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1. 发明申请

US20080122465A1 PROBE HOLDER FOR A PROBE FOR TESTING SEMICONDUCTOR COMPONENTS 有权
标题翻译：用于测试半导体组件的探测器的探头支架
公开(公告)号：US20080122465A1
公开(公告)日：2008-05-29
申请号：US11674205
申请日：2007-02-13
申请人： Dietmar RUNGE , Stojan KANEV , Claus DIETRICH
发明人： Dietmar RUNGE , Stojan KANEV , Claus DIETRICH
IPC分类号： G01R1/04
CPC分类号： G01R1/07342
摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force comprises a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the holder arm to the carrier device. The holder arm and fastening arm are connected to one another by a parallel guide whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented making it easier for the probe needle to carry out a vertical yielding movement, with almost no rotation of the probe needle about a horizontal axis.
摘要翻译：其中探针在垂直力作用下具有轻微水平偏移的探针支架包括用于探针的探针支架，其中该支架用于紧固和电接触连接在测试的载体装置上装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将保持臂连接到承载装置的紧固臂。保持臂和紧固臂通过平行的引导件彼此连接，由此可以减少或甚至防止针尖由于外力引起的水平偏移，从而使探针更容易进行垂直屈服运动，几乎可以探头针绕水平轴不旋转。

2. 发明申请

US20080180119A1 METHOD FOR TESTING ELECTRONIC COMPONENTS AND TEST APPARATUS FOR CARRYING OUT THE METHOD 失效
标题翻译：用于测试电子元件的方法和用于实施该方法的测试装置
公开(公告)号：US20080180119A1
公开(公告)日：2008-07-31
申请号：US11947206
申请日：2007-11-29
申请人： Stojan KANEV , Jorg Kiesewetter
发明人： Stojan KANEV , Jorg Kiesewetter
IPC分类号： G01R31/26 , G01R31/02
CPC分类号： G01R31/2887
摘要： A method and an apparatus are provided which make it possible, when testing chips arranged on a wafer, to be able to test optionally both additional components arranged on horizontal boundary lines and on vertical boundary lines. The additional components arranged on horizontal boundary lines are tested in a first position of the wafer. For testing the additional components arranged on vertical boundary lines, the wafer is rotated about its vertical axis through 90° relative to the first position into a second position. The apparatus comprises a housing and, in the housing, at least one test probe for making contact with an electronic component, a chuck for moving the wafer and a rotatably mounted additional plate operatively connected to the chuck.
摘要翻译：提供了一种方法和装置，其使得当测试布置在晶片上的芯片时能够可选地测试布置在水平边界线上和垂直边界线上的两个附加组件。布置在水平边界线上的附加部件在晶片的第一位置被测试。为了测试布置在垂直边界线上的附加组件，晶片围绕其垂直轴线相对于第一位置旋转90°进入第二位置。该装置包括壳体，并且在壳体中，用于与电子部件接触的至少一个测试探针，用于移动晶片的卡盘和可操作地连接到卡盘的可旋转地安装的附加板。

3. 发明申请

US20090315581A1 CHUCK FOR SUPPORTING AND RETAINING A TEST SUBSTRATE AND A CALIBRATION SUBSTRATE 有权
标题翻译：支持和保留测试基板和校准基板
公开(公告)号：US20090315581A1
公开(公告)日：2009-12-24
申请号：US12489913
申请日：2009-06-23
申请人： Andrej RUMIANTSEV , Stojan KANEV , Steffen SCHOTT , Karsten STOLL
发明人： Andrej RUMIANTSEV , Stojan KANEV , Steffen SCHOTT , Karsten STOLL
IPC分类号： G01R31/02
CPC分类号： G01R31/2886
摘要： A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.
摘要翻译：用于支撑和保持测试基板的卡盘包括用于支撑和保持校准基板的装置。卡盘包括用于支撑测试基板的第一支撑表面和横向偏移到第一支撑表面的用于支撑校准基板的第二支撑表面。校准基板具有用于校准探测器的测量单元的平面校准标准，以及至少在校准标准区域中位于校准基板下方的电介质材料或空气。为了能够在测试基板上获取实际的热条件，特别是在已知和未知的校准标准上，因此考虑到所使用的校准标准的电气行为的热影响，第二支撑表面装备有温度校准基板的控制。

4. 发明申请

US20090058442A1 PROBER FOR TESTING COMPONENTS 有权
标题翻译：测试组件的探测器
公开(公告)号：US20090058442A1
公开(公告)日：2009-03-05
申请号：US12145090
申请日：2008-06-24
申请人： Sebastian GIESSMANN , Stefan KREISSIG , Stojan KANEV
发明人： Sebastian GIESSMANN , Stefan KREISSIG , Stojan KANEV
IPC分类号： G01R1/073
CPC分类号： G11C29/56 , G01R31/2862 , G01R31/315 , G11C29/56016 , G11C2029/5602
摘要： A prober for testing components comprises a lower frame, over which a probe holder plate is disposed at a distance therefrom for receiving test probes that make contact with the components to be tested and to which a displacement device is connected. A substrate carrier is disposed in the space between the frame and the probe holder plate, and the probe holder plate is provided with an opening, below which the substrate carrier can be displaced. To expand the scope of application of probers used for testing components, all those components of the prober that surround the substrate are made from a non-magnetic material.
摘要翻译：用于测试部件的检测器包括下框架，探针保持板在其上设置一段距离，用于接收与要测试的部件接触的测试探针，并且与其连接的位移装置。衬底载体设置在框架和探针保持板之间的空间中，并且探针保持板设置有开口，在该开口下方可以移动衬底载体。为了扩大用于测试组件的探测器的应用范围，围绕衬底的探测器的所有组件由非磁性材料制成。

5. 发明申请

US20090314051A1 METHOD FOR DETERMINATION OF ELECTRICAL PROPERTIES OF ELECTRONIC COMPONETS AND METHOD FOR CALIBRATION OF A MEASURING UNIT 审中-公开
标题翻译：用于确定电子元件的电气特性的方法和测量单元的校准方法
公开(公告)号：US20090314051A1
公开(公告)日：2009-12-24
申请号：US12488702
申请日：2009-06-22
申请人： Victar KHUTKO , Andrej RUMIANTSEV , Stojan KANEV
发明人： Victar KHUTKO , Andrej RUMIANTSEV , Stojan KANEV
IPC分类号： G01D18/00 , G01R19/00
CPC分类号： G01R35/007 , G01R27/28 , G01R31/2872
摘要： In a method for calibration of a measurement unit for determination of electrical properties of electronic components using at least one planar calibration standard, an electrical measurement quantity is measured at two different temperatures. The electrical property of the calibration standard is known at at least one temperature or is to be determined by calculation. A temperature coefficient is determined from both measured quantities, which describes the relative change of the electrical property of the calibration standard accompanying the temperature change and with which the electrical property of the calibration standard is determined at a measurement temperature. From the change in electrical property, an error coefficient of the measurement unit is determined. A method is also provided for determination of an electrical property of an electronic component, using the calibration method.
摘要翻译：在使用至少一个平面校准标准来确定电子元件的电特性的测量单元的校准方法中，在两个不同温度下测量电测量量。校准标准品的电学性质在至少一个温度下是已知的，或通过计算来确定。温度系数由两个测量量确定，其描述伴随温度变化的校正标准的电性能的相对变化，并且在测量温度下确定校准标准的电性能。根据电气特性的变化，确定测定单元的误差系数。还提供了一种用于使用校准方法确定电子部件的电特性的方法。

6. 发明申请

US20090085595A1 METHOD AND ARRANGEMENT FOR POSITIONING A PROBE CARD 有权
公开(公告)号：US20090085595A1
公开(公告)日：2009-04-02
申请号：US12329968
申请日：2008-12-08
申请人： Stojan KANEV , Hans-Jurgen FLEISCHER , Stefan KREISSIG , Jorg KIESEWETTER
发明人： Stojan KANEV , Hans-Jurgen FLEISCHER , Stefan KREISSIG , Jorg KIESEWETTER
IPC分类号： G01R1/073
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.

7. 发明申请

US20080224426A1 CHUCK WITH TRIAXIAL CONSTRUCTION 有权
标题翻译：三叉岔结构
公开(公告)号：US20080224426A1
公开(公告)日：2008-09-18
申请号：US12048323
申请日：2008-03-14
申请人： Michael TEICH , Karsten STOLL , Axel SCHMIDT , Stojan KANEV , Jorg KIESEWETTER
发明人： Michael TEICH , Karsten STOLL , Axel SCHMIDT , Stojan KANEV , Jorg KIESEWETTER
IPC分类号： B23B31/12
CPC分类号： G01R1/04 , G01R31/2865 , H01L21/68714 , H01L21/68757 , Y10T279/11 , Y10T279/18
摘要： A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.
摘要翻译：具有三轴结构的卡盘包括用于测试基板的接收表面并且布置在接收表面下方：导电的第一表面元件，与其电绝缘的导电的第二表面元件和与其电绝缘的导电的第三表面元件，在第一和第二表面元件之间，第一绝缘元件和第二和第三表面元件之间的第二绝缘元件。实现了用于非常低的电流测量的卡盘，其可用于防止泄漏电流和摩擦电荷的发生，并且在生产方面被有利地配置，这是因为至少一个导电表面元件至少机械地连接到一个绝缘元件并且具有补偿由相应的表面元件和相邻绝缘元件之间的不同膨胀系数的差异引起的膨胀差的弹性。

8. 发明申请

US20080315903A1 METHOD FOR MEASUREMENT OF A DEVICE UNDER TEST 有权
标题翻译：测量装置的方法
公开(公告)号：US20080315903A1
公开(公告)日：2008-12-25
申请号：US11765019
申请日：2007-06-19
申请人： Axel SCHMIDT , Frank FEHRMANN , Ulf HACKIUS , Stojan KANEV , Steffen LAUBE , Jorg KIESEWETTER
发明人： Axel SCHMIDT , Frank FEHRMANN , Ulf HACKIUS , Stojan KANEV , Steffen LAUBE , Jorg KIESEWETTER
IPC分类号： G01R31/02 , G01R1/04
CPC分类号： G01R31/2891
摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
摘要翻译：公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。

9. 发明申请

US20080122468A1 PROBE HOLDER FOR A PROBE FOR TESTING SEMICONDUCTOR COMPONENTS 有权
标题翻译：用于测试半导体组件的探测器的探头支架
公开(公告)号：US20080122468A1
公开(公告)日：2008-05-29
申请号：US11674430
申请日：2007-02-13
申请人： Jorg KIESEWETTER , Stefan KREISSIG , Stojan KANEV
发明人： Jorg KIESEWETTER , Stefan KREISSIG , Stojan KANEV
IPC分类号： G01R31/02
CPC分类号： G01R1/06705 , G01R1/0675
摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.
摘要翻译：探针支架，其中探针在垂直力的作用下具有轻微的水平偏移，包括用于探针的探针支架，其中该支架适于紧固和电接触连接在载体装置上测试装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将探针保持器连接到载体装置的紧固臂。保持臂和紧固臂通过铰接接头彼此连接，由此可以通过增加探针的屈服运动的半径来减小或甚至防止由于外力引起的针尖的水平偏移。

10. 发明申请

US20110227602A1 PROBE STATION FOR ON-WAFER-MEASUREMENT UNDER EMI-SHIELDING 有权
标题翻译：探测器在EMI屏蔽下进行测量
公开(公告)号：US20110227602A1
公开(公告)日：2011-09-22
申请号：US12818442
申请日：2010-06-18
申请人： Axel SCHMIDT , Botho HIRSCHFELD , Stojan KANEV , Andrej RUMIANTSEV , Michael TEICH
发明人： Axel SCHMIDT , Botho HIRSCHFELD , Stojan KANEV , Andrej RUMIANTSEV , Michael TEICH
IPC分类号： G01R31/26
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译：提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置在定位期间相对于卡盘是恒定的。信号前置放大器通过测量电缆连接到壳体外部的测量单元。

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