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1. 发明授权

US08123966B2 Piezoelectric electronic component, process for producing the same, and communication apparatus 失效
标题翻译：压电电子部件，其制造方法以及通信装置
公开(公告)号：US08123966B2
公开(公告)日：2012-02-28
申请号：US11956699
申请日：2007-12-14
申请人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： B44C1/22
CPC分类号： H03H9/02133 , H03H3/02 , H03H3/08 , H03H9/0523 , H03H9/105 , H03H9/1092 , H03H9/174 , H03H9/588
摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.
摘要翻译：提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。压电元件包括焊盘，焊盘输入并输出输入和输出信号。作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

2. 发明授权

US07436102B2 Piezoelectric thin-film resonator and method for producing the same 有权
标题翻译：压电薄膜谐振器及其制造方法
公开(公告)号：US07436102B2
公开(公告)日：2008-10-14
申请号：US11270259
申请日：2005-11-10
申请人： Hidetoshi Fujii , Ryuichi Kubo
发明人： Hidetoshi Fujii , Ryuichi Kubo
IPC分类号： H01L41/08
CPC分类号： H03H3/02 , H03H9/173 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.
摘要翻译：一种压电薄膜谐振器的制造方法，其特征在于，在基板上形成牺牲层，对牺牲层进行等离子体处理，使牺牲层的端面部的表面粗糙度（Ra）为5nm以下，形成带状电介质膜，以连续地设置在基板的表面和牺牲层的端面部分和主表面上，形成包括下电极，上电极和设置在其间的压电薄膜，使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对，该区域设置在牺牲层的上部，并且去除牺牲层以在衬底和电介质膜之间形成气隙。

3. 发明申请

US20070013268A1 Piezoelectric electronic component, and production method therefor, and communication equipment 失效
标题翻译：压电电子元件及其生产方法和通讯设备
公开(公告)号：US20070013268A1
公开(公告)日：2007-01-18
申请号：US10558592
申请日：2004-04-07
申请人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： H01L41/00
CPC分类号： H03H9/02133 , H03H3/02 , H03H3/08 , H03H9/0523 , H03H9/105 , H03H9/1092 , H03H9/174 , H03H9/588
摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.
摘要翻译：提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。压电元件包括焊盘，焊盘输入并输出输入和输出信号。作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

4. 发明授权

US06576566B2 Apparatus and method for forming thin film at low temperature and high deposition rate 有权
公开(公告)号：US06576566B2
公开(公告)日：2003-06-10
申请号：US09866869
申请日：2001-05-30
申请人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Tatsuro Usuki , Minoru Noda , Masanori Okuyama
发明人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Tatsuro Usuki , Minoru Noda , Masanori Okuyama
IPC分类号： H01L2131
CPC分类号： H01L21/02197 , C23C14/0021 , C23C14/048 , C23C14/088 , C23C14/28 , H01L21/02266 , H01L21/31691
摘要： A thin film formation apparatus includes a vacuum chamber, a target holding mount held movably in the vacuum chamber, a target containing a film material, an ArF excimer laser for emitting high energy radiation to a surface of the target, an optical system for concentrating the radiation from the excimer laser to the surface of the target, a substrate holding mount holding the substrate, an oxidizing gas inlet for supplying an oxidizing gas into the vacuum chamber for oxidizing a substance deposited on the substrate, a heater placed inside the substrate holding mount for heating the substrate in the vacuum chamber, and a light for irradiating the substrate held on the substrate holding mount with light rays.

5. 发明授权

US07259032B2 Hermetically sealing a package to include a barrier metal 有权
标题翻译：密封一个包装，包括一个屏障金属
公开(公告)号：US07259032B2
公开(公告)日：2007-08-21
申请号：US10713253
申请日：2003-11-17
申请人： Koji Murata , Takashi Iwamoto , Hiroki Horiguchi , Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Koji Murata , Takashi Iwamoto , Hiroki Horiguchi , Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： H01L21/00
CPC分类号： H03H9/0557 , H01L24/97 , H01L2221/68345 , H01L2224/05568 , H01L2224/16 , H01L2224/97 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01041 , H01L2924/01042 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01051 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/01327 , H01L2924/09701 , H01L2924/15787 , H01L2924/163 , H01L2924/3025 , H03H3/02 , H03H3/08 , H03H9/059 , H03H9/1085 , H03H9/564 , H01L2224/85 , H01L2924/00 , H01L2224/05599
摘要： A method for manufacturing an electronic device includes the steps of forming a first resist pattern on a primary surface of a SAW element, the first resist pattern having openings at positions corresponding to those at which bumps and a sealing frame are to be formed, sequentially forming metals over the first resist pattern, the metals being formed into adhesion layers, barrier metal layers, and solder layers, removing the first resist pattern on the SAW element such that the bumps and the sealing frame are simultaneously formed. When the bumps and the sealing frame of the SAW element are bonded to bond electrodes of the bond substrate, the solder layers are melted and alloyed by heating.
摘要翻译：一种制造电子器件的方法包括以下步骤：在SAW元件的主表面上形成第一抗蚀剂图案，第一抗蚀剂图案在与要形成凸块和密封框的位置相对应的位置处具有开口，顺序地形成第一抗蚀剂图案上的金属，金属形成粘合层，阻挡金属层和焊料层，去除SAW元件上的第一抗蚀剂图案，使得凸块和密封框架同时形成。当SAW元件的凸起和密封框架结合到接合衬底的接合电极时，焊料层通过加热而熔化并合金化。

6. 发明授权

US06635495B2 Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same 有权
公开(公告)号：US06635495B2
公开(公告)日：2003-10-21
申请号：US09866881
申请日：2001-05-30
申请人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Minoru Noda , Masanori Okuyama
发明人： Kazuhiko Hashimoto , Tomonori Mukaigawa , Ryuichi Kubo , Hiroyuki Kishihara , Minoru Noda , Masanori Okuyama
IPC分类号： H01L2100
CPC分类号： H01L37/02 , G01J5/34 , H01L27/16
摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

7. 发明申请

US20080099428A1 Piezoelectric Electronic Component, Process for Producing the Same, and Communication Apparatus 失效
标题翻译：压电电子元件及其制造方法和通信装置
公开(公告)号：US20080099428A1
公开(公告)日：2008-05-01
申请号：US11956699
申请日：2007-12-14
申请人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： H01L41/22
CPC分类号： H03H9/02133 , H03H3/02 , H03H3/08 , H03H9/0523 , H03H9/105 , H03H9/1092 , H03H9/174 , H03H9/588
摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.
摘要翻译：提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。压电元件包括焊盘，焊盘输入并输出输入和输出信号。作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

8. 发明授权

US07342351B2 Piezoelectric electronic component, and production method therefor, and communication equipment 失效
标题翻译：压电电子元件及其生产方法和通讯设备
公开(公告)号：US07342351B2
公开(公告)日：2008-03-11
申请号：US10558592
申请日：2004-04-07
申请人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
发明人： Ryuichi Kubo , Hidetoshi Fujii , Naoko Aizawa
IPC分类号： H01L41/053
CPC分类号： H03H9/02133 , H03H3/02 , H03H3/08 , H03H9/0523 , H03H9/105 , H03H9/1092 , H03H9/174 , H03H9/588
摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.
摘要翻译：提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。压电元件包括焊盘，焊盘输入并输出输入和输出信号。作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

9. 发明申请

US20060097823A1 Piezoelectric thin-film resonator and method for producing the same 有权
标题翻译：压电薄膜谐振器及其制造方法
公开(公告)号：US20060097823A1
公开(公告)日：2006-05-11
申请号：US11270259
申请日：2005-11-10
申请人： Hidetoshi Fujii , Ryuichi Kubo
发明人： Hidetoshi Fujii , Ryuichi Kubo
IPC分类号： H03H9/00
CPC分类号： H03H3/02 , H03H9/173 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.
摘要翻译：一种压电薄膜谐振器的制造方法，其特征在于，在基板上形成牺牲层，对牺牲层进行等离子体处理，使牺牲层的端面部的表面粗糙度（Ra）为5nm以下，形成带状电介质膜，以连续地设置在基板的表面和牺牲层的端面部分和主表面上，形成包括下电极，上电极和设置在其间的压电薄膜，使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对，该区域设置在牺牲层的上部，并且去除牺牲层以在衬底和电介质膜之间形成气隙。

10. 发明授权

US06720559B2 Infrared sensor 有权
标题翻译：红外传感器
公开(公告)号：US06720559B2
公开(公告)日：2004-04-13
申请号：US09858766
申请日：2001-05-16
申请人： Ryuichi Kubo
发明人： Ryuichi Kubo
IPC分类号： G01J512
CPC分类号： G01J5/12
摘要： An infrared sensor is provided, which includes a substrate 12, a diaphragm 14 supported by the substrate, at least one thermocouple 17 provided with a cold junction 20 formed on the substrate and a hot junction 18 formed on the diaphragm, and an infrared-absorptive film 24 formed on the diaphragm so as to cover the hot junction of the thermocouple. The area of the infrared-absorptive film is 64% to 100% of the area of the diaphragm.
摘要翻译：提供了一种红外传感器，其包括基板12，由基板支撑的隔膜14，至少一个热电偶17，其设置有形成在基板上的冷结20和形成在隔膜上的热接点18以及红外吸收薄膜24形成在隔膜上，以覆盖热电偶的热接头。红外线吸收膜的面积为隔膜面积的64％〜100％。

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