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    • 2. 发明申请
    • DYNAMIC LOAD LOCK WITH CELLULAR STRUCTURE FOR DISCRETE SUBSTRATES
    • 动态负载锁定用于分离基板的细胞结构
    • US20130199891A1
    • 2013-08-08
    • US13748271
    • 2013-01-23
    • Wolfgang BUSCHBECKJuergen HENRICHAndreas LOPPSusanne SCHLAEFER
    • Wolfgang BUSCHBECKJuergen HENRICHAndreas LOPPSusanne SCHLAEFER
    • H01L21/677
    • H01L21/67739H01L21/67201
    • A dynamic load lock chamber that includes a plurality of actuators positioned along its length to achieve a desired pressure gradient from an atmospheric pressure side to a processing pressure side of the chamber is provided. The chamber includes a transport belt continuously running through the chamber to transport substrates from the atmospheric pressure side to the processing pressure side of the chamber, if situated on an inlet side of a production line, and from the processing pressure side to the atmospheric pressure side of the chamber, if positioned on an outlet side of the production line. Separation mechanisms may be attached to the belt to separate discrete regions within the chamber into a plurality of discrete volumes. Substrates may be disposed between the separation mechanisms, such that separation between adjacent pressure regions within the chamber is maintained as the substrates are transported through the chamber.
    • 提供一种动态负载锁定室,其包括沿其长度定位的多个致动器,以实现从室的大气压侧到处理压力侧的期望的压力梯度。 所述腔室包括连续运行通过所述腔室的输送带,以将衬底从所述大气压侧输送到所述腔室的处理压力侧,如果位于生产线的入口侧,以及从处理压力侧到大气压侧 如果位于生产线的出口侧。 分离机构可以附接到带上以将腔室内的离散区域分离成多个离散体积。 衬底可以设置在分离机构之间,使得当衬底被输送通过腔室时,保持室内的相邻压力区域之间的间隔。