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1. 发明授权

US06567715B1 Method and system for automated on-chip material and structural certification of MEMS devices 有权
标题翻译： MEMS器件自动化芯片材料和结构认证的方法和系统
公开(公告)号：US06567715B1
公开(公告)日：2003-05-20
申请号：US09553989
申请日：2000-04-19
申请人： Michael B. Sinclair , Maarten P. DeBoer , Norman F. Smith , Brian D. Jensen , Samuel L. Miller
发明人： Michael B. Sinclair , Maarten P. DeBoer , Norman F. Smith , Brian D. Jensen , Samuel L. Miller
IPC分类号： G06F1900
CPC分类号： B81C99/005
摘要： A new approach toward MEMS quality control and materials characterization is provided by a combined test structure measurement and mechanical response modeling approach. Simple test structures are cofabricated with the MEMS devices being produced. These test structures are designed to isolate certain types of physical response, so that measurement of their behavior under applied stress can be easily interpreted as quality control and material properties information.
摘要翻译：通过组合的测试结构测量和机械响应建模方法提供了MEMS质量控制和材料表征的新方法。简单的测试结构与正在生产的MEMS器件共同构成。这些测试结构设计用于隔离某些类型的物理响应，从而可以轻易地将其在施加的应力下的行为测量解释为质量控制和材料属性信息。

2. 发明授权

US06721094B1 Long working distance interference microscope 有权
标题翻译：长工作距离干涉显微镜
公开(公告)号：US06721094B1
公开(公告)日：2004-04-13
申请号：US09800047
申请日：2001-03-05
申请人： Michael B. Sinclair , Maarten P. DeBoer , Norman F. Smith
发明人： Michael B. Sinclair , Maarten P. DeBoer , Norman F. Smith
IPC分类号： G02B2122
CPC分类号： G01B9/04 , G01B9/02082 , G02B21/14 , G02B21/22
摘要： Disclosed is a long working distance interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. The long working distance of 10-30 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer. A well-matched pair of reference/sample objectives is not required, significantly reducing the cost of this microscope, as compared to a Linnik microinterferometer.
摘要翻译：公开了一种长工作距离干涉显微镜，适用于标准微电子探针台上的MEMS器件和测试结构的三维成像和计量。 10-30 mm的长工作距离允许使用标准探头或探针卡。这使得能够在整个晶片上获取MEMS测试结构的纳米级3-D高度分布。与Linnik微型干涉仪相比，不需要很好匹配的参考/样品目标对，显着降低了该显微镜的成本。

3. 发明授权

US4136813A Joining a pair of parts 失效
标题翻译：加入一对零件
公开(公告)号：US4136813A
公开(公告)日：1979-01-30
申请号：US782257
申请日：1977-03-28
申请人： Norman F. Smith
发明人： Norman F. Smith
IPC分类号： B23K31/02 , B23K1/00 , B23K1/19 , B23K1/20 , B23K35/22
CPC分类号： B23K1/203 , B23K1/19
摘要： In a method of joining a pair of parts, wherein one of the parts is formed of a carbon-containing material and the other formed of a metal at least at its surface to be joined to said one part, the parts are first assembled with the surfaces to be joined in the required joining position, with a brazing material and a flux being provided at or adjacent the surfaces to be joined. The flux is chosen so that when raised to an elevated temperature above the melting point of the brazing material, it is capable of reacting with oxides and carbon at the surface of said one part, while the brazing material is chosen so as to be capable of being heated to said elevated temperature without decomposition. The assembly is then heated at least to said elevated temperature in a non-oxidizing atmosphere so as to melt the brazing material and cause the flux to react with surface oxides and carbon on said one part whereby, on cooling, a brazed joint is produced between the parts.
摘要翻译：在接合一对部件的方法中，其中一个部件由含碳材料形成，另一个部分由至少在其表面上形成的金属形成，以与所述一个部件接合，首先将部件与要在所需的接合位置接合的表面，钎焊材料和焊剂设置在待接合的表面上或邻近待连接的表面。选择焊剂，使得当升高到高于钎料的熔点的高温时，其能够在所述一部分的表面处与氧化物和碳反应，同时选择钎焊材料以能够被加热到所述升高的温度而不分解。然后将组件在非氧化性气氛中至少加热至所述升高温度，以熔化钎焊材料，并使助熔剂与所述一部分上的表面氧化物和碳反应，由此在冷却时，在零件。

4. 发明授权

US4627366A Primary air exchange for a pulverized coal burner 失效
标题翻译：粉煤燃烧器的一次空气交换
公开(公告)号：US4627366A
公开(公告)日：1986-12-09
申请号：US776194
申请日：1985-09-16
申请人： Albert D. LaRue , Roger A. Clocker , Norman F. Smith, Jr.
发明人： Albert D. LaRue , Roger A. Clocker , Norman F. Smith, Jr.
IPC分类号： F23D1/00 , F23D1/02 , F23K3/02
CPC分类号： F23D1/02 , F23K3/02
摘要： A primary air exchange device for a burner of a pulverized fuel, such as coal, with burner including a supply line through which a primary air and pulverized fuel mixture is supplied. A separator having its inlet within the supply line is dimensioned to receive and remove approximately one half of the primary air while the remaining half of the primary air moves past the separator. Additionally approximately 90% of the pulverized fuel passes the separator while only about 10% of the pulverized fuel enters the separator along with approximately one half the primary air. This air and small quantity of fuel mixture is delivered from the separator to a nozzle where it is discharged into a burner throat of a furnace. Hot air is injected into the remaining mixture of half the primary air plus the large percentage of pulverized fuel to heat this fuel before it is injected into the furnace for ignition.
摘要翻译：一种用于诸如煤的粉煤燃料的燃烧器的一次空气交换装置，具有燃烧器，燃烧器包括供应一条空气和粉碎的燃料混合物的供应管线。具有其在供应管线内的入口的分离器的尺寸被设计成接收和去除一次空气的大约一半，而剩余的一半空气移动通过分离器。此外，大约90％的粉碎燃料通过分离器，而只有约10％的粉碎燃料与大约一半的一次空气一起进入分离器。这种空气和少量的燃料混合物从分离器输送到喷嘴，在那里它被排放到炉的燃烧器喉部。将热空气注入到一半空气的剩余混合物中加上大量的粉碎燃料，以在燃料注入炉内点燃之前加热该燃料。

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