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1. 发明申请

US20150355051A1 OPTICAL SYSTEM 审中-公开
标题翻译：光学系统
公开(公告)号：US20150355051A1
公开(公告)日：2015-12-10
申请号：US14827935
申请日：2015-08-17
申请人： Songping Gao
发明人： Songping Gao
IPC分类号： G01M11/00 , G01N21/64 , G01J1/58
CPC分类号： G01M11/00 , G01J1/58 , G01N21/64 , G01N21/6428 , G01N21/6486 , G01N2021/6439 , G01N2201/06113 , G01N2201/12723
摘要： An optical system includes a sample carrier receiving region configured to receive a sample carrier carrying a sample for processing, a source that emits an excitation signal having a wavelength within a first predetermined wavelength range, and a first set of optical components that direct the excitation signal along an excitation path to the sample carrier receiving region, wherein radiation having a wavelength within a second predetermined wavelength range is emitted from the sample carrier receiving region in response to receiving the excitation signal. The optical system further includes a detector configured to detect the emitted radiation and generates a signal indicative of a power of the detected radiation and a second set of optical components that directs the emitted radiation along a collection path to the detector. The optical system further includes a power meter that measures a power of the radiation emitted from the sample carrier receiving region and generates a signal indicative thereof.
摘要翻译：光学系统包括：样本载波接收区域，被配置为接收承载用于处理的样本的采样载体;发射具有在第一预定波长范围内的波长的激励信号的源;以及引导激励信号的第一组光学部件沿着到样品载体接收区域的激励路径，其中响应于接收到激发信号，从采样载体接收区域发射具有第二预定波长范围内的波长的辐射。光学系统还包括检测器，其被配置为检测所发射的辐射并产生指示检测到的辐射的功率的信号;以及第二组光学部件，其将发射的辐射沿着收集路径引导到检测器。光学系统还包括功率计，其测量从采样载体接收区域发射的辐射的功率，并产生指示其的信号。

2. 发明授权

US07557910B2 System and method for controlling a beam source in a workpiece surface inspection system 有权
标题翻译：用于控制工件表面检查系统中的光束源的系统和方法
公开(公告)号：US07557910B2
公开(公告)日：2009-07-07
申请号：US11311924
申请日：2005-12-17
申请人： Bruce Baran , Chris L. Koliopoulos , Songping Gao , Richard Earl Bills , Michael Murphree
发明人： Bruce Baran , Chris L. Koliopoulos , Songping Gao , Richard Earl Bills , Michael Murphree
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
摘要翻译：提供了表面检查系统，以及相关的部件和方法。表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。该系统具有可变扫描速度波束扫描子系统，优选地使用声光偏转器，具有光束补偿，使得可以实现可变扫描速度。还包括用于通过使用散射减少补充来改善信噪比的方法和系统，以及用于选择性地和重复扫描表面上的感兴趣区域以便提供感兴趣区域的附加观察的系统和方法。

3. 发明申请

US20060192950A1 System and method for inspecting a workpiece surface using combinations of light collectors 审中-公开
标题翻译：使用光收集器组合检查工件表面的系统和方法
公开(公告)号：US20060192950A1
公开(公告)日：2006-08-31
申请号：US11311925
申请日：2005-12-17
申请人： Neil Judell , Songping Gao , Timothy Tiemeyer
发明人： Neil Judell , Songping Gao , Timothy Tiemeyer
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors
摘要翻译：表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。处理子系统具有用于形成所选择的信道的信道形成能力和与每个选择的信道相关联的开发信道输出，其中信道输出从与至少一个收集和检测模块相关联的收集器输出开发。此外，使用通过后集电极输出观察到的散射光和机翼收集器观察到的P偏振散射光，描述了用于检测小球形物体和类似几何形状的缺陷的球形缺陷通道

4. 发明授权

US09110023B2 Optical system 有权
标题翻译：光学系统
公开(公告)号：US09110023B2
公开(公告)日：2015-08-18
申请号：US13239758
申请日：2011-09-22
申请人： Songping Gao
发明人： Songping Gao
IPC分类号： G01J1/00 , G01N21/64
CPC分类号： G01M11/00 , G01J1/58 , G01N21/64 , G01N21/6428 , G01N21/6486 , G01N2021/6439 , G01N2201/06113 , G01N2201/12723
摘要： An optical system includes a sample carrier receiving region configured to receive a carrier carrying a sample for processing, a source that emits an excitation signal having a wavelength within a first predetermined wavelength range, and a first set of optical components that direct the excitation signal along an excitation path to the sample carrier receiving region, wherein radiation having a wavelength within a second predetermined wavelength range is emitted from the sample carrier receiving region in response to receiving the excitation signal. The system further includes a detector configured to detect the emitted radiation and generates a signal indicative of a power of the detected radiation and a second set of optical components that directs the emitted radiation along a collection path to the detector and a power meter that measures a power of the radiation emitted from the sample carrier receiving region and generates a signal indicative thereof.
摘要翻译：光学系统包括：样本载波接收区域，被配置为接收承载用于处理的样本的载波;发射具有在第一预定波长范围内的波长的激励信号的源;以及引导激励信号沿着第一组光学部件响应于接收到激励信号，从样本载体接收区域发射具有在第二预定波长范围内的波长的辐射的到样品载体接收区的激励路径。该系统还包括检测器，其被配置为检测所发射的辐射并产生指示检测到的辐射的功率的信号;以及第二组光学部件，其将发射的辐射沿着收集路径引导到检测器;以及功率计，从采样载体接收区发射的辐射的功率，并产生指示其的信号。

5. 发明申请

US20120013898A1 Inspecting a Workpiece Using Polarization of Scattered Light 有权
标题翻译：使用分散光的极化检查工件
公开(公告)号：US20120013898A1
公开(公告)日：2012-01-19
申请号：US13242065
申请日：2011-09-23
申请人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
发明人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
摘要翻译：提供了表面检查系统，以及相关的部件和方法。表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。系统还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化而改变输出狭缝的宽度。

6. 发明授权

US07623227B2 System and method for inspecting a workpiece surface using polarization of scattered light 有权
标题翻译：使用散射光偏振检测工件表面的系统和方法
公开(公告)号：US07623227B2
公开(公告)日：2009-11-24
申请号：US11311907
申请日：2005-12-17
申请人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
发明人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
摘要翻译：提供了表面检查系统，以及相关的部件和方法。表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。

7. 发明申请

US20060192948A1 System and method for inspecting a workpiece surface using polarization of scattered light 有权
公开(公告)号：US20060192948A1
公开(公告)日：2006-08-31
申请号：US11311907
申请日：2005-12-17
申请人： Neil Judell , Ian Kohl , Songping Gao , Richard Bills
发明人： Neil Judell , Ian Kohl , Songping Gao , Richard Bills
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

8. 发明授权

US08624200B2 Optical detection system 有权
标题翻译：光学检测系统
公开(公告)号：US08624200B2
公开(公告)日：2014-01-07
申请号：US13154710
申请日：2011-06-07
申请人： Songping Gao
发明人： Songping Gao
IPC分类号： G01N21/03 , G01N21/65
CPC分类号： G01N21/645 , G01N21/6452 , G01N2201/0642
摘要： An optical detection system includes a sample carrier receiving region that receives a sample carrier carrying a sample. The system further includes a source that emits an excitation signal having a wavelength within a predetermined wavelength range. The excitation signal illuminates the sample carrier. A first sub-portion of the excitation signal is absorbed by the sample, which emits characteristic radiation in response thereto. A second sub-portion of the excitation signal traverses the sample carrier. The system further includes a detector that detects the characteristic radiation. The system further includes an absorber that absorbs the excitation signal traversing the sample carrier without being absorbed by the sample or sample carrier. The absorber absorbs at least 95% of the excitation signal traversing the sample carrier.
摘要翻译：光学检测系统包括接收承载样品的样品载体的样品载体接收区域。该系统还包括发射具有在预定波长范围内的波长的激发信号的源。激发信号照亮样品载体。激发信号的第一子部分由样品吸收，其响应于样品发射特征辐射。激励信号的第二子部分穿过样品载体。该系统还包括检测特征辐射的检测器。该系统还包括吸收器，其吸收穿过样品载体而不被样品或样品载体吸收的激发信号。吸收体吸收穿过样品载体的激发信号的至少95％。

9. 发明授权

US08427637B2 Optical detection system 有权
标题翻译：光学检测系统
公开(公告)号：US08427637B2
公开(公告)日：2013-04-23
申请号：US13072857
申请日：2011-03-28
申请人： Songping Gao
发明人： Songping Gao
IPC分类号： G01N1/10
CPC分类号： G01N21/65 , C12Q1/6869 , G01N21/6452 , C12Q2535/113 , C12Q2535/122 , C12Q2563/107 , C12Q2565/102 , C12Q2565/629 , C12Q2565/632
摘要： An optical detection system includes a detector configured to detect a signal emitted from a sample carrier and generate an output indicative of the signal detected by the detector. The sample carrier emits the signal in response to the sample carrier being scanned by an excitation source, the emitted signal is indicative of a structural characteristic of the sample carrier, and the sample carrier includes bulk material, at least one material free chamber and a bulk material/chamber interface for each chamber. The optical detection system further includes a data evaluator that identifies the structural characteristic of the sample carrier based on the output of the detector and generates data indicative of the identified structural characteristic.
摘要翻译：光学检测系统包括检测器，其被配置为检测从样本载体发射的信号，并产生指示由检测器检测到的信号的输出。样品载体响应于由激发源扫描的样品载体发射信号，所发射的信号指示样品载体的结构特征，并且样品载体包括散装材料，至少一个材料自由室和体积每个室的材料/室接口。光学检测系统还包括基于检测器的输出识别样品载体的结构特征的数据评估器，并产生指示所识别的结构特征的数据。

10. 发明申请

US20100110420A1 Inspecting a Workpiece Using Polarization of Scattered Light 有权
标题翻译：使用分散光的极化检查工件
公开(公告)号：US20100110420A1
公开(公告)日：2010-05-06
申请号：US12604052
申请日：2009-10-22
申请人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
发明人： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
IPC分类号： G01N21/88 , G01J4/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
摘要翻译：提供了表面检查系统，以及相关的部件和方法。表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。

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