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    • 1. 发明授权
    • Apparatus and method for inspecting electronic circuits
    • 电子电路检测装置及方法
    • US06967498B2
    • 2005-11-22
    • US10636751
    • 2003-08-08
    • Yuji OdanShuji Yamaoka
    • Yuji OdanShuji Yamaoka
    • G01R31/02G01R1/073G01R3/00G01R31/28G01R31/302G01R31/26
    • G01R1/07307G01R3/00G01R31/2887
    • The present invention provides an apparatus and a method for used in a board inspection capable of an inspection of defect in a circuit board with high resolution over a wide range. The method is used for manufacturing a sensor probe comprising layers which include an electrode layer, a lead wire layer and a bridge layer (41). These layers are laminated on a base (30) in the form of a flat plate composed of silicon. The electrode layer is comprised of a set of sensor electrodes (40). The lead wire layer is comprised of a set of lead wires (50) for transferring a signal externally. The bridge layer couples between the electrode layer and the lead wire layer. The lead wire layer is formed by means of depositing aluminum in accordance with a first mask pattern. The bridge layer is formed by means of growing each of bridge wires (41) in the direction perpendicular to the base. The bridge wires extend in the direction perpendicular to the base and are connected to respective lead wires of the lead layer. The respective electrodes of the electrode layer are formed by depositing aluminum in accordance with a second mask pattern. The plurality of sensor electrodes respectively extend in the horizontal direction and having a predetermined area. A shield layer (33) is provided between the electrode layer (40) and the lead wire layer (50).
    • 本发明提供一种用于板检测的装置和方法,能够在宽范围内以高分辨率检查电路板中的缺陷。 该方法用于制造包括电极层,引线层和桥接层(41)的层的传感器探针。 这些层层叠在由硅组成的平板形式的基底(30)上。 电极层由一组传感器电极(40)组成。 引线层由用于在外部传送信号的一组引线(50)组成。 桥接层耦合在电极层和引线层之间。 引线层通过根据第一掩模图案沉积铝而形成。 通过在与基座垂直的方向上生长桥接线(41),形成桥接层。 桥接线在与基座垂直的方向上延伸并连接到引线层的相应引线。 通过根据第二掩模图案沉积铝来形成电极层的各个电极。 多个传感器电极分别在水平方向上延伸并具有预定的面积。 在电极层(40)和引线层(50)之间设有屏蔽层(33)。
    • 2. 发明授权
    • Circuit pattern inspection device, circuit pattern inspection method, and recording medium
    • 电路图案检查装置,电路图案检查方法和记录介质
    • US06943559B2
    • 2005-09-13
    • US10480106
    • 2002-06-06
    • Shuji YamaokaShogo Ishioka
    • Shuji YamaokaShogo Ishioka
    • G01R31/02G01R31/304G01R31/312H05K3/00H01H31/02G01R27/26
    • G01R31/304G01R31/312
    • Disclosed is an circuit-pattern inspection apparatus comprising a power supply element 30 adapted to be capacitively coupled with a parallel array of conductive patterns 20 to supply an inspection signal to one end of each of the conductible patterns, an open sensor 40 adapted to be capacitively coupled with all of the other ends of the conductive patterns to detect the inspection signal, and a short sensor 50 arranged at a position displaced from the power supply element 30 and adapted to be capacitively coupled with two lines of the conductive patterns to detect the inspection signal. The quality of the conductive pattern is inspected such that the presence of disconnection is determined when the detect signal from the open sensor 40 is largely reduced, and the presence of short is determined when the detect signal from the short sensor 50 largely rises and then falls. The circuit-pattern inspection apparatus can detect defects in a circuit board reliably and readily.
    • 公开了一种电路图案检查装置,其包括电源元件30,电源元件30适于与导电图案20的并行阵列电容耦合,以向每个可导电图案的一端提供检查信号,开放式传感器40适于电容化 与传导图案的所有另一端耦合以检测检查信号;以及短传感器50,布置在从电源元件30偏离的位置处,并适于与两条导电图案电容耦合以检测检查 信号。 检查导电图案的质量,使得当来自开路传感器40的检测信号被大大减小时确定断开的存在,并且当来自短传感器50的检测信号大大上升然后下降时确定短路的存在 。 电路图案检查装置可以可靠且容易地检测电路板中的缺陷。
    • 3. 发明授权
    • Method and apparatus for inspection
    • 检查方法和装置
    • US06710607B2
    • 2004-03-23
    • US09926606
    • 2001-11-26
    • Tatuhisa FujiiShogo IshiokaShuji Yamaoka
    • Tatuhisa FujiiShogo IshiokaShuji Yamaoka
    • G01R3102
    • G01R31/302G01R31/304G01R31/312
    • The present invention provides an inspection apparatus and method capable of intuitively obtaining inspection results of circuit wirings. An inspection system 20 comprises a sensor chip 1 including plural sensor elements, a computer 21, probes 22 for supplying an inspection signal to circuit wirings 101, and a selector 23 for switching the supply of the inspection signal to the probes 22. The computer 21 receives the detected signals from the sensor chip 1, and generates an image data to display an image of the circuit wirings as an inspection subject on a display 21a. This make it possible to check the shape of the specific circuit wiring and to detect defects such as disconnection, short-circuit, and chipping in the circuit wiring 101 based on the generated image data and the design image data representing the design circuit wiring.
    • 本发明提供一种能够直观地获得电路布线的检查结果的检查装置和方法。 检查系统20包括传感器芯片1,其包括多个传感器元件,计算机21,用于向电路布线101提供检查信号的探针22以及用于切换向检测器22提供检查信号的选择器23.计算机21 从传感器芯片1接收检测到的信号,并生成图像数据,以在显示器21a上显示作为检查对象的电路布线的图像。 由此,能够根据生成的图像数据和表示设计电路布线的设计图像数据,检查电路布线的形状,检测电路布线101中的断线,短路,切断等缺陷。
    • 4. 发明授权
    • Apparatus and method for inspecting electronic circuits
    • 电子电路检测装置及方法
    • US07239127B2
    • 2007-07-03
    • US10636617
    • 2003-08-08
    • Yuji OdanShuji Yamaoka
    • Yuji OdanShuji Yamaoka
    • G01R31/28
    • G01R1/07307G01R3/00G01R31/2887
    • The present invention provides an apparatus and a method for used in a board inspection capable of an inspection of defect in a circuit board with high resolution over a wide range. The method is used for manufacturing a sensor probe comprising layers which include an electrode layer, a lead wire layer and a bridge layer (41). These layers are laminated on a base (30) in the form of a flat plate composed of silicon. The electrode layer is comprised of a set of sensor electrodes (40). The lead wire layer is comprised of a set of lead wires (50) for transferring a signal externally. The bridge layer couples between the electrode layer and the lead wire layer. The lead wire layer is formed by means of depositing aluminum in accordance with a first mask pattern. The bridge layer is formed by means of growing each of bridge wires (41) in the direction perpendicular to the base. The bridge wires extend in the direction perpendicular to the base and are connected to respective lead wires of the lead layer. The respective electrodes of the electrode layer are formed by depositing aluminum in accordance with a second mask pattern. The plurality of sensor electrodes respectively extend in the horizontal direction and having a predetermined area. A shield layer (33) is provided between the electrode layer (40) and the lead wire layer (50).
    • 本发明提供一种用于板检测的装置和方法,能够在宽范围内以高分辨率检查电路板中的缺陷。 该方法用于制造包括电极层,引线层和桥接层(41)的层的传感器探针。 这些层层叠在由硅组成的平板形式的基底(30)上。 电极层由一组传感器电极(40)组成。 引线层由用于在外部传送信号的一组引线(50)组成。 桥接层耦合在电极层和引线层之间。 引线层通过根据第一掩模图案沉积铝而形成。 通过在与基座垂直的方向上生长桥接线(41),形成桥接层。 桥接线在与基座垂直的方向上延伸并连接到引线层的相应引线。 通过根据第二掩模图案沉积铝来形成电极层的各个电极。 多个传感器电极分别在水平方向上延伸并具有预定的面积。 在电极层(40)和引线层(50)之间设有屏蔽层(33)。
    • 5. 发明授权
    • Low-noise active RC signal processing circuit
    • 低噪声有源RC信号处理电路
    • US07026870B2
    • 2006-04-11
    • US10482125
    • 2002-03-27
    • Masataka NakamuraTakayuki GenbaYuichiro AomoriShuji Yamaoka
    • Masataka NakamuraTakayuki GenbaYuichiro AomoriShuji Yamaoka
    • H03F1/34
    • H03H11/1213H03H11/1291
    • Disclosed is a low-noise active RC signal processing circuit, which comprises a feedforward section operable responsive to an input signal to provide an output at a predetermined gain, and a feedback section operable responsive to the output of the forward circuit to negatively feed back the output to the input signal of the feedforward section while giving a predetermined transfer characteristic to the output, so as to allow the processing circuit to have a transfer impedance characteristic equal to or less than the predetermined gain over the entire frequency range. The feedforward section is composed of a current-controlled voltage output circuit which includes a common-base transistor for receiving and inverting the input signal, and an emitter-follower transistor for outputting voltage, and has a transfer impedance defining the predetermined gain. The current-controlled voltage output circuit may also be constructed using an operational amplifier. Various filters, such as a bandpass, lowpass or highpass filter, can be achieved by arranging the transfer impedance characteristic. The present invention can provide an active RC signal processing circuit having a low Q-value and an excellent low-noise performance.
    • 公开了一种低噪声有源RC信号处理电路,其包括可响应于输入信号提供预定增益的输出的前馈部分,以及响应于正向电路的输出而可操作的负反馈的反馈部分 输出到前馈部分的输入信号,同时向输出端提供预定的传输特性,以便允许处理电路在整个频率范围内具有等于或小于预定增益的传输阻抗特性。 前馈部分由电流控制的电压输出电路组成,其包括用于接收和反相输入信号的公共基极晶体管,以及用于输出电压的发射极跟随晶体管,并具有限定预定增益的传输阻抗。 电流控制的电压输出电路也可以使用运算放大器来构造。 可以通过布置传输阻抗特性来实现各种滤波器,例如带通,低通或高通滤波器。 本发明可以提供具有低Q值和优异的低噪声性能的有源RC信号处理电路。
    • 8. 发明授权
    • Inspection apparatus and sensor
    • 检验仪器和传感器
    • US06734692B2
    • 2004-05-11
    • US09926357
    • 2001-10-22
    • Tatuhisa FujiiShogo IshiokaShuji Yamaoka
    • Tatuhisa FujiiShogo IshiokaShuji Yamaoka
    • G01R3102
    • G01R31/2812
    • It is an object of the present invention to finely inspect a dimension of a conductive pattern. A sensor element 12a includes an MOSFET. A diffusion layer of the MOSFET having a larger surface area serves as a passive element, and is placed opposes to the conductive pattern. The passive element is formed continuously with a source of the MOSFET to be electrically conductive thereto. A gate of the MOSFET is connected to a vertical select section 14, and a drain of the MOSFET is connected to a lateral select section 13. When a sensor element 12a is selected by a timing generating section 15, a signal is transmitted from the vertical select section 14 to the gate to turn on the MOSFET. In this moment, if an inspection signal is output from a probe 22, the potential in the conductive pattern 101 is varied. Thus, a current flows from the source to the drain and then the current is transmitted to a signal processing section 16 through the lateral select section 13. By analyzing the position of the sensor element which outputs a detect signal, the position of the conductive pattern 101 in a circuit board 100 may be discriminated.
    • 本发明的目的是精细地检查导电图案的尺寸。传感器元件12a包括MOSFET。 具有较大表面积的MOSFET的扩散层用作无源元件,并被放置成与导电图案相对。 无源元件与MOSFET的源极连续形成以与其导电。 MOSFET的栅极连接到垂直选择部分14,并且MOSFET的漏极连接到横向选择部分13.当由定时产生部分15选择传感器元件12a时,信号从垂直方向 选择第14节到门以打开MOSFET。 此时,如果从探头22输出检查信号,导电图案101的电位变化。 因此,电流从源极流到漏极,然后通过横向选择部分13将电流传输到信号处理部分16.通过分析输出检测信号的传感器元件的位置,导电图案的位置 可以区分电路板100中的101。
    • 9. 发明申请
    • Wire harness checker and wire harness checking method
    • 线束检查器和线束检查方法
    • US20070184686A1
    • 2007-08-09
    • US10558683
    • 2004-06-01
    • Mishio HayashiShuji YamaokaAkira NuriokaYoshikazu TaniguchiHideo Onishi
    • Mishio HayashiShuji YamaokaAkira NuriokaYoshikazu TaniguchiHideo Onishi
    • H05K1/00
    • G01R31/045H01R43/20
    • Disclosed is a wire harness checker and a wire harness checking method, which are capable of determining whether a terminal of a terminal-fitted wire is adequately inserted in a connector housing, without contact with the wire and the terminal, objectively and reliably. Each of three pairs of sensor plates (20a, 20b; 30a, 30b; 40a, 40b) are disposed adjacent to an outer wall surface of a connector housing 10 in opposed relation to one another. An AC inspection signal is supplied to a terminal to be inserted into the connector housing 10, and detected from the terminal by each of the pairs of sensor plates (20a, 20b), (30a, 30b), (40a, 40b), to detect an insertion position of the terminal in the connector, in accordance with a relative value of each detection signal from the sensor plates, so as to determine adequacy of the insertion position.
    • 公开了一种线束检查器和线束检查方法,其能够确定终端装配线的端子是否被充分地插入连接器壳体中,而不与线和端子接触,并且可靠地。 三对传感器板(20 a,20 b; 30 a,30 b; 40 a,40 b)中的每一对彼此相对设置在连接器壳体10的外壁表面附近。 将AC检查信号提供给要插入连接器壳体10的端子,并且通过传感器板(20A,20B),(30A),(40a),(40a)中的每一对传感器板 ,40b),以根据来自传感器板的每个检测信号的相对值来检测端子在连接器中的插入位置,以便确定插入位置的充分性。
    • 10. 发明申请
    • Conductior position inspection apparatus and conductor position inspection method
    • 导向位置检查装置和导体位置检查方法
    • US20070073512A1
    • 2007-03-29
    • US10547084
    • 2004-02-27
    • Shuji YamaokaAkira NuriokaMishio HayashiShongo Ishioka
    • Shuji YamaokaAkira NuriokaMishio HayashiShongo Ishioka
    • G01C17/00G01C19/00G01C9/00G06F15/00
    • G01B7/287
    • Disclosed is a conductor position inspection apparatus capable of detecting where an inspection-target electric conductor is located, with a high degree of accuracy in a non-contact manner. The inspection apparatus comprises a signal supply section 510 for supplying an AC inspection signal to an inspection-target conductor 520, two sensor plates 570, 580 disposed approximately parallel to each other in the vicinity of the conductor 520, a subtracter 550 for subjecting respective detected signal values from the sensor plates to subtraction, and a divider 560 for dividing the detected signal value from a selected one of the sensor plates by the subtraction result to normalize the detected signal value from the selected sensor plate so as to detect a relative ratio between the detected signal values from the sensor plates to obtain a value X corresponding a distance between the selected sensor plate and the conductor 520, as a detection result.
    • 公开了一种导体位置检查装置,能够以非接触的方式高精度地检测检查对象电导体的位置。 检查装置包括用于向检查对象导体520提供交流检查信号的信号供给部510,在导体520附近彼此近似平行设置的两个传感器板570,580,用于对各检测体 从传感器板到减法的信号值;以及分频器560,用于将检测到的信号值与所选传感器板中的一个传感器板相除,以减去所选择的传感器板的检测信号值,以检测传感器板之间的相对比例 检测来自传感器板的信号值,以获得与选择的传感器板和导体520之间的距离相对应的值X作为检测结果。