度的层的形式铺展在输送器42上; 和摄像机43,用于在预定的视场上拍摄主体输送机上的粉末样品。 由摄像机43拍摄的图像不包括由于粉末样品分布不均匀而产生的黑点,即使在检查容易被充电的粉状样品(例如氯乙烯树脂)时,也仅包括源自异物的那些 ,因为粉末状样品不凝聚。
    • 2. 发明授权
    • Conditioning method, computer readable storage medium and substrate processing apparatus
    • 调节方法,计算机可读存储介质和基板处理装置
    • US08980366B2
    • 2015-03-17
    • US13433509
    • 2012-03-29
    • Takashi ChinoYojiro Aoki
    • Takashi ChinoYojiro Aoki
    • C23C16/00C23C16/52C23C16/44
    • C23C16/00C23C16/44C23C16/4401C23C16/52
    • In a conditioning method conditions interiors of a plurality of process chambers of a substrate processing apparatus, conditioning of the interior of the first process chamber is performed if a first integrated value set in connection with the process of the substrate reaches a set value N1. The second process chamber is set in a standby state when the conditioning of the first process chamber starts and the series of processes is stopped. By determining whether a second integrated value set in connection with process of the substrate in the second process chamber is equal to or greater than a set value N2, count of a third integrated value in the second process chamber is started if the second integrated value is equal to or greater than the set value N2. A conditioning of the second process chamber is performed if the third integrated value exceeds a set value N3.
    • 在调节方法中,如果与衬底的处理相关联地设置的第一积分值达到设定值N1,则执行衬底处理设备的多个处理室的内部,执行第一处理室内部的调节。 当第一处理室的调节开始并且一系列处理停止时,第二处理室被置于待机状态。 通过确定与第二处理室中的衬底的处理相关的第二积分值是否等于或大于设定值N2,如果第二积分值是第二积分值,则开始第二处理室中的第三积分值的计数 等于或大于设定值N2。 如果第三积分值超过设定值N3,则执行第二处理室的调节。
    • 3. 发明申请
    • CONDITIONING METHOD, COMPUTER READABLE STORAGE MEDIUM AND SUBSTRATE PROCESSING APPARATUS
    • 控制方法,计算机可读存储介质和基板处理设备
    • US20120251704A1
    • 2012-10-04
    • US13433509
    • 2012-03-29
    • Takashi CHINOYojiro AOKI
    • Takashi CHINOYojiro AOKI
    • C23C16/06B05C11/00
    • C23C16/00C23C16/44C23C16/4401C23C16/52
    • In a conditioning method conditions interiors of a plurality of process chambers of a substrate processing apparatus, conditioning of the interior of the first process chamber is performed if a first integrated value set in connection with the process of the substrate reaches a set value N1. The second process chamber is set in a standby state when the conditioning of the first process chamber starts and the series of processes is stopped. By determining whether a second integrated value set in connection with process of the substrate in the second process chamber is equal to or greater than a set value N2, count of a third integrated value in the second process chamber is started if the second integrated value is equal to or greater than the set value N2. A conditioning of the second process chamber is performed if the third integrated value exceeds a set value N3.
    • 在调节方法中,如果与衬底的处理相关联地设置的第一积分值达到设定值N1,则执行衬底处理设备的多个处理室的内部,执行第一处理室内部的调节。 当第一处理室的调节开始并且一系列处理停止时,第二处理室被置于待机状态。 通过确定与第二处理室中的衬底的处理相关的第二积分值是否等于或大于设定值N2,如果第二积分值是第二积分值,则开始第二处理室中的第三积分值的计数 等于或大于设定值N2。 如果第三积分值超过设定值N3,则执行第二处理室的调节。
    • 8. 发明授权
    • Apparatus for automatically determining rate of plasticizer absorption
of resin powder
    • 用于自动确定树脂粉末增塑剂吸收速率的装置
    • US5492023A
    • 1996-02-20
    • US171738
    • 1993-12-22
    • Hajime KitamuraMasaru TakeuchiHideo YoshikoshiMikio KitaiTakashi ChinoYuji NogamiHajime YashiroKeisuke Kato
    • Hajime KitamuraMasaru TakeuchiHideo YoshikoshiMikio KitaiTakashi ChinoYuji NogamiHajime YashiroKeisuke Kato
    • G01N5/02G01N33/44G01N35/00G01N35/04
    • G01N33/442G01N35/0099G01N5/02G01N2035/00188G01N2035/00217G01N2035/00495
    • An apparatus for automatically determining the rate of plasticizer absorption of a powdery resin sample such as a vinyl chloride resin sample. The apparatus for automatically determining the rate of plasticizer absorption of a powdery resin sample is one in which the rate of plasticizer absorption is determined by treating, in a centrifugal separator 10, a powdery resin contained in an inspection container 2 together with an excess of a plasticizer, to remove from the powdery resin sample the excess plasticizer, and determining the amount of the plasticizer absorbed by and remaining in the powdery resin. The apparatus according to the present invention includes an electronic balance 3 for weighing out the powdery resin which is connected to an arithmetic circuit 61; an injection means 5 for injecting the plasticizer into the powdery resin; a disposal chute 6 for recovering the inspection container 2 already used in the weight-determination; and a suction device 7 for aspirating the plasticizer separated by and remaining in the centrifugal separator 10. The apparatus further includes a robot 4 for transferring the powdery resin contained in the inspection container 2 to the electronic balance 3, the plasticizer-injection means 5, the centrifugal separator 10 or the disposal chute 6; and a driving unit 15 for moving an aspiration port 9 of the suction device 7 up and down within the centrifugal separator 10.
    • 一种用于自动测定诸如氯乙烯树脂样品的粉末状树脂样品的增塑剂吸收速率的装置。 用于自动确定粉末状树脂样品的增塑剂吸收速率的装置是其中增塑剂吸收速率通过在离心分离器10中处理包含在检查容器2中的粉状树脂以及过量的 增塑剂,从粉末状树脂样品中除去过量的增塑剂,并测定由粉末状树脂吸收和残留的增塑剂的量。 根据本发明的装置包括用于称量与运算电路61连接的粉状树脂的电子天平3; 用于将增塑剂注入到粉末状树脂中的注射装置5; 用于回收已经用于重量测定的检查容器2的处理滑槽6; 以及用于抽吸由离心分离器10分离并保留在离心分离器10中的增塑剂的抽吸装置7.该装置还包括机器人4,用于将包含在检查容器2中的粉状树脂转移到电子天平3,增塑剂注入装置5, 离心分离器10或处理槽6; 以及用于在离心分离器10内上下移动吸引装置7的抽吸口9的驱动单元15。