会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Semiconductor wafer boat loader control system
    • 半导体晶圆舟装载机控制系统
    • US4684863A
    • 1987-08-04
    • US880423
    • 1986-06-30
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • H01L21/00H01L21/677G05B11/28
    • H01L21/67126H01L21/67742H01L21/67754Y10S388/91Y10S388/915
    • A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
    • 用于将半导体晶片运载船装载到炉加工管中的软着陆悬臂式装载机包括具有一个或多个装载组件的装载站,与每个装载组件相关联的自动控制的门,用于选择性地关闭处理管的一端和基于微机 控制和协调过程操作的控制系统。 装载组件具有低轮廓构造,并且每个包括船支撑悬臂桨,其通过快速释放机构安装在滑架上,所述滑架通过马达沿着该方向驱动。 电机速度控制电路使用脉宽调制电机驱动器提供闭环电机速度。 门操作机构提供门沿着两个横向轴线的运动,以确保门紧密地密封在管子上。 控制系统采用一种自我教学技术,允许当桨由不同类型或长度的桨代替时可能需要的滑架行程极限的快速重新编程。
    • 4. 发明授权
    • Semiconductor wafer boat loader releaseable mounting
    • 半导体晶圆舟装载机可拆卸安装
    • US4721424A
    • 1988-01-26
    • US880460
    • 1986-06-30
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • H01L21/00H01L21/677B65G25/00
    • H01L21/67126H01L21/67742H01L21/67754Y10T403/7015
    • A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
    • 用于将半导体晶片运载船装载到炉加工管中的软着陆悬臂式装载机包括具有一个或多个装载组件的装载站,与每个装载组件相关联的自动控制的门,用于选择性地关闭处理管的一端和基于微机 控制和协调过程操作的控制系统。 装载组件具有低轮廓构造,并且每个包括船支撑悬臂桨,其通过快速释放机构安装在滑架上,所述滑架通过马达沿着该方向驱动。 电机速度控制电路使用脉宽调制电机驱动器提供闭环电机速度。 门操作机构提供门沿着两个横向轴线的运动,以确保门紧密地密封在管子上。 控制系统采用一种自我教学技术,允许当桨由不同类型或长度的桨代替时可能需要的滑架行程极限的快速重新编程。
    • 5. 发明授权
    • Method of loading and unloading a furnace
    • 装卸炉的方法
    • US4636140A
    • 1987-01-13
    • US719409
    • 1985-04-03
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • H01L21/00H01L21/677B65G25/00
    • H01L21/67754H01L21/67126
    • A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
    • 用于将半导体晶片运载船装载到炉加工管中的软着陆悬臂式装载机包括具有一个或多个装载组件的装载站,与每个装载组件相关联的自动控制的门,用于选择性地关闭处理管的端部和基于微机 控制和协调过程操作的控制系统。 装载组件具有低轮廓构造,并且每个包括船支撑悬臂桨,其通过快速释放机构安装在滑架上,所述滑架通过马达沿着该方向驱动。 电机速度控制电路使用脉宽调制电机驱动器提供闭环电机速度。 门操作机构提供门沿着两个横向轴线的运动,以确保门紧密地密封在管子上。 控制系统采用一种自我教学技术,允许当桨由不同类型或长度的桨代替时可能需要的滑架行程极限的快速重新编程。
    • 6. 发明授权
    • Semiconductor wafer furnace door
    • 半导体晶圆炉门
    • US4692115A
    • 1987-09-08
    • US880422
    • 1986-06-30
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • Robert E. AldridgeRussell EllowayWilliam O. FritzRalph D. GoffMichael J. Herrera
    • H01L21/00H01L21/677F27D1/18
    • H01L21/67126H01L21/67742H01L21/67754Y10S414/14
    • A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a selfteaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
    • 用于将半导体晶片运载船装载到炉加工管中的软着陆悬臂式装载机包括具有一个或多个装载组件的装载站,与每个装载组件相关联的自动控制的门,用于选择性地关闭处理管的端部和基于微机 控制和协调过程操作的控制系统。 装载组件具有低轮廓构造,并且每个包括船支撑悬臂桨,其通过快速释放机构安装在滑架上,所述滑架通过马达沿着该方向驱动。 电机速度控制电路使用脉宽调制电机驱动器提供闭环电机速度。 门操作机构提供门沿着两个横向轴线的运动,以确保门紧密地密封在管子上。 控制系统采用自动训练技术,其允许在用不同类型或长度的桨叶代替桨叶时可能需要的滑架行程极限的快速重新编程。