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1. 发明授权

US08845318B2 Imprint apparatus, imprint method, and mold for imprint 有权
标题翻译：压印设备，压印方法和压印模具
公开(公告)号：US08845318B2
公开(公告)日：2014-09-30
申请号：US12509996
申请日：2009-07-27
申请人： Nobuhito Suehira , Junichi Seki , Hideki Ina
发明人： Nobuhito Suehira , Junichi Seki , Hideki Ina
IPC分类号： B29C59/16 , G03F7/00 , B82Y10/00 , B82Y40/00 , G01B11/14 , G03F9/00 , B29C35/08
CPC分类号： G03F7/0002 , B29C35/08 , B29C59/16 , B82Y10/00 , B82Y40/00 , G01B11/14 , G03F9/703 , G03F9/7042 , G03F9/7065
摘要： An imprint apparatus for imprinting a mold pattern onto a substrate or a member on the substrate includes a light source for irradiating a surface of the mold disposed opposite to the substrate and a surface of the substrate with light; an optical system for guiding the light from the light source to the surface of the mold and the surface of the substrate and guiding reflected lights from these surfaces to a spectroscope; a spectroscope for dispersing the reflected lights guided by the optical system into a spectrum; and an analyzer for analyzing a distance between the surface of the mold and the surface of the substrate. The analyzer calculates the distance between the surface of the mold and the surface of the substrate by measuring a distance between the surface of the mold and a surface formed at a position away from the surface of the mold.
摘要翻译：用于将模具图案压印到基板或基板上的部件上的压印装置包括用于照射与基板相对设置的模具表面和基板的表面的光源; 用于将来自光源的光引导到模具的表面和基板的表面并将来自这些表面的反射光引导到分光器的光学系统; 用于将由光学系统引导的反射光分散到光谱中的分光镜; 以及分析器，用于分析模具表面与基板表面之间的距离。分析器通过测量模具表面与形成在远离模具表面的位置的表面之间的距离来计算模具表面与基材表面之间的距离。

2. 发明授权

US08770958B2 Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction 有权
标题翻译：图案形成方法和图案形成装置，其中基板和模具在面内方向上对齐
公开(公告)号：US08770958B2
公开(公告)日：2014-07-08
申请号：US12842118
申请日：2010-07-23
申请人： Nobuhito Suehira , Junichi Seki , Masao Majima , Atsunori Terasaki , Hideki Ina
发明人： Nobuhito Suehira , Junichi Seki , Masao Majima , Atsunori Terasaki , Hideki Ina
IPC分类号： B28B17/00
CPC分类号： G03F9/7084 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7076
摘要： A pattern forming method for forming an imprinted pattern on a coating material disposed on a substrate with a pattern provided to a mold. The method includes preparing a mold provided with a first surface including a pattern area, a second surface located opposite from the first surface, and an alignment mark provided at a position at which the alignment mark is away from the first surface, contacting the pattern area of the mold with the coating material disposed on the substrate, obtaining information about positions of the mold and the substrate by using the alignment mark and a mark provided to the substrate in a state in which the coating material is disposed on the substrate at a portion where the alignment mark and the substrate are opposite to each other, and effecting alignment of the substrate with the mold in an in-plane direction of the pattern area, on the basis of the information in a state in which the pattern area and the coating material contact each other.
摘要翻译：一种图案形成方法，用于在设置在模具上的图案的基板上的涂料上形成印刷图案。该方法包括制备模具，其具有包括图案区域的第一表面，与第一表面相对的第二表面和设置在对准标记远离第一表面的位置处的对准标记，的模具，其中涂覆材料设置在基板上，通过使用对准标记和设置在基板上的标记获得关于模具和基板的位置的信息，其中涂布材料设置在基板上的部分其中所述对准标记和所述基板彼此相对，并且基于所述图案区域和所述涂层的状态的信息，在所述图案区域的面内方向上进行所述基板与所述模具的对准材料相互接触。

3. 发明授权

US08760664B2 Imaging apparatus and imaging method using optical coherence tomography 有权
标题翻译：使用光学相干断层扫描的成像设备和成像方法
公开(公告)号：US08760664B2
公开(公告)日：2014-06-24
申请号：US12991734
申请日：2009-07-06
申请人： Nobuhito Suehira
发明人： Nobuhito Suehira
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： A61B3/102 , A61B3/1025 , A61B5/0066 , A61B5/0073 , A61B5/7257 , G01N21/4795
摘要： Provided is an imaging apparatus using Fourier-domain optical coherence tomography, the imaging apparatus removing noises caused by the autocorrelation component of returning light to obtain a high-resolution tomographic image. A first switching unit 17 switches a first state in which returning light 12 is combined with reference light (a state in which the returning light 12 is conducted to a combining unit 22) and a second state different from the first state (a state in which the light path of the returning light 12 is blocked or changed). A controlling unit 18 controls the switching unit 17 to change the first and the second state. A interferometric information acquiring unit 19 acquires interferometric information on the returning light 12 and the reference light 14 using the reference light 14 or the returning light 12 detected by the detecting unit 16 in the second state and the combined light 15.
摘要翻译：提供了一种使用傅里叶域光学相干断层摄影的成像装置，该成像装置去除由返回光的自相关分量引起的噪声，以获得高分辨率断层图像。第一切换单元17将返回光12与参考光（返回光12被传导到组合单元22的状态）和不同于第一状态的第二状态（其中返回光12的光路被阻挡或改变）。控制单元18控制切换单元17改变第一和第二状态。干涉信息获取单元19使用在第二状态下由检测单元16检测的参考光14或返回光12以及组合光15获取关于返回光12和参考光14的干涉信息。

4. 发明授权

US08668484B2 Mold, imprint method, and process for producing a chip 有权
标题翻译：模具，压印方法和制造芯片的工艺
公开(公告)号：US08668484B2
公开(公告)日：2014-03-11
申请号：US12388194
申请日：2009-02-18
申请人： Atsunori Terasaki , Junichi Seki , Nobuhito Suehira , Hideki Ina , Shingo Okushima
发明人： Atsunori Terasaki , Junichi Seki , Nobuhito Suehira , Hideki Ina , Shingo Okushima
IPC分类号： B29C59/00
CPC分类号： B29C59/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F9/7042
摘要： A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate 2010 formed of a first material and an alignment mark 2102 formed of a second material different from the first material. The first material and the second material have transmissivities to light in a part of an ultraviolet wavelength range. The second material has a refractive index of not less than 1.7.
摘要翻译：该模具能够在将待固化的树脂材料设置在模具和待加工构件之间的状态下与要处理的构件高度准确地对准，并且由第一材料和对准构成的基板2010构成标记2102由与第一材料不同的第二材料形成。第一材料和第二材料在紫外线波长范围的一部分中具有透光性。第二种材料的折射率不小于1.7。

5. 发明授权

US08517537B2 Optical coherence tomographic imaging method and optical coherence tomographic imaging apparatus 有权
标题翻译：光学相干断层成像方法和光学相干断层成像装置
公开(公告)号：US08517537B2
公开(公告)日：2013-08-27
申请号：US13286481
申请日：2011-11-01
申请人： Nobuhito Suehira , Kazuhiro Matsumoto , Nobuhiro Tomatsu
发明人： Nobuhito Suehira , Kazuhiro Matsumoto , Nobuhiro Tomatsu
IPC分类号： A61B3/14
CPC分类号： A61B3/102
摘要： In an OCT apparatus used in ophthalmology, if a working distance between an eye to be inspected and an objective lens varies, a shape of an obtained tomographic image is changed. This means that the OCT apparatus cannot be used for examining a variation of eyeball shapes. Provided is an optical coherence tomographic imaging method, including: acquiring a first distance between the eye to be inspected and the objective lens, corresponding to first tomographic image of the eye to be inspected; and correcting the first tomographic image to be second tomographic image corresponding to a second distance between the eye to be inspected and the objective lens, which is different from the first distance.
摘要翻译：在用于眼科的OCT装置中，如果要检查的眼睛与物镜之间的工作距离发生变化，则获得的断层图像的形状发生变化。这意味着OCT装置不能用于检查眼球形状的变化。本发明提供一种光学相干断层成像方法，包括：对应于待检查眼睛的第一断层图像，获取被检眼和物镜之间的第一距离; 以及将所述第一断层图像校正为与所述待检查眼睛和所述物镜之间的第二距离相对应的第二断层图像，所述第二距离与所述第一距离不同。

6. 发明申请

US20130003076A1 TOMOGRAPHIC IMAGING APPRATUS AND TOMOGRAPHIC IMAGING METHOD 有权
标题翻译： TOMOGRAPHIC IMAGING APPRATUS和TOMOGRAPHIC IMAGING METHOD
公开(公告)号：US20130003076A1
公开(公告)日：2013-01-03
申请号：US13634215
申请日：2011-03-24
申请人： Hirofumi Yoshida , Nobuhito Suehira
发明人： Hirofumi Yoshida , Nobuhito Suehira
IPC分类号： G01B9/02
CPC分类号： A61B3/1225 , A61B3/102 , A61B5/0066 , A61B5/0068 , G01B9/02044 , G01B9/02091
摘要： A tomographic imaging apparatus includes an irradiation unit configured to irradiate with a plurality of measurement light beams, a sensor configured to convert into an electric signal a plurality of combined light beams via an optical imaging system by making return light beams from an inspection target, which are generated due to the plurality of measurement light beams, interfere with reference light beams, an output unit configured to output light beams of a single wavelength based on a wavelength width of the plurality of measurement light beams, and a generation unit configured to generate a tomographic image from an electric signal acquired by the sensor via the imaging optical system, based on a position of the light beam of the single wavelength on the sensor.
摘要翻译：断层成像装置包括被配置为用多个测量光束照射的照射单元，被配置为通过使来自检查对象的返回光束经由光学成像系统将多个组合光转换成电信号的传感器，由于多个测量光束而产生，与参考光束干涉，输出单元被配置为基于多个测量光束的波长宽度输出单个波长的光束;以及生成单元，被配置为生成基于传感器上的单个波长的光束的位置，经由成像光学系统由传感器获取的电信号的断层图像。

7. 发明申请

US20120229764A1 OPHTHALMOLOGIC APPARATUS AND CONTROL METHOD OF THE SAME 有权
标题翻译：其眼科设备及其控制方法
公开(公告)号：US20120229764A1
公开(公告)日：2012-09-13
申请号：US13409607
申请日：2012-03-01
申请人： Nobuhiro Tomatsu , Tomoyuki Makihira , Nobuhito Suehira
发明人： Nobuhiro Tomatsu , Tomoyuki Makihira , Nobuhito Suehira
IPC分类号： A61B3/14
CPC分类号： A61B3/113 , A61B3/0058
摘要： There is provided an ophthalmologic apparatus having a tracking function that can select a fundus image that is less affected by eye motion to reduce burdens on an operator/a patient in fundus imaging, wherein the ophthalmologic apparatus picks up a first fundus image (202), extracts a characteristic point as a template from the first fundus image (203), executes pattern matching on a second fundus image (205) to determine presence/absence of eye motion, and decides a tracking template image (207).
摘要翻译：提供了一种具有跟踪功能的眼科装置，其可以选择较少受眼睛运动影响的眼底图像，以减轻操作者/患者在眼底成像中的负担，其中眼科装置拾取第一眼底图像（202），从第一眼底图像（203）提取特征点作为模板，在第二眼底图像（205）上执行模式匹配以确定眼睛运动的存在/不存在，并且确定跟踪模板图像（207）。

8. 发明申请

US20120044499A1 IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION SYSTEM, AND METHOD OF CONTROLLING THE SAME 有权
标题翻译：图像获取装置，图像获取系统及其控制方法
公开(公告)号：US20120044499A1
公开(公告)日：2012-02-23
申请号：US13204953
申请日：2011-08-08
申请人： Tomohiko Shimoyama , Nobuhito Suehira , Yukio Sakagawa
发明人： Tomohiko Shimoyama , Nobuhito Suehira , Yukio Sakagawa
IPC分类号： G01B9/02
CPC分类号： G01B9/02 , A61B3/102 , G01B9/02019 , G01B9/02028 , G01B9/0203 , G01B9/02085 , G01B9/02089 , G01B9/02091 , G01B2210/52 , G01B2290/45
摘要： An OCT apparatus that photographs with a plurality of measuring beams concurrently has a mechanism for adjusting the optical path length of a reference beam for each measuring beam. Accordingly, when tomographic images photographed in this manner are displayed side by side, because the depth of photographing varies from one tomographic image to another, it is difficult for an operator to comprehend the positional relation between the photographed images. In displaying tomographic images acquired with a plurality of measuring beams, the display position of each tomographic image is adjusted based on the changed optical path length of a reference beam of the measuring beam used for the image. The tomographic images are thus aligned in height and are presented in a manner that is easy for the operator to comprehend the positional relation between the photographed images.
摘要翻译：同时具有多个测量光束照相的OCT设备具有用于调整每个测量光束的参考光束的光程长度的机构。因此，当以这种方式拍摄的断层图像并排显示时，由于摄影深度从一个断层图像变化到另一个，因此操作者难以理解拍摄的图像之间的位置关系。在显示用多个测量光束获取的断层图像时，基于用于图像的测量光束的参考光束的改变的光程长度来调整每个断层图像的显示位置。因此，断层图像的高度对准，并且以操作者容易理解拍摄的图像之间的位置关系的方式呈现。

9. 发明申请

US20110198783A1 PROCESS FOR PRODUCING A DEVICE USING A MOLD 有权
标题翻译：使用模具生产设备的方法
公开(公告)号：US20110198783A1
公开(公告)日：2011-08-18
申请号：US13094354
申请日：2011-04-26
申请人： Atsunori TERASAKI , Junichi SEKI , Nobuhito SUEHIRA , Hideki INA
发明人： Atsunori TERASAKI , Junichi SEKI , Nobuhito SUEHIRA , Hideki INA
IPC分类号： B29C35/08
CPC分类号： B29C35/0888 , B29C59/022 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： In order to provide a mold and an imprint apparatus which permit adjustment of a depth of an imprint pattern after the imprint pattern is formed, the mold is constituted by a mold substrate including a first material and a surface layer, constituting a projection of the mold and including a second material, for forming a pattern on the photocurable resin material. The first material is more etchable than the second material. The first material and the second material have optical transmittances capable of curing the photocurable resin material with respect to at least a part of wavelength range of ultraviolet light.
摘要翻译：为了提供能够在压印图案形成之后调整印痕图案的深度的模具和压印装置，模具由包括第一材料和表面层的模具基板构成，构成模具的突出部并且包括用于在可光固化树脂材料上形成图案的第二材料。第一种材料比第二种材料更可蚀刻。第一材料和第二材料具有能够相对于紫外线的至少一部分波长范围固化光固化性树脂材料的光透射率。

10. 发明授权

US07927089B2 Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method 有权
标题翻译：模具，包括模具的装置，图案转印装置和图案形成方法
公开(公告)号：US07927089B2
公开(公告)日：2011-04-19
申请号：US11447857
申请日：2006-06-07
申请人： Junichi Seki , Masao Majima , Nobuhito Suehira
发明人： Junichi Seki , Masao Majima , Nobuhito Suehira
IPC分类号： B29C59/00 , B29C35/08 , B28B17/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A deformable mold includes a first surface at which an imprinting pattern is formed. The imprinting pattern (i) is used to imprint a pattern on a substrate and (ii) has a variable size, which varies based on an amount of deformation of the imprinting pattern. A second surface is located opposite from the first surface in a direction of thickness of the mold. A plurality of heat generating members that generate heat have a permeability to ultraviolet light and are disposed at one of (i) the second surface and (ii) between the first surface and the second surface, and the plurality of heat generating members directly contact the mold in order to control the amount of deformation of the imprinting pattern to vary the size of the imprinting pattern. A controller independently controls the plurality of heat generating members and the controller controls at least one of the heat generating members so as to effect anisotropic size correction of the mold in an in-plane direction of the mold.
摘要翻译：可变形模具包括形成有压印图案的第一表面。压印图案（i）用于将图案印刷在基材上，（ii）具有可变尺寸，其基于压印图案的变形量而变化。第二表面在模具的厚度方向上与第一表面相对。多个产生热量的发热部件具有对紫外线的透过性，并且设置在（i）第二表面和（ii）第一表面和第二表面之一之间，并且多个发热部件直接接触模具，以便控制压印图案的变形量以改变压印图案的尺寸。控制器独立地控制多个发热构件，并且控制器控制至少一个发热构件，以便在模具的面内方向上实现模具的各向异性尺寸校正。

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