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1. 发明授权

US08344744B2 Probe station for on-wafer-measurement under EMI-shielding 有权
标题翻译：探测台用于EMI屏蔽下的晶圆测量
公开(公告)号：US08344744B2
公开(公告)日：2013-01-01
申请号：US12818442
申请日：2010-06-18
申请人： Axel Schmidt , Botho Hirschfeld , Stojan Kanev , Andrej Rumiantsev , Michael Teich
发明人： Axel Schmidt , Botho Hirschfeld , Stojan Kanev , Andrej Rumiantsev , Michael Teich
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译：提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置在定位期间相对于卡盘是恒定的。信号前置放大器通过测量电缆连接到壳体外部的测量单元。

2. 发明申请

US20110291680A1 CHUCK FOR SUPPORTING AND RETAINING A TEST SUBSTRATE AND A CALIBRATION SUBSTRATE 有权
标题翻译：支持和保留测试基板和校准基板
公开(公告)号：US20110291680A1
公开(公告)日：2011-12-01
申请号：US13209171
申请日：2011-08-12
申请人： Andrej Rumiantsev , Stojan Kanev , Steffen Schott , Karsten Stoll
发明人： Andrej Rumiantsev , Stojan Kanev , Steffen Schott , Karsten Stoll
IPC分类号： G01R31/00 , B23Q3/00
CPC分类号： G01R31/2886
摘要： A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate. The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.
摘要翻译：用于支撑和保持测试基板的卡盘包括用于支撑和保持校准基板的装置。卡盘包括用于支撑测试基板的第一支撑表面和横向偏移到第一支撑表面的用于支撑校准基板的第二支撑表面。校准基板具有用于校准探测器的测量单元的平面校准标准，以及至少在校准标准区域中位于校准基板下方的介电材料或空气。为了能够在测试基板上获取实际的热条件，特别是在已知和未知的校准标准上，因此考虑到所使用的校准标准的电气行为的热影响，第二支撑表面装备有温度校准基板的控制。

3. 发明申请

US20110227602A1 PROBE STATION FOR ON-WAFER-MEASUREMENT UNDER EMI-SHIELDING 有权
标题翻译：探测器在EMI屏蔽下进行测量
公开(公告)号：US20110227602A1
公开(公告)日：2011-09-22
申请号：US12818442
申请日：2010-06-18
申请人： Axel SCHMIDT , Botho HIRSCHFELD , Stojan KANEV , Andrej RUMIANTSEV , Michael TEICH
发明人： Axel SCHMIDT , Botho HIRSCHFELD , Stojan KANEV , Andrej RUMIANTSEV , Michael TEICH
IPC分类号： G01R31/26
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译：提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置在定位期间相对于卡盘是恒定的。信号前置放大器通过测量电缆连接到壳体外部的测量单元。

4. 发明授权

US07768271B2 Method for calibration of a vectorial network analyzer having more than two ports 失效
标题翻译：校准具有两个以上端口的矢量网络分析仪的方法
公开(公告)号：US07768271B2
公开(公告)日：2010-08-03
申请号：US11942095
申请日：2007-11-19
申请人： Andrej Rumiantsev , Steffen Schott , Stojan Kanev
发明人： Andrej Rumiantsev , Steffen Schott , Stojan Kanev
IPC分类号： G01R35/00
CPC分类号： G01R35/005 , G01R27/28
摘要： Method for calibrating a vectorial network analyzer, with n measurement ports (n>2) and at least m measurement sites, where m>n+1 includes measurement of three different n-port reflection standards, connected between measurement ports in any desired order, and successive measurement of reflection and transmission parameters at different transmission standards, connected between two respective measurement ports, and computational determination of error coefficients and error-corrected scattering matrices [Sx] of the n-port standards. Reflection standards, Short and Open, are unknown, but physically identical at each n-fold one-port. Reflection standard, realized by wave terminations, is known, but can be different at each n-fold one-port. Transmission standards are measured at a transmission standard, having known length and attenuation at a two-port, and at unknown transmission standards, identical for incident and reflected waves at remaining two-ports, which can be connected. Unknown reflection and transmission values are determined computationally by the measurements.
摘要翻译：用于校准具有n个测量端口（n> 2）和至少m个测量位置的矢量网络分析仪的方法，其中m> n + 1包括以任何所需顺序连接在测量端口之间的三个不同的n端口反射标准的测量，连续测量两个相应测量端口之间的不同传输标准的反射和传输参数，以及n端口标准的误差系数和误差校正散射矩阵[Sx]的计算确定。反射标准，短路和开放是未知的，但在每个n-fold单端口物理上相同。反射标准通过波形终端实现，是已知的，但在每个n-fold单端口可以是不同的。传输标准以传输标准测量，在双端口具有已知长度和衰减，并且在未知传输标准下，对于可连接的剩余两端口处的入射波和反射波是相同的。通过测量计算地确定未知的反射和透射值。

5. 发明申请

US20100106439A1 PROCESS FOR MEASURING THE IMPEDANCE OF ELECTRONIC CIRCUITS 审中-公开
标题翻译：测量电子电路阻抗的方法
公开(公告)号：US20100106439A1
公开(公告)日：2010-04-29
申请号：US12609155
申请日：2009-10-30
申请人： Andrej RUMIANTSEV , Stojan KANEV
发明人： Andrej RUMIANTSEV , Stojan KANEV
IPC分类号： G01R27/00 , G01R27/28
CPC分类号： G01R27/04
摘要： In a method for measurement of impedance of electronic circuits, an input of the electronic circuit is acted upon by a high-frequency ac voltage with a measurement frequency f as a test signal and, from the reaction of the circuit to the test signal, the impedance Z of the circuit is determined. A parameter S, which represents the value S = Z - Z 0 Z + Z 0 at a stipulated reference impedance Z0, is produced by an analyzer with a reference impedance Z0, and from this parameter S the impedance Z is determined. To minimize the error in measuring the impedances by determining parameter S, the measurement frequency f is set so that a minimal error ΔZ is produced for Z.
摘要翻译：在电子电路的阻抗测定方法中，以测量频率f为测试信号的高频交流电压对电子电路的输入进行动作，从电路与测试信号的反应，确定电路的阻抗Z。在规定的基准阻抗Z0下，表示值S = Z-Z 0 Z + Z 0的参数S由具有参考阻抗Z0的分析器产生，并且从该参数S确定阻抗Z。为了通过确定参数S来最小化测量阻抗的误差，测量频率f被设置为使Z产生最小误差＆Dgr; Z。

6. 发明授权

US07652491B2 Probe support with shield for the examination of test substrates under use of probe supports 有权
标题翻译：使用探头支架检测测试基板的探头支架
公开(公告)号：US07652491B2
公开(公告)日：2010-01-26
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G10R31/28
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.
摘要翻译：用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量组成直到第一个和每个附加的接触位置。

7. 发明授权

US07579849B2 Probe holder for a probe for testing semiconductor components 有权
标题翻译：用于测试半导体元件的探头的探头支架
公开(公告)号：US07579849B2
公开(公告)日：2009-08-25
申请号：US11674430
申请日：2007-02-13
申请人： Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
发明人： Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
IPC分类号： G01R31/02
CPC分类号： G01R1/06705 , G01R1/0675
摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.
摘要翻译：探针支架，其中探针在垂直力的作用下具有轻微的水平偏移，包括用于探针的探针支架，其中该支架适于紧固和电接触连接在载体装置上测试装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将探针保持器连接到载体装置的紧固臂。保持臂和紧固臂通过铰接接头彼此连接，由此可以通过增加探针的屈服运动的半径来减小或甚至防止由于外力引起的针尖的水平偏移。

8. 发明申请

US20090049944A1 MICROMANIPULATOR FOR MOVING A PROBE 审中-公开
标题翻译：用于移动探头的微型计算机
公开(公告)号：US20090049944A1
公开(公告)日：2009-02-26
申请号：US12022261
申请日：2008-01-30
申请人： Jorg Kiesewetter , Stojan Kanev , Lutz Junker , Stefan Kreissig
发明人： Jorg Kiesewetter , Stojan Kanev , Lutz Junker , Stefan Kreissig
IPC分类号： B25J7/00
CPC分类号： B25J7/00 , B25J9/144 , G01R1/06705 , Y10T74/20207
摘要： A micromanipulator for moving a probe comprises two elements which are mechanically connected to one another in such a way that one element can be moved relative to other element. The movement of the element occurs as a result of the pressure change of a fluid which acts upon an actuator which is in mechanical contact to a mobile element or to an element moving on a surface segment.
摘要翻译：用于移动探针的显微操纵器包括两个元件，这两个元件以相对于其它元件移动一个元件的方式彼此机械连接。元件的运动是由于作用在致动器上的流体的压力变化的结果，该致动器机械地接触到移动元件或者在表面段上移动的元件。

9. 发明申请

US20080122465A1 PROBE HOLDER FOR A PROBE FOR TESTING SEMICONDUCTOR COMPONENTS 有权
标题翻译：用于测试半导体组件的探测器的探头支架
公开(公告)号：US20080122465A1
公开(公告)日：2008-05-29
申请号：US11674205
申请日：2007-02-13
申请人： Dietmar RUNGE , Stojan KANEV , Claus DIETRICH
发明人： Dietmar RUNGE , Stojan KANEV , Claus DIETRICH
IPC分类号： G01R1/04
CPC分类号： G01R1/07342
摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force comprises a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the holder arm to the carrier device. The holder arm and fastening arm are connected to one another by a parallel guide whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented making it easier for the probe needle to carry out a vertical yielding movement, with almost no rotation of the probe needle about a horizontal axis.
摘要翻译：其中探针在垂直力作用下具有轻微水平偏移的探针支架包括用于探针的探针支架，其中该支架用于紧固和电接触连接在测试的载体装置上装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将保持臂连接到承载装置的紧固臂。保持臂和紧固臂通过平行的引导件彼此连接，由此可以减少或甚至防止针尖由于外力引起的水平偏移，从而使探针更容易进行垂直屈服运动，几乎可以探头针绕水平轴不旋转。

10. 发明申请

US20080116911A1 PROBE RECEPTACLE FOR MOUNTING A PROBE FOR TESTING SEMICONDUCTOR COMPONENTS, PROBE HOLDER ARM AND TEST APPARATUS 失效
标题翻译：用于安装用于测试半导体元件的探头的探头插座，探头臂和测试装置
公开(公告)号：US20080116911A1
公开(公告)日：2008-05-22
申请号：US11674208
申请日：2007-02-13
申请人： Hans-Jurgen FLEISCHER , Axel SCHMIDT , Stojan KANEV , Axel BECKER
发明人： Hans-Jurgen FLEISCHER , Axel SCHMIDT , Stojan KANEV , Axel BECKER
IPC分类号： G01R1/067
CPC分类号： G01R31/2891 , G01R31/2874
摘要： To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.
摘要翻译：为了以可重复的方式布置探针，确保探头针头的可靠接触连接，并确保即使在高温或测试力下也能牢固地固定探头针头，提供探头插座，用于安装用于测试半导体部件的探头。探针具有探针和基本上棱柱形的探针轴。探针插座包括具有插座开口的基座，以容纳棱柱形探针轴，被基壁包围。底壁包括至少两个可以朝向彼此移动的底壁段。还提供了具有这种探针插座的探针支架臂和具有至少一个具有这种探针插座的探头的测试装置。

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