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    • 3. 发明申请
    • Three-dimensional package and method of making the same
    • 三维包装及其制作方法
    • US20070172983A1
    • 2007-07-26
    • US11645039
    • 2006-12-26
    • Min-Lung HuangWei-Chung WangPo-Jen ChengKuo-Chung YeeChing-Huei SuJian-Wen LoChian-Chi Lin
    • Min-Lung HuangWei-Chung WangPo-Jen ChengKuo-Chung YeeChing-Huei SuJian-Wen LoChian-Chi Lin
    • H01L21/00
    • H01L21/76898H01L25/0657H01L25/50H01L2225/06513H01L2225/06527H01L2225/06541H01L2924/0002H01L2924/00
    • The present invention relates to a three-dimensional package and a method of making the same. The three-dimensional package comprises a first wafer, at least one first hole, a first isolation layer, a first conductive layer, a first solder, a second wafer, at least one second hole, a second isolation layer, a second conductive layer, and a second solder. The first wafer has at least one first pad and a first protection layer exposing the first pad. The first hole penetrates the first wafer. The first isolation layer is disposed on the side wall of the first hole. The lower end of the first conductive layer extends below the surface of the first wafer. The first solder is disposed in the first hole, and is electrically connected to the first pad via the first conductive layer. The second wafer has at least one second pad and a second protection layer exposing the second pad. The second hole penetrates the second wafer. The second isolation layer is disposed on the side wall of the second hole. The lower end of the second conductive layer extends to below the surface of the second wafer and contacts the upper end of the first solder. The second solder is disposed in the second hole and is electrically connected to the second pad via the second conductive layer.
    • 本发明涉及三维包装及其制造方法。 三维封装包括第一晶片,至少一个第一孔,第一隔离层,第一导电层,第一焊料,第二晶片,至少一个第二孔,第二隔离层,第二导电层, 和第二焊料。 第一晶片具有至少一个第一焊盘和暴露第一焊盘的第一保护层。 第一个孔穿透第一个晶片。 第一隔离层设置在第一孔的侧壁上。 第一导电层的下端延伸到第一晶片的表面下方。 第一焊料设置在第一孔中,并且经由第一导电层电连接到第一焊盘。 第二晶片具有至少一个第二焊盘和暴露第二焊盘的第二保护层。 第二孔穿透第二晶片。 第二隔离层设置在第二孔的侧壁上。 第二导电层的下端延伸到第二晶片的表面下方并接触第一焊料的上端。 第二焊料设置在第二孔中,并通过第二导电层与第二焊盘电连接。