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    • 8. 发明授权
    • Method for forming a through hole in a ceramic green sheet
    • 在陶瓷生片中形成通孔的方法
    • US06359255B1
    • 2002-03-19
    • US09667044
    • 2000-09-21
    • Takahiro YamamotoTadashi Morimoto
    • Takahiro YamamotoTadashi Morimoto
    • B23K2638
    • B23K26/0738B23K26/066B23K26/0661B23K26/382B23K26/40B23K2103/52H01L21/486H05K1/0306H05K3/0029H05K2203/056
    • A mask is mounted on one surface of a ceramic green sheet which is supported on an X-Y table. The mask is provided with a plurality of through hole transmissive portions. A pulsed laser beam is applied to the mask. The size of the laser beam is sufficiently large to encompass at least several of said through hole transmissive portions. The laser beam passes through the through hole transmissive portions and simultaneously forms a plurality of through holes in the ceramic green sheet. Because the mask is located on (or at least substantially adjacent) the surface of the ceramic green sheet, the size and shape of the through holes will be approximately identical to the size and shape of the through hole transmissive portions, thereby precisely controlling the size and shape of the through holes. The mask can be irradiated while the ceramic green sheet is moving.
    • 将掩模安装在支撑在X-Y台上的陶瓷生片的一个表面上。 掩模设置有多个通孔透射部。 将脉冲激光束施加到掩模上。 激光束的尺寸足够大以包围至少几个所述通孔透射部分。 激光束通过通孔透射部分,同时在陶瓷生片中形成多个通孔。 由于掩模位于陶瓷生片的表面上(或至少基本相邻),所以通孔的尺寸和形状将大致与通孔透射部分的尺寸和形状相同,从而精确地控制尺寸 和通孔的形状。 当陶瓷生坯移动时,可以照射面罩。
    • 9. 发明授权
    • Method and apparatus for forming a through hole in a ceramic green sheet
    • 在陶瓷生片中形成通孔的方法和装置
    • US06172330B2
    • 2001-01-09
    • US09033026
    • 1998-03-02
    • Takahiro YamamotoTadashi Morimoto
    • Takahiro YamamotoTadashi Morimoto
    • B23K2638
    • B23K26/0738B23K26/066B23K26/0661B23K26/382B23K26/40B23K2103/52H01L21/486H05K1/0306H05K3/0029H05K2203/056
    • A mask is mounted on one surface of a ceramic green sheet which is supported on an X-Y table. The mask is provided with a plurality of through hole transmissive portions. A pulsed laser beam is applied to the mask. The size of the laser beam is sufficiently large to encompass at least several of said through hole transmissive portions. The laser beam passes through the through hole transmissive portions and simultaneously forms a plurality of through holes in the ceramic green sheet. Because the mask is located on (or at least substantially adjacent) the surface of the ceramic green sheet, the size and shape of the through holes will be approximately identical to the size and shape of the through hole transmissive portions, thereby precisely controlling the size and shape of the through holes. A preferred laser processing apparatus used in this processing method has a laser source, a laser-source driving circuit for driving the laser source, a table for holding an object having a mask disposed thereon, a galvanomirror directed to the table, a galvanomirror driving circuit for changing the reflection angle of the galvanomirror, a control circuit for sending control signals to the laser-source driving circuit and the galvanomirror driving circuit, and a converging lens disposed between the laser source and the mask so as to converge a laser beam emitted from the laser source.
    • 将掩模安装在支撑在X-Y台上的陶瓷生片的一个表面上。 掩模设置有多个通孔透射部。 将脉冲激光束施加到掩模。 激光束的尺寸足够大以包围至少几个所述通孔透射部分。 激光束通过通孔透射部分,同时在陶瓷生片中形成多个通孔。 由于掩模位于陶瓷生片的表面上(或至少基本相邻),所以通孔的尺寸和形状将大致与通孔透射部分的尺寸和形状相同,从而精确地控制尺寸 和通孔的形状。 在该处理方法中使用的优选的激光处理装置具有激光源,用于驱动激光源的激光源驱动电路,用于保持设置有掩模的物体的台,指向台的电流镜,电流计镜驱动电路 用于改变电流镜的反射角的控制电路,用于向激光源驱动电路和电流计镜驱动电路发送控制信号的控制电路和设置在激光源和掩模之间的会聚透镜,以便会聚从 激光源。