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    • 6. 发明授权
    • Linear ion beam bonding apparatus and array structure thereof
    • 线性离子束接合装置及其阵列结构
    • US09406495B2
    • 2016-08-02
    • US14389642
    • 2013-02-26
    • SHIMADZU RESEARCH LABORATORY (SHANGHAI) CO. LTD.
    • Gongyu JiangWenjian Sun
    • H01J49/42H01J49/06H01J49/00
    • H01J49/423H01J49/0027H01J49/063H01J49/4255H01J49/427
    • A linear ion beam bonding apparatus and an array structure thereof, comprising a pair of primary radiofrequency electrodes (501 and 502) extending along the axial direction and oppositely arranged on two sides of the central axis of the linear ion beam bonding apparatus. Section patterns on different section planes of each of the primary radiofrequency electrodes (501 and 502) and perpendicular to the central axis are all kept symmetric via a primary symmetric plane (506) of the central axis. Radiofrequency voltages attached to the primary radiofrequency electrodes (501 and 502) are of identical phases. An ion extraction groove (84) is arranged on at least one of the primary radiofrequency electrodes (501 and 502), while at least one pair of auxiliary electrodes (503 and 505) are arranged on two sides of the pair of primary radiofrequency electrodes (501 and 502). The auxiliary electrodes (503 and 505) are arranged in duality to the primary symmetric plane (506). At least one of the auxiliary electrodes (503 and 505) is provided with a finite number of symmetric planes (507), while a minimal angle greater than 0 degrees and less than 90 degrees is provided between each symmetric plane (507) and the symmetric plane (506) of the primary radiofrequency electrodes (501 and 502). By means of this, a quadrupole field component of an ion beam bonding radiofrequency electric field within the ion beam bonding apparatus is strengthened.
    • 一种线性离子束接合装置及其阵列结构,包括沿着轴向延伸并且相对设置在线性离子束接合装置的中心轴线的两侧的一对初级射频电极(501和502)。 主要射频电极(501和502)的每一个并且垂直于中心轴的不同截面的截面图案都通过中心轴的主对称平面(506)保持对称。 附加到主射频电极(501和502)的射频电压具有相同的相位。 离子提取槽(84)布置在主射频电极(501和502)中的至少一个上,而至少一对辅助电极(503和505)布置在一对主射频电极 501和502)。 辅助电极(503和505)与主对称平面(506)的对置布置。 至少一个辅助电极(503和505)设置有有限数量的对称平面(507),而在每个对称平面(507)和对称平面(507)之间提供大于0度且小于90度的最小角度 平面(506)的主射频电极(501和502)。 由此,离子束接合装置内的离子束结合射频电场的四极场成分被加强。
    • 8. 发明申请
    • LINER ION BEAM BONDING APPARATUS AND ARRAY STRUCTURE THEREOF
    • 内置离子束结合装置及其阵列结构
    • US20150170898A1
    • 2015-06-18
    • US14389642
    • 2013-02-26
    • SHIMADZU RESEARCH LABORATORY (SHANGHAI) CO. LTD.
    • Gongyu JiangWenjian Sun
    • H01J49/42H01J49/00
    • H01J49/423H01J49/0027H01J49/063H01J49/4255H01J49/427
    • A linear ion beam bonding apparatus and an array structure thereof, comprising a pair of primary radiofrequency electrodes (501 and 502) extending along the axial direction and oppositely arranged on two sides of the central axis of the linear ion beam bonding apparatus. Section patterns on different section planes of each of the primary radiofrequency electrodes (501 and 502) and perpendicular to the central axis are all kept symmetric via a primary symmetric plane (506) of the central axis. Radiofrequency voltages attached to the primary radiofrequency electrodes (501 and 502) are of identical phases. An ion extraction groove (84) is arranged on at least one of the primary radiofrequency electrodes (501 and 502), while at least one pair of auxiliary electrodes (503 and 505) are arranged on two sides of the pair of primary radiofrequency electrodes (501 and 502). The auxiliary electrodes (503 and 505) are arranged in duality to the primary symmetric plane (506). At least one of the auxiliary electrodes (503 and 505) is provided with a finite number of symmetric planes (507), while a minimal angle greater than 0 degrees and less than 90 degrees is provided between each symmetric plane (507) and the symmetric plane (506) of the primary radiofrequency electrodes (501 and 502). By means of this, a quadrupole field component of an ion beam bonding radiofrequency electric field within the ion beam bonding apparatus is strengthened.
    • 一种线性离子束接合装置及其阵列结构,包括沿着轴向延伸并且相对设置在线性离子束接合装置的中心轴线的两侧的一对初级射频电极(501和502)。 主要射频电极(501和502)的每一个并且垂直于中心轴的不同截面的截面图案都通过中心轴的主对称平面(506)保持对称。 附加到主射频电极(501和502)的射频电压具有相同的相位。 离子提取槽(84)布置在主射频电极(501和502)中的至少一个上,而至少一对辅助电极(503和505)布置在一对主射频电极 501和502)。 辅助电极(503和505)与主对称平面(506)的对置布置。 至少一个辅助电极(503和505)设置有有限数量的对称平面(507),而在每个对称平面(507)和对称平面(507)之间提供大于0度且小于90度的最小角度 平面(506)的主射频电极(501和502)。 由此,离子束接合装置内的离子束结合射频电场的四极场成分被加强。