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    • 2. 发明申请
    • BRUSHLESS MOTOR POSITION DETECTION DEVICE
    • 无刷马达位置检测装置
    • US20100289442A1
    • 2010-11-18
    • US12812248
    • 2009-01-16
    • Kenta HatanoToshiyuki UmemotoNaoki MiyamotoSatoshi Fujimura
    • Kenta HatanoToshiyuki UmemotoNaoki MiyamotoSatoshi Fujimura
    • H02K29/08
    • H02K29/08H02K5/225H02K11/215
    • A brushless motor position detection device has a set of first Hall elements (main Hall ICs 18 for detecting magnetic pole positions) and a set of second Hall elements (sub-Hall ICs 19 for detecting magnetic pole positions) mounted on a plane facing a magnetic pole position detecting magnet 16 for detecting the position of a rotor 12. They are subjected to offset adjustment and are mounted in such a manner that the difference between the maximum value of the magnetic flux density at the mounting positions of the first Hall elements and the maximum value of the magnetic flux density at the mounting positions of the second Hall elements is held within a prescribed limit (mounted in such a manner as to have the offset of a prescribed machine angle in the circumferential direction) to bring the detection accuracy of the plurality of sets of the Hall elements into agreement.
    • 无刷电动机位置检测装置具有一组第一霍尔元件(用于检测磁极位置的主霍尔IC 18)和一组安装在面对磁场的平面上的第二霍尔元件(用于检测磁极位置的子霍尔IC 19) 用于检测转子12的位置的极位置检测磁铁16.它们经受偏移调整,并且以这样的方式安装,使得第一霍尔元件的安装位置处的磁通密度的最大值与 将第二霍尔元件的安装位置处的磁通密度的最大值保持在规定的限度内(以规定的机器角度在圆周方向上偏移的方式安装),以使检测精度 多个组合的霍尔元素达成一致。
    • 3. 发明授权
    • Positive type resist composition and resist pattern formation method using same
    • 正型抗蚀剂组合物和使用其的抗蚀剂图案形成方法
    • US07501221B2
    • 2009-03-10
    • US11347167
    • 2006-02-02
    • Takeshi IwaiNaotaka KubotaSatoshi FujimuraMiwa MiyairiHideo Hada
    • Takeshi IwaiNaotaka KubotaSatoshi FujimuraMiwa MiyairiHideo Hada
    • G03F7/004
    • G03F7/0397Y10S430/106Y10S430/111
    • There is provided a positive type resin composition comprising (A) a resin component comprising within the principal chain a structural unit derived from a (meth)acrylate ester and incorporating an acid dissociable, dissolution inhibiting group containing a polycyclic group on an ester side chain section, for which the solubility in alkali increases under the action of acid, (B) an acid generator component which generates acid on exposure, and (C) an organic solvent, whereinthe component (A) comprises both a structural unit derived from a methacrylate ester and a structural unit derived from an acrylate ester. According to such a resist composition, a resist pattern can be formed which displays little surface roughness and line edge roughness on etching, and also offers excellent resolution and a wide depth of focus range.
    • 提供一种正型树脂组合物,其包含(A)树脂组分,其在主链内包含衍生自(甲基)丙烯酸酯的结构单元,并且在酯侧链部分上并入含有多环基团的酸解离的溶解抑制基团 (B)在暴露时产生酸的酸产生剂组分和(C)有机溶剂,其中组分(A)包含衍生自甲基丙烯酸酯的结构单元 酯和衍生自丙烯酸酯的结构单元。 根据这样的抗蚀剂组合物,可以形成抗蚀剂图案,其在蚀刻时显示出很小的表面粗糙度和线边缘粗糙度,并且还提供优异的分辨率和宽的焦深范围。
    • 10. 发明授权
    • Positive resist composition and method of forming resist pattern
    • 正型抗蚀剂组合物和形成抗蚀剂图案的方法
    • US06982140B2
    • 2006-01-03
    • US10466172
    • 2002-11-29
    • Hideo HadaSatoshi FujimuraJun Iwashita
    • Hideo HadaSatoshi FujimuraJun Iwashita
    • G03F7/004G03F7/30
    • G03F7/0397Y10S430/106Y10S430/111
    • There is provided a positive type resist composition formed by dissolving (A) a resin component with a unit derived from a (meth)acrylate ester in the principal chain, for which the solubility in alkali increases under the action of acid, and (B) an acid generator component which generates acid on exposure, in an organic solvent component (C), wherein the resin component (A) is a copolymer comprising (a1) a unit derived from a (meth)acrylate ester comprising an acid dissociable, dissolution inhibiting group containing a polycyclic group, (a2) a unit derived from a (meth)acrylate ester comprising a lactone containing monocyclic group or polycyclic group, (a3) a unit derived from a (meth)acrylate ester comprising a hydroxyl group containing polycyclic group, and (a4) a unit derived from a (meth)acrylate ester comprising a polycyclic group which is different from the unit (a1), the unit (a2) and the unit (a3). This composition provides a chemically amplified positive type resist composition which displays excellent resolution, enables the depth of focus range of an isolated resist pattern to be improved, and enables the proximity effect to be suppressed.
    • 提供一种正型抗蚀剂组合物,其通过将(A)树脂组分与主链中衍生自(甲基)丙烯酸酯的单元溶解,其中在碱的作用下碱的溶解度增加,(B) 一种在有机溶剂组分(C)中暴露时产生酸的酸产生剂组分,其中树脂组分(A)是共聚物,其包含(a1)衍生自(甲基)丙烯酸酯的单元,其包含酸解离,溶解抑制 含有多环基团的基团,(a2)由含有内酯单体或多环基团的(甲基)丙烯酸酯衍生的单元,(a3)由含有羟基的多环基团的(甲基)丙烯酸酯衍生的单元, 和(a4)衍生自包含与单元(a1),单元(a2)和单元(a3)不同的多环基团的(甲基)丙烯酸酯的单元。 该组合物提供显示出优异的分辨率的化学放大正型抗蚀剂组合物,能够提高隔离抗蚀剂图案的聚焦范围的深度,并且能够抑制邻近效应。