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    • 3. 发明授权
    • Infrared sensor
    • 红外传感器
    • US06720559B2
    • 2004-04-13
    • US09858766
    • 2001-05-16
    • Ryuichi Kubo
    • Ryuichi Kubo
    • G01J512
    • G01J5/12
    • An infrared sensor is provided, which includes a substrate 12, a diaphragm 14 supported by the substrate, at least one thermocouple 17 provided with a cold junction 20 formed on the substrate and a hot junction 18 formed on the diaphragm, and an infrared-absorptive film 24 formed on the diaphragm so as to cover the hot junction of the thermocouple. The area of the infrared-absorptive film is 64% to 100% of the area of the diaphragm.
    • 提供了一种红外传感器,其包括基板12,由基板支撑的隔膜14,至少一个热电偶17,其设置有形成在基板上的冷结20和形成在隔膜上的热接点18以及红外吸收 薄膜24形成在隔膜上,以覆盖热电偶的热接头。 红外线吸收膜的面积为隔膜面积的64%〜100%。
    • 4. 发明授权
    • Ferroelectric/pyroelectric infrared detector with a colossal magneto-resistive electrode material and rock salt structure as a removable substrate
    • 铁电/热释电红外探测器具有巨大的磁阻电极材料和岩盐结构作为可移除的基板
    • US06495828B1
    • 2002-12-17
    • US09550621
    • 2000-04-17
    • Steven TidrowMeimei Tidrow
    • Steven TidrowMeimei Tidrow
    • G01J512
    • G01J5/34
    • A ferroelectric/pyroelectric infrared detector includes a lattice matched substrate material and a colossal magneto-resistive electrode material. In a second embodiment, the ferroelectric/pyroelectric detector includes a colossal magneto-resistive template material to accommodate the use of a non-lattice matched substrate material, and a colossal magneto-resistive electrode material. The embodiments of the present invention provide a semi-transparent electrode material of the requisite lattice constant value, crystal orientation, and chemical compatibility. Additional advantages associated with the invention include the ability to provide the desired resistance behavior by varying the composition of the colossal magneto-resistive material, the ability to tune the colossal magneto-resistive transition temperature to be near the device operating temperature through appropriate selection of materials and process conditions, and the ability to ensure the crystal oriented growth of the ferroelectric/pyroelectric thin film. By selecting an appropriate colossal magneto-resistive electrode material, the performance of the ferroelectric/pyroelectric detector can be improved over that associated with the use of conventional electrodes such as “normal” metals or metal oxides.
    • 铁电/热释电红外检测器包括晶格匹配的衬底材料和巨大的磁阻电极材料。 在第二实施例中,铁电/热电检测器包括巨大的磁阻模板材料,以适应使用非格子匹配的衬底材料和巨大的磁阻电极材料。 本发明的实施方案提供了必需的晶格常数值,晶体取向和化学相容性的半透明电极材料。 与本发明相关的另外的优点包括通过改变巨大的磁阻材料的组成来提供期望的电阻行为的能力,通过适当的材料选择将巨大的磁阻转变温度调节到靠近器件工作温度的能力 和工艺条件,以及确保铁电/热释电薄膜的晶体取向生长的能力。 通过选择适当的巨磁阻电极材料,与使用诸如“正常”金属或金属氧化物的常规电极相关的铁电/热电探测器的性能可以得到改善。