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    • 2. 发明授权
    • Photoacoustic device and process for multi-gas sensing
    • 用于多气体感测的光声装置和工艺
    • US5933245A
    • 1999-08-03
    • US778382
    • 1996-12-31
    • R. Andrew WoodThomas M. RezachekRudy R. Hegel
    • R. Andrew WoodThomas M. RezachekRudy R. Hegel
    • G01N29/00G01N21/17G01N21/61G01N21/03
    • G01N21/1702G01N2021/1704
    • A photoacoustic gas sensing system includes either separate lasers or an arrangement of emitters and filters, to provide infrared energy within at least two distinguishable frequency bandwidths, modulated at two or more associated and different modulating frequencies. The modulated energy signals illuminate a gas cell containing a mixture of gases that experience temperature and pressure fluctuations responsive to the radiant energy. An amplified microphone signal, produced responsive to the pressure fluctuations, is detected at the different modulation frequencies to provide two or more detector signals in digital form. These signals are processed in combination with predetermined constants derived by calibrating the system, to generate two or more concentration values corresponding to the individual gases involved. The system can utilize a photoacoustic cell with walls formed entirely of a polymer that is both gas-permeable and transparent to the infrared radiation. If desired, a temperature sensor and a pressure sensor near the cell provide respective signals based on ambient temperature and ambient pressure. These ambient condition signals are used to provide concentration measurements corrected for changes in ambient temperature and pressure, including pressure differences due to differences in elevation. Temperature and light sensors can be included to reduce temperature-dependent and time-dependent variations in sensor calibration.
    • 光声气体感测系统包括单独的激光器或发射器和滤波器的布置,以在至少两个可区分的频率带宽内提供红外能量,其以两个或更多个相关联和不同的调制频率调制。 调制的能量信号照亮包含响应于辐射能的温度和压力波动的气体混合气体的气室。 在不同的调制频率处检测响应于压力波动产生的放大的麦克风信号,以提供数字形式的两个或更多个检测器信号。 这些信号与通过校准系统得到的预定常数组合处理,以产生对应于所涉及的各种气体的两个或多个浓度值。 该系统可以利用具有完全由聚合物形成的壁的光声单元,该聚合物既透气又对红外辐射透明。 如果需要,靠近电池的温度传感器和压力传感器基于环境温度和环境压力提供相应的信号。 这些环境条件信号用于提供对环境温度和压力变化进行校正的浓度测量,包括由于高程差引起的压差。 可以包括温度和光度传感器,以降低传感器校准中的温度依赖性和时间依赖性变化。
    • 5. 发明授权
    • Micromachined inferential opto-thermal gas sensor
    • 微加工推荐光热气体传感器
    • US5892140A
    • 1999-04-06
    • US846724
    • 1997-04-30
    • R. Andrew Wood
    • R. Andrew Wood
    • G01N25/00G01N21/03G01N21/17G01N21/35G01N7/00H01J5/02
    • G01N21/171G01N21/03G01N21/3504
    • A micromachined integrated opto-thermal sensor having a rapidly intensity varying or pulsing light source, an interference filter, shadow masking or reflective blocking of light from thermal sensors, or differential operation, a gas cavity into which the detected gas can flow into via a channel or filter, and a thermal detector elements to sense the heating of the gas caused by the absorption of light at a particular wavelength by the specific gas to be detected. Another version of the sensor is one with a dual cavity. One cavity contains the gas to be detected and the other cavity is sealed from the ambient environment and contains no gas. Signals from the detectors from the cavities are subtracted from each other resulting in the elimination of a fixed signal due to radiation impinging the detectors.
    • 具有快速强度变化或脉冲光源,干涉滤光器,来自热传感器的光的阴影掩蔽或反射阻挡或微分操作的微加工的集成光热传感器,气体可以通过通道流入其中 或过滤器,以及用于感测由特定波长的光吸收由被检测的特定气体引起的气体的加热的热检测器元件。 传感器的另一个版本是具有双腔的。 一个空腔包含待检测的气体,另一个空腔与周围环境密封,不含气体。 来自腔的检测器的信号彼此相减,导致由于辐射撞击检测器而消除固定信号。