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1. 发明申请

US20060213769A1 Coils utilized in vapor deposition applications and methods of production 有权
标题翻译：气相沉积应用中使用的线圈和生产方法
公开(公告)号：US20060213769A1
公开(公告)日：2006-09-28
申请号：US11086022
申请日：2005-03-22
申请人： Eal Lee , Nicole Truong , Robert Prater , Norm Sand
发明人： Eal Lee , Nicole Truong , Robert Prater , Norm Sand
IPC分类号： C23C14/00
CPC分类号： H01J37/3405 , C23C14/34 , C23C14/564 , H01J37/321 , H01J37/32477 , H01J37/32541 , H01J37/32651 , H01J37/3438
摘要： A coil assembly for utilization in a vapor deposition system is described herein that includes at least one subject coil having a length, a height, an inside edge, an outside edge and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the thickness of the subject coil is reduced by at least 20% as compared to a reference coil. A coil assembly is also described herein for utilization in a vapor deposition system that includes at least one subject coil having a length, a height, an inside edge, an outside edge, and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the height of at least part of the subject coil is reduced by at least 20% as compared to the height of a reference coil.
摘要翻译：本文描述了一种用于气相沉积系统中的线圈组件，其包括具有长度，高度，内边缘，外边缘和厚度的至少一个主体线圈，其中被测线圈的厚度被测量为距离在所述内边缘和所述外边缘之间，并且其中所述主体线圈的至少部分厚度与参考线圈相比降低至少20％。本文还描述了一种用于气相沉积系统中的线圈组件，其包括具有长度，高度，内边缘，外边缘和厚度的至少一个主体线圈，其中被测线圈的厚度被测量为内边缘和外边缘之间的距离，并且其中至少部分被检体线圈的高度的至少一部分与参考线圈的高度相比降低至少20％。

2. 发明授权

US09659758B2 Coils utilized in vapor deposition applications and methods of production 有权
公开(公告)号：US09659758B2
公开(公告)日：2017-05-23
申请号：US11086022
申请日：2005-03-22
申请人： Eal Lee , Nicole Truong , Robert Prater , Norm Sand
发明人： Eal Lee , Nicole Truong , Robert Prater , Norm Sand
IPC分类号： C23C14/34 , H01J37/34 , H01J37/32 , C23C14/56
CPC分类号： H01J37/3405 , C23C14/34 , C23C14/564 , H01J37/321 , H01J37/32477 , H01J37/32541 , H01J37/32651 , H01J37/3438
摘要： A coil assembly for utilization in a vapor deposition system is described herein that includes at least one subject coil having a length, a height, an inside edge, an outside edge and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the thickness of the subject coil is reduced by at least 20% as compared to a reference coil. A coil assembly is also described herein for utilization in a vapor deposition system that includes at least one subject coil having a length, a height, an inside edge, an outside edge, and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the height of at least part of the subject coil is reduced by at least 20% as compared to the height of a reference coil.

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