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    • 3. 发明授权
    • Process of producing semiconductor layer structure
    • 制造半导体层结构的工艺
    • US06528337B1
    • 2003-03-04
    • US09544982
    • 2000-04-07
    • Satoshi ArakawaToshikazu MukaiharaNobumitsu YamanakaAkihiko Kasukawa
    • Satoshi ArakawaToshikazu MukaiharaNobumitsu YamanakaAkihiko Kasukawa
    • H01L2100
    • B82Y20/00H01L33/06H01S5/2275H01S5/34306H01S5/3434H01S5/4043H01S5/4087
    • Disclosed is a process of producing a semiconductor layer structure which emits lights with a plurality of luminescence wavelengths from the same quantum well structure. The layer structure has a layer structure which has the quantum well structure located between a lower light-confinement layer and an upper light-confinement layer. At least a part of the quantum well structure is an area which has a shorter luminescence wavelength than those of the other portions. This area is produced by stacking a lower cladding layer, the lower light-confinement layer, the quantum well structure, the upper light-confinement layer and a first semiconductor layer having a first conductivity type on a semiconductor substrate by epitaxial growth and further stacking a second semiconductor layer having the opposite conductivity type to that of the first semiconductor layer on the entire surface or a partial surface of the first semiconductor layer. This second semiconductor layer may be removed after the formation.
    • 公开了一种从相同的量子阱结构产生发射具有多个发光波长的光的半导体层结构的方法。 层结构具有层结构,其具有位于下限光层和上光限制层之间的量子阱结构。 量子阱结构的至少一部分是具有比其它部分更短的发光波长的区域。 该区域是通过外延生长在半导体衬底上堆叠下包层,下光限制层,量子阱结构,上光限制层和具有第一导电类型的第一半导体层,并进一步堆叠 第二半导体层与第一半导体层的整个表面或第一半导体层的部分表面具有相反的导电类型。 该第二半导体层可以在形成之后被去除。