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1. 发明授权

US06302141B1 Building blocks for integrated gas panel 失效
标题翻译：综合瓦斯板块
公开(公告)号：US06302141B1
公开(公告)日：2001-10-16
申请号：US08931060
申请日：1997-09-15
申请人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
发明人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
IPC分类号： F16K1122
CPC分类号： F16K27/003 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.
摘要翻译：一种气体面板，包括多个离散块。本发明的气体面板包括耦合到第一块的第一面的第一功能部件，其中第一面具有第一端口构造。耦合到第二块的第一面的第二功能部件，其中第二块的第一面具有第一端口配置，并且其中第一功能部件不同于第二功能部件。

2. 发明授权

US6158454A Sieve like structure for fluid flow through structural arrangement 失效
标题翻译：通过结构布置的流体流动筛筛结构
公开(公告)号：US6158454A
公开(公告)日：2000-12-12
申请号：US60519
申请日：1998-04-14
申请人： Michael J. Duret , Erin Martin Hasenkamp , Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster
发明人： Michael J. Duret , Erin Martin Hasenkamp , Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster
IPC分类号： C23C16/00 , B08B15/00 , F24F11/00
CPC分类号： B08B15/00 , Y10T137/0318 , Y10T137/5196 , Y10T137/87885
摘要： Generally, A system for providing fluid flow through a structural arrangement is described. Specifically, a containment system for a modular gas system is described.In the present invention, air flow enters an encasement entry port. The air travel through a channel to a mounting plane enter surface area. The air flow is directed through the mounting plane and then through the modular gas system. From there, air flow is directed within an encasement towards an exit port. The air then enters a capture system which contains any gas that may have escaped the gas system and vents off purified air.In an alternate embodiment, the channel couples the gas system exit surface area to the exit port. In another alternate embodiment, the channel couples the mounting plane exit surface area to the exit port. In yet another embodiment, the channel couples the entry port to the gas system enter surface area.Additionally, many details that may apply to any of the above embodiments or an embodiment of the present invention are described. These include, a small cross sectional area entrance port to maximize intake air flow, a plugs for openings in the mounting plane that reside beneath wide gaps in the gas system, passages in the channel sidewalls to remove dead spots in the encasement, additional entrance ports to allow the removal of various dead spots within the encasement.
摘要翻译：通常，描述了用于提供流体流过结构布置的系统。具体地，描述了用于模块化气体系统的容纳系统。在本发明中，气流进入包装入口。通过通道进入安装平面的空气进入表面区域。空气流通过安装平面，然后通过模块化气体系统。从那里，气流被引导到一个外壳内朝向出口。空气然后进入捕获系统，其中包含任何可能已经逸出气体系统并排出净化空气的气体。在替代实施例中，通道将气体系统出口表面区域耦合到出口。在另一替代实施例中，通道将安装平面出口表面区域耦合到出口。在另一个实施例中，通道将入口端口连接到气体系统进入表面区域。另外，可以应用于上述实施方式或本发明的实施方式的许多细节进行说明。这些包括：用于最大化进气流量的小横截面入口，用于安装平面中的开口的塞子，其驻留在气体系统中的宽间隙之下，通道侧壁中的通道以除去外壳中的死点，附加入口允许拆除包装内的各种死点。

3. 发明授权

US5836355A Building blocks for integrated gas panel 失效
标题翻译：综合瓦斯板块
公开(公告)号：US5836355A
公开(公告)日：1998-11-17
申请号：US760150
申请日：1996-12-03
申请人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
发明人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
IPC分类号： F16K27/00 , F16K11/00
CPC分类号： F16K27/003 , Y10T137/5109 , Y10T137/87885
摘要： A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.
摘要翻译：一种气体面板，包括多个离散块。本发明的气体面板包括耦合到第一块的第一面的第一功能部件，其中第一面具有第一端口构造。耦合到第二块的第一面的第二功能部件，其中第二块的第一面具有第一端口配置，并且其中第一功能部件不同于第二功能部件。

4. 发明授权

US07472372B1 Fast image simulation for photolithography 有权
标题翻译：用于光刻的快速图像模拟
公开(公告)号：US07472372B1
公开(公告)日：2008-12-30
申请号：US11269910
申请日：2005-11-08
申请人： Peter J. Fiekowsky , Richard E. Schuster
发明人： Peter J. Fiekowsky , Richard E. Schuster
IPC分类号： G06F17/50
CPC分类号： G03F7/705 , G03F1/36
摘要： A fast method simulates photolithography using conventional image processing techniques. Convolution simulates blurring due to optics; erosion and dilation correct for edge diffraction. To produce the convolution kernel, an effective projection lens image for the image source is produced by convolving the lens image with an image of the illuminator aperture shape. An effective projection lens image for the stepper is produced similarly. The stepper effective lens image is divided by the image source effective lens image to produce a corrected effective lens image. A corrected convolution kernel is produced by taking a Fourier transform of the corrected effective lens image. The kernel is used to convolve the image, once using energy and once using voltage, and then squaring the result. The aerial image is produced by blending the energy and voltage convolutions according to the computed partial coherence of the optics. Complex convolution is used to represent relative phases other than 180 degrees.
摘要翻译：一种快速的方法使用常规的图像处理技术来模拟光刻。卷积模拟光学造成的模糊; 侵蚀和扩张正确的边缘衍射。为了产生卷积核，通过用透镜图像与照明器孔径形状的图像卷积来产生用于图像源的有效投影透镜图像。类似地产生用于步进器的有效投影透镜图像。步进有效透镜图像由图像源有效透镜图像分割以产生校正的有效透镜图像。通过对校正的有效透镜图像进行傅立叶变换来产生校正的卷积核。内核用于卷积图像，一次使用能量，一次使用电压，然后平方结果。通过根据所计算的光学部分相干性混合能量和电压卷积来产生空间图像。复杂卷积用于表示180度以外的相对相位。

5. 发明授权

US06231260B1 Mounting plane for integrated gas panel 失效
标题翻译：集成气体面板安装面
公开(公告)号：US06231260B1
公开(公告)日：2001-05-15
申请号：US08893773
申请日：1997-07-11
申请人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
发明人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
IPC分类号： F16B500
CPC分类号： F16K27/003 , F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2250/0636 , F17C2260/015 , Y10T137/87885 , Y10T403/18 , Y10T403/7067
摘要： A mounting plane technology for a gas panel comprising a plurality of discreet blocks. The mounting plane of the present invention includes a track and a centering element. The centering element glides along the tracks such that modular blocks may be anchored to any position along the track. Centering elements are easily added to and removed form tracks thus maximizing the speed and flexibility of configuring or reconfiguring the modular blocks. The centering element and track have a geometrical symmetry that allows for highly precise anchoring of the modular block with respect to the mounting plane. The centering element is harder than the plane material and has grooves to increase the friction between the plane and centering element when the modular block is anchored. Centering elements are deliberately manufactured with a slight asymmetry with respect to the track so that high manufacturing yield is guaranteed. Tracks have devices that enable the centering elements to hold their place against undesired forces.
摘要翻译：一种用于气体面板的安装平面技术，包括多个离散块。本发明的安装平面包括轨道和定心元件。定心元件沿着轨道滑动，使得模块化块可以锚定到沿着轨道的任何位置。定心元件容易添加到轨道和从轨道移除，从而最大限度地提高了配置或重新配置模块化块的速度和灵活性。定心元件和轨道具有几何对称性，允许模块化块相对于安装平面的高精度锚定。定心元件比平面材料更硬，并且当模块化块被锚定时具有用于增加平面和定心元件之间的摩擦力的凹槽。定心元件有意制造，相对于轨道具有轻微的不对称性，从而保证了高的制造成品率。轨道具有使定心元件能够抵抗不希望的力的装置。

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