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1. 发明授权

US06302141B1 Building blocks for integrated gas panel 失效
标题翻译：综合瓦斯板块
公开(公告)号：US06302141B1
公开(公告)日：2001-10-16
申请号：US08931060
申请日：1997-09-15
申请人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
发明人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
IPC分类号： F16K1122
CPC分类号： F16K27/003 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.
摘要翻译：一种气体面板，包括多个离散块。本发明的气体面板包括耦合到第一块的第一面的第一功能部件，其中第一面具有第一端口构造。耦合到第二块的第一面的第二功能部件，其中第二块的第一面具有第一端口配置，并且其中第一功能部件不同于第二功能部件。

2. 发明授权

US06231260B1 Mounting plane for integrated gas panel 失效
标题翻译：集成气体面板安装面
公开(公告)号：US06231260B1
公开(公告)日：2001-05-15
申请号：US08893773
申请日：1997-07-11
申请人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
发明人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
IPC分类号： F16B500
CPC分类号： F16K27/003 , F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2250/0636 , F17C2260/015 , Y10T137/87885 , Y10T403/18 , Y10T403/7067
摘要： A mounting plane technology for a gas panel comprising a plurality of discreet blocks. The mounting plane of the present invention includes a track and a centering element. The centering element glides along the tracks such that modular blocks may be anchored to any position along the track. Centering elements are easily added to and removed form tracks thus maximizing the speed and flexibility of configuring or reconfiguring the modular blocks. The centering element and track have a geometrical symmetry that allows for highly precise anchoring of the modular block with respect to the mounting plane. The centering element is harder than the plane material and has grooves to increase the friction between the plane and centering element when the modular block is anchored. Centering elements are deliberately manufactured with a slight asymmetry with respect to the track so that high manufacturing yield is guaranteed. Tracks have devices that enable the centering elements to hold their place against undesired forces.
摘要翻译：一种用于气体面板的安装平面技术，包括多个离散块。本发明的安装平面包括轨道和定心元件。定心元件沿着轨道滑动，使得模块化块可以锚定到沿着轨道的任何位置。定心元件容易添加到轨道和从轨道移除，从而最大限度地提高了配置或重新配置模块化块的速度和灵活性。定心元件和轨道具有几何对称性，允许模块化块相对于安装平面的高精度锚定。定心元件比平面材料更硬，并且当模块化块被锚定时具有用于增加平面和定心元件之间的摩擦力的凹槽。定心元件有意制造，相对于轨道具有轻微的不对称性，从而保证了高的制造成品率。轨道具有使定心元件能够抵抗不希望的力的装置。

3. 发明授权

US5605179A Integrated gas panel 失效
标题翻译：集成气面板
公开(公告)号：US5605179A
公开(公告)日：1997-02-25
申请号：US404485
申请日：1995-03-17
申请人： Benjamin R. Strong, Jr. , Brent D. Elliot , Frank R. Balma
发明人： Benjamin R. Strong, Jr. , Brent D. Elliot , Frank R. Balma
IPC分类号： F16K27/00 , F17C13/04 , F16K11/10
CPC分类号： F17C13/04 , F16K27/003 , F17C2205/0323 , F17C2205/0338 , F17C2205/0341 , F17C2205/0385 , F17C2227/044 , F17C2250/043 , F17C2250/0636 , F17C2270/05 , Y10T137/4259 , Y10T137/87885
摘要： A novel integrated gas panel is described. The integrated gas panel of the present invention, comprises a plurality of individual process gas modules or blocks coupled together with a plurality of gaskets located between them. Each process gas module comprises an upstream isolation valve coupled between a process gas inlet and an MFC inlet. An upstream purge valve is coupled between an upstream purge port and the MFC inlet. A mass flow controller is coupled between the MFC inlet and an MFC outlet. A mix isolation valve is coupled between the MFC outlet and a mix port. The modules are coupled together such that respective ports of each module are in fluid communication with one another to form a common tube or port. Gaskets placed between the various modules either allow or block the flow of gas between ports of adjacent modules. By arranging blocks and gaskets in different ways, gas panels with a wide variety of different functions and capabilities can be easily designed and fabricated.
摘要翻译：描述了一种新颖的集成气体面板。本发明的集成气体面板包括多个单独的工艺气体模块或块，它们与位于它们之间的多个衬垫连接在一起。每个处理气体模块包括连接在工艺气体入口和MFC入口之间的上游隔离阀。上游清洗阀连接在上游吹扫口和MFC入口之间。质量流量控制器联接在MFC进口和MFC出口之间。混合隔离阀连接在MFC出口和混合口之间。模块耦合在一起，使得每个模块的相应端口彼此流体连通以形成公共管或端口。放置在各个模块之间的垫圈可以允许或阻止相邻模块的端口之间的气体流动。通过以不同的方式布置块和垫圈，可以容易地设计和制造具有各种不同功能和能力的气体面板。

4. 发明授权

US5178651A Method for purifying gas distribution systems 失效
标题翻译：气体分配系统的净化方法
公开(公告)号：US5178651A
公开(公告)日：1993-01-12
申请号：US741651
申请日：1991-08-07
申请人： Frank R. Balma , Brent D. Elliot
发明人： Frank R. Balma , Brent D. Elliot
IPC分类号： B01D46/42 , F24H3/04
CPC分类号： F24H3/0411
摘要： An apparatus (10) for purifying gas distribution systems has a gas inlet (12) and a gas outlet (14) for connection to gas distribution lines (54). A housing (22) encloses a resistance heater (24) and a particle filter (26) for the gas. The resistance heater (24) is connected to the gas inlet (12) and the particle filter (26) is connected between the resistance heater (24) and the gas outlet (14). The resistance heater includes a sealed tube (26) defining a gas plenum (28). A resistance heater element enclosed in a cylindrical Inconel alloy shell (30) is centrally disposed in the sealed tube (26). A spiral ridge (32) winds around the shell (30) to define a spiral path for gas flowing through the plenum (28). The spiral ridge (32) has a narrower pitch near the gas inlet (12) and a wider pitch moving toward the filter (26) end of the plenum (28).
摘要翻译：用于净化气体分配系统的设备（10）具有用于连接到气体分配管线（54）的气体入口（12）和气体出口（14）。壳体（22）包围用于气体的电阻加热器（24）和颗粒过滤器（26）。电阻加热器（24）连接到气体入口（12），颗粒过滤器（26）连接在电阻加热器（24）和气体出口（14）之间。电阻加热器包括限定气体增压室（28）的密封管（26）。封闭在圆筒形铬镍铁合金外壳（30）中的电阻加热器元件居中设置在密封管（26）中。螺旋脊（32）绕壳体（30）缠绕以限定用于气体流经通气室（28）的螺旋路径。螺旋形脊（32）在气体入口（12）附近具有较窄的间距，并且朝着增压室（28）的过滤器（26）端部移动的较宽的螺距。

5. 发明授权

US5836355A Building blocks for integrated gas panel 失效
标题翻译：综合瓦斯板块
公开(公告)号：US5836355A
公开(公告)日：1998-11-17
申请号：US760150
申请日：1996-12-03
申请人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
发明人： Jeffrey R. Markulec , Dennis G. Rex , Richard E. Schuster , Brent D. Elliot
IPC分类号： F16K27/00 , F16K11/00
CPC分类号： F16K27/003 , Y10T137/5109 , Y10T137/87885
摘要： A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block wherein the first face of the second block has the first port configuration and wherein the first functional component is different than the second functional component.
摘要翻译：一种气体面板，包括多个离散块。本发明的气体面板包括耦合到第一块的第一面的第一功能部件，其中第一面具有第一端口构造。耦合到第二块的第一面的第二功能部件，其中第二块的第一面具有第一端口配置，并且其中第一功能部件不同于第二功能部件。

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