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1. 发明申请

US20050211919A1 System and method for patterning a flexible substrate in a lithography tool 有权
标题翻译：在光刻工具中图案化柔性基板的系统和方法
公开(公告)号：US20050211919A1
公开(公告)日：2005-09-29
申请号：US11068165
申请日：2005-03-01
申请人： Daniel Galburt , Stanley Janik
发明人： Daniel Galburt , Stanley Janik
IPC分类号： G03F7/20 , A61N5/00 , H01L21/027 , H05K1/00 , H05K3/00
CPC分类号： G03F7/707 , G03F7/70791 , H05K1/0393 , H05K3/0082
摘要： A system and method are used to feed a flexible substrate through a patterned beam to be exposed at target portions by the pattered beam. In one example, the flexible substrate is passed over a chuck (e.g., a vacuum chuck). In one example, the chuck can bias the flexible substrate against a chuck surface during alignment, focus, and exposure operations. By biasing the flexible substrate, the flexible substrate can continuously move while being held against the chuck. In one example, the flexible substrate is fed onto the vacuum chuck from a supply roller and fed off the chuck and wrapped on to a take-up roller. The supply and take-up rollers are rotated to follow the scanning motion, which minimizes or substantially eliminates tension on the flexible chuck during the exposure period.
摘要翻译：一种系统和方法用于通过图案化的束馈送柔性基板，以通过图案化的光束在目标部分处暴露。在一个示例中，柔性基板通过卡盘（例如，真空卡盘）。在一个示例中，卡盘可以在对准，聚焦和曝光操作期间将柔性基板偏置在卡盘表面上。通过偏置柔性基板，柔性基板能够在被卡住的同时保持连续移动。在一个示例中，将柔性基板从供应辊馈送到真空卡盘上并从卡盘送出并包裹到卷取辊上。供应和卷取辊旋转以跟随扫描运动，这在曝光期间最小化或基本上消除了柔性卡盘上的张力。

2. 发明授权

US4899596A Self-calibrating torque measuring system 失效
标题翻译：自校准扭矩测量系统
公开(公告)号：US4899596A
公开(公告)日：1990-02-13
申请号：US189976
申请日：1988-05-04
申请人： Stanley Janik , Kimball J. Rumford , Timothy Warner
发明人： Stanley Janik , Kimball J. Rumford , Timothy Warner
IPC分类号： G01L3/10 , G01L25/00
CPC分类号： G01L25/003 , G01L3/101 , G01L3/109
摘要： A universal torque measuring system for hollow drive shafts which automatically compensates for variations in wall thickness exhibited by different drive shafts having the same nominal dimensions. During a calibration procedure, the drive shaft is subjected to a first predetermined torque which causes a certain amount of twist dependent upon its wall thickness. At this time, target indicia are positioned and affixed to the drive shaft to produce an initial phase shift relative to indicia on a reference shaft. Thereafter, when the drive shaft is incorporated into an engine and rotated under load subjecting it to a second predetermined torque less than the first predetermined torque, there is a resulting second phase shift. This second phase shift and the second predetermined torque define a second operating condition of the drive shaft. In turn, the first and second operating conditions define a characteristic relationship between torque and phase shift for the drive shaft. A sensor is positioned to detect deviations in phase shift of the first and second target teeth from the initial phase shift and generates a signal proportional to such deviations. A microprocessor is responsive to the signal from the sensor for automatically deriving a value of torque being experienced by the drive shaft as a function of each such deviation according to the characteristic relationship.
摘要翻译：用于空心驱动轴的通用扭矩测量系统，其自动补偿具有相同标称尺寸的不同驱动轴所呈现的壁厚变化。在校准过程中，驱动轴经受第一预定扭矩，这导致一定量的扭转取决于其壁厚。此时，目标标记被定位并固定到驱动轴，以产生相对于参考轴上的标记的初始相移。此后，当驱动轴结合到发动机中并在负载下转动以使其处于小于第一预定扭矩的第二预定转矩时，产生第二相移。该第二相移和第二预定转矩限定驱动轴的第二操作状态。反过来，第一和第二操作条件限定了驱动轴的转矩和相移之间的特性关系。定位传感器以检测第一和第二目标齿相对于初始相移的偏移，并产生与这种偏差成比例的信号。微处理器响应于来自传感器的信号，以根据特性关系自动导出由驱动轴经历的扭矩值作为每个这样的偏差的函数。

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