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1. 发明授权

US5786744A Hybrid sensor 失效
标题翻译：混合传感器
公开(公告)号：US5786744A
公开(公告)日：1998-07-28
申请号：US409197
申请日：1995-03-23
申请人： Tomoyuki Nishio , Satoshi Hiyama , Mizuho Doi , Nobuhiro Fueki , Hiroshi Yamakawa
发明人： Tomoyuki Nishio , Satoshi Hiyama , Mizuho Doi , Nobuhiro Fueki , Hiroshi Yamakawa
IPC分类号： G01C19/00 , G01P15/00 , G01P15/08 , G01P15/12 , G01P15/18 , H01C7/00
CPC分类号： G01P15/08 , G01P15/008 , G01P15/12 , G01P15/18 , G01P9/00
摘要： A hybrid sensor which is comprised of an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas. The acceleration sensor and the angular velocity sensor are formed in one piece by the use of semiconductor processing technology in such a manner that the acceleration sensor and the angular velocity sensor are formed on a plurality of semiconductor substrates, and then the plurality of semiconductor substrates are superposed one upon another and united into a laminate.
摘要翻译：一种混合式传感器，包括：加速度传感器，用于根据气密地封闭在流体密封空间内的预定气体的温度分布来检测加速度;以及角速度传感器，用于根据预定的加油站。通过利用半导体处理技术将加速度传感器和角速度传感器形成为一体，使加速度传感器和角速度传感器形成在多个半导体基板上，然后将多个半导体基板叠加在一起并组合成层压板。

2. 发明授权

US5279162A Semiconductor sensor 失效
标题翻译：半导体传感器
公开(公告)号：US5279162A
公开(公告)日：1994-01-18
申请号：US848693
申请日：1992-03-09
申请人： Katsuhiko Takebe , Mizuho Doi , Hiroyasu Takehara , Satoshi Hiyama , Masanobu Urabe
发明人： Katsuhiko Takebe , Mizuho Doi , Hiroyasu Takehara , Satoshi Hiyama , Masanobu Urabe
IPC分类号： G01P15/08 , G01P15/12 , G01L9/00 , H01L29/84
CPC分类号： G01P15/123 , G01P15/0802 , G01P15/124 , G01P2015/0828 , H01L2224/48091 , H01L2924/12032 , H01L2924/13091 , Y10S73/04
摘要： This invention relates to a semiconductor sensor for detecting external physical forces, such as acceleration, contact pressures, air pressures, mechanical vibrations, etc. The semiconductor sensor according to this invention is characterized by the use of compound semiconductors of high piezoelectricity, such as GaAs, etc. Conventionally sensors of the cantilever type, diaphragm type, etc. are made of silicon. These prior art sensors have low detection sensitivity, and their characteristics tend to deteriorate. The sensor according to this invention is made of GaAs, which has high piezoelectricity and can retain good characteristics of the semiconductor even at high temperatures and includes a field-effect transistor formed on the GaAs for sensing a stress. The FET is driven by a constant current or a constant voltage so as to detect a change of an electrical characteristic (e.g., threshold characteristic) due to a stress. The structure of the sensor according to this invention enables the sizes of the sensors not only to be diminished but also to reduce the fabrication costs. When a stress is applied to the FET, the transconductance changes, and the temperature changes, consequently the I-V characteristic changes. An a.c. signal biased by a direct current is supplied to the gate of the FET, and a drain current is detected in an a.c. component and a d.c. component so as to detect a temperature concurrently with a detection of a stress.
摘要翻译：本发明涉及用于检测诸如加速度，接触压力，空气压力，机械振动等外部物理力的半导体传感器。根据本发明的半导体传感器的特征在于使用高压电性的化合物半导体，例如GaAs 等等。常规地，悬臂式，隔膜式等的传感器由硅制成。这些现有技术的传感器具有低检测灵敏度，并且它们的特性趋于恶化。根据本发明的传感器由GaAs制成，其具有高压电性，并且即使在高温下也能保持半导体的良好特性，并且包括形成在GaAs上用于感测应力的场效应晶体管。 FET由恒定电流或恒定电压驱动，以便检测由于应力引起的电特性（例如，阈值特性）的变化。根据本发明的传感器的结构使得传感器的尺寸不仅可以减小，而且可以降低制造成本。当FET施加应力时，跨导变化，温度变化，I-V特性变化。一个通过直流电流偏置的信号被提供给FET的栅极，并且以直流方式检测漏极电流。组件和直径以便与应力的检测同时检测温度。

3. 发明申请

US20080314163A1 Magnetostrictive Torque Sensor and Electric Power Steering Apparatus 失效
标题翻译：磁致伸缩转矩传感器和电动转向装置
公开(公告)号：US20080314163A1
公开(公告)日：2008-12-25
申请号：US12143588
申请日：2008-06-20
申请人： Hitoshi HARATA , Yuichi FUKUDA , Yukiya KASHIMURA , Mizuho DOI
发明人： Hitoshi HARATA , Yuichi FUKUDA , Yukiya KASHIMURA , Mizuho DOI
IPC分类号： G01L3/00
CPC分类号： G01L3/102 , G01L3/105
摘要： This magnetostrictive torque sensor 10 includes a rotating shaft 11 used to rotate according to an input torque and provided with magnetostrictive films 14A and 14B, an excitation coil 12 configured to apply an alternating magnetic field 31 to the magnetostrictive film, and detection coils 13A and 13B each of which detects a change in the magnetic characteristic of an associated one of the magnetostrictive films. The magnetostrictive torque sensor is configured so that a bias magnetic field is added to the alternating magnetic field from a bias power supply 17 so as to satisfy the following conditions: Hm −Hin>−Hn where Hm (>0) is an applied magnetic field corresponding to a maximum magnetic permeability obtained according to a magnetic hysteresis curve 34 of the magnetostrictive film, which shows magnetization caused by the alternating magnetic field, Hn (>0) is an applied magnetic field corresponding to an end of a range in which a discontinuous magnetization is performed, and Hin (>0) is an applied magnetic field that determines a sensitivity range to be set on a magnetostrictive sensitivity curve representing a magnetostrictive sensitivity exhibited by the magnetostrictive film.
摘要翻译：该磁致伸缩转矩传感器10包括用于根据输入转矩旋转并设置有磁致伸缩膜14A和14B的旋转轴11，被配置为向磁致伸缩膜施加交变磁场31的励磁线圈12以及检测线圈13A和13B 其中的每一个检测相关联的一个磁致伸缩膜的磁特性的变化。磁致伸缩扭矩传感器被构造成使得偏置磁场从偏置电源17加到交变磁场上，以满足以下条件：<？in-line-formula description =“In-line formula”end = “铅”？> Hm <？in-line-formula description =“In-line Formulas”end =“lead”？> - Hm> -Hin > -Hn <？in-line-formula description =“In-line Formulas”end =“tail”？>其中Hm（> 0）是对应于根据磁滞曲线34获得的最大磁导率的施加磁场表示由交变磁场引起的磁化的磁致伸缩膜Hn（> 0）是对应于进行不连续磁化的范围的结束的施加磁场，Hin（> 0）是施加磁场确定在磁致伸缩敏感度曲线上设定的灵敏度范围，该灵敏度曲线表示由磁致伸缩薄膜表现的磁致伸缩灵敏度。

4. 发明授权

US07386930B2 Method for manufacturing a magnetostrictive torque sensor 有权
标题翻译：磁致伸缩扭矩传感器的制造方法
公开(公告)号：US07386930B2
公开(公告)日：2008-06-17
申请号：US11983085
申请日：2007-11-07
申请人： Yasuo Shimizu , Yoshito Nakamura , Shunichiro Sueyoshi , Nobuhiko Yoshimoto , Koji Kobayashi , Yuichi Fukuda , Mizuho Doi , Hitoshi Harada , Tomohiro Hoshi
发明人： Yasuo Shimizu , Yoshito Nakamura , Shunichiro Sueyoshi , Nobuhiko Yoshimoto , Koji Kobayashi , Yuichi Fukuda , Mizuho Doi , Hitoshi Harada , Tomohiro Hoshi
IPC分类号： H04R31/00
CPC分类号： G01L3/102 , G01L3/103 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/49078 , Y10T29/49224
摘要： For forming an annular magnetostrictive coat on an outer peripheral surface of a rotational shaft associated with a magnetostrictive torque sensor, a magnetostrictive coat forming method comprises a step of fitting a cylindrical masking jig over the outer peripheral surface of the rotational shaft and securing the masking jig to the outer peripheral surface, a step of placing the rotational shaft in a plating tank to thereby form the magnetostrictive coat by plating on the outer peripheral surface, and a step of detaching the masking jig from the rotational shaft.
摘要翻译：为了在与磁致伸缩扭矩传感器相关联的旋转轴的外周表面上形成环形磁致伸缩涂层，磁致伸缩涂层形成方法包括将圆柱形掩模夹具安装在旋转轴的外周表面上并固定掩模夹具在外周面上设置将旋转轴配置在镀槽内，通过在外周面上电镀而形成磁致伸缩涂层的步骤，以及将掩模夹具与旋转轴分离的工序。

5. 发明申请

US20070074589A1 Magnetostrictive torque sensor and electrically powered steering apparatus using same 失效
标题翻译：磁致伸缩转矩传感器和使用其的电动转向装置
公开(公告)号：US20070074589A1
公开(公告)日：2007-04-05
申请号：US11542142
申请日：2006-10-04
申请人： Hitoshi Harata , Mizuho Doi , Hitoshi Karasawa , Tomohiro Hoshi , Yukiya Kashimura
发明人： Hitoshi Harata , Mizuho Doi , Hitoshi Karasawa , Tomohiro Hoshi , Yukiya Kashimura
IPC分类号： G01L3/00
CPC分类号： B62D6/10 , G01L3/102 , G01L3/103
摘要： A magnetostrictive torque sensor comprising a first magnetostrictive film, a second magnetostrictive film, and a third magnetostrictive film formed over the entire circumferential periphery of a surface of a rotating shaft. A first sensor coil, a second sensor coil, and a third sensor coil for sensing changes in impedance are provided for the first, second, and third magnetostrictive films, respectively. Signals according to the changes in impedance outputted from the first through third sensor coils are inputted to a torque calculating unit. The torque calculating unit calculates the torque applied to the rotating shaft on the basis of the output signal from the first sensor coil and the output signal from the second sensor coil. Furthermore, the output signals from the first through third sensor coils are compared, and failures in the first magnetostrictive film or the second magnetostrictive film are detected by a failure detector.
摘要翻译：一种磁致伸缩扭矩传感器，包括在旋转轴的表面的整个圆周周围形成的第一磁致伸缩膜，第二磁致伸缩膜和第三磁致伸缩膜。分别为第一，第二和第三磁致伸缩膜提供第一传感器线圈，第二传感器线圈和用于感测阻抗变化的第三传感器线圈。根据从第一至第三传感器线圈输出的阻抗的变化的信号被输入到转矩计算单元。扭矩计算单元基于来自第一传感器线圈的输出信号和来自第二传感器线圈的输出信号来计算施加到旋转轴的扭矩。此外，比较来自第一至第三传感器线圈的输出信号，并且通过故障检测器检测第一磁致伸缩膜或第二磁致伸缩膜中的故障。

6. 发明授权

US5719333A Acceleration sensor 失效
标题翻译：加速度传感器
公开(公告)号：US5719333A
公开(公告)日：1998-02-17
申请号：US376155
申请日：1995-01-20
申请人： Takashi Hosoi , Satoshi Hiyama , Sukeyuju Shinotuka , Mizuho Doi , Hiroshi Yamakawa , Nariaki Kuriyama , Tomoyuki Nishio , Atsushi Inaba , Nobuhiro Fueki
发明人： Takashi Hosoi , Satoshi Hiyama , Sukeyuju Shinotuka , Mizuho Doi , Hiroshi Yamakawa , Nariaki Kuriyama , Tomoyuki Nishio , Atsushi Inaba , Nobuhiro Fueki
IPC分类号： G01P15/00 , G01P15/12 , G01P15/18
CPC分类号： G01P15/18 , G01P15/008 , G01P15/12
摘要： A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.
摘要翻译：一种非常小且经济的加速度传感器，其可以通过在半导体制造过程中通过使用照相雕刻技术精确地处理半导体衬底等来以高灵敏度和高精度检测作用加速度，以精确地形成元件本身，例如传感器外壳，空腔，加热器，温度感测电阻元件和热型温度感测电阻元件，以及每个元件的相对位置。加速度传感器的一个实施例可以检测从任何三维方向起作用的加速度。

7. 发明授权

US5115292A Semiconductor sensor 失效
标题翻译：半导体传感器
公开(公告)号：US5115292A
公开(公告)日：1992-05-19
申请号：US403296
申请日：1989-09-05
申请人： Katsuhiko Takebe , Mizuho Doi , Hiroyasu Takehara , Satoshi Hiyama , Masanobu Urabe
发明人： Katsuhiko Takebe , Mizuho Doi , Hiroyasu Takehara , Satoshi Hiyama , Masanobu Urabe
IPC分类号： G01P15/08 , G01P15/12
CPC分类号： G01P15/123 , G01P15/0802 , G01P15/124 , G01P2015/0828 , H01L2224/48091 , H01L2924/12032 , H01L2924/13091 , Y10S73/04
摘要： This invention relates to a semiconductor sensor for detecting external physical forces, such as acceleration, contact pressures, air pressures, mechanical vibrations, etc. The semiconductor sensor according to this invention is characterized by the use of compound semiconductors of high piezoelectricity, such as GaAs, etc. Conventionally sensors of the cantilever type, diaphragm type, etc. are made of silicon. These prior art sensors have low detection sensitivity, and their characteristics tend to deteriorate. The sensor according to this invention is made of GaAs, which has high piezoelectricity and can retain good characteristics of the semiconductor even at high temperatures and includes a field-effect transistor formed on the GaAs for sensing a stress. The FET is driven by a constant current or a constant voltage so as to detect a change of an electrical characteristic (e.g., threshold characteristic) due to a stress. The structure of the sensor according to this invention enables the sizes of the sensors not only to be diminished but also to reduce the fabrication costs. When a stress is applied to the FET, the transconductance changes, and the temperature changes, consequently the I-V characteristic changes. An a.c. signal biased by a direct current is supplied to the gate of the FET, and a drain current is detected in an a.c. component and a d.c. component so as to detect a temperature concurrently with a detection of a stress.

8. 发明授权

US07966897B2 Plating apparatus 有权
标题翻译：电镀装置
公开(公告)号：US07966897B2
公开(公告)日：2011-06-28
申请号：US12441189
申请日：2007-08-22
申请人： Nobuhiko Yoshimoto , Hitoshi Karasawa , Koji Kobayashi , Mizuho Doi , Hitoshi Harata
发明人： Nobuhiko Yoshimoto , Hitoshi Karasawa , Koji Kobayashi , Mizuho Doi , Hitoshi Harata
IPC分类号： G01L3/10
CPC分类号： C25D17/02 , C25D17/008 , C25D21/10 , G01R33/063 , G01R33/18 , H01F41/24
摘要： A plating apparatus includes a plating tank for storing a plating liquid, and applies a magnetic alloy plating to a shaft-shaped member immersed in the plating liquid by using the shaft-shaped member as a cathode. The plating apparatus further includes a rotable member configured to rotate the shaft-shaped member as a rotary shaft; annular shielding tools mounted on the outer peripheral surface of the shaft-shaped member; a plating liquid discharge nozzle including plating liquid discharge ports which are provided to face the shaft-shaped member so as to avoid the shielding tools; and an anode provided around the shaft-shaped member and the plating liquid discharge nozzle.
摘要翻译：电镀装置包括用于储存电镀液的电镀槽，并且通过使用该轴状构件作为阴极，向浸入电镀液中的轴状构件施加磁性合金电镀。电镀装置还包括可旋转构件，其构造为使所述轴状构件作为旋转轴旋转; 安装在所述轴状构件的外周面上的环形屏蔽工具; 电镀液体排出喷嘴，包括设置成面对所述轴状构件以避免所述屏蔽工具的镀液排出口; 以及设置在所述轴状构件和所述电镀液排出喷嘴周围的阳极。

9. 发明授权

US07497132B2 Magnetostrictive torque sensor and electrically powered steering apparatus using same 失效
标题翻译：磁致伸缩转矩传感器和使用其的电动转向装置
公开(公告)号：US07497132B2
公开(公告)日：2009-03-03
申请号：US11542142
申请日：2006-10-04
申请人： Hitoshi Harata , Mizuho Doi , Hitoshi Karasawa , Tomohiro Hoshi , Yukiya Kashimura
发明人： Hitoshi Harata , Mizuho Doi , Hitoshi Karasawa , Tomohiro Hoshi , Yukiya Kashimura
IPC分类号： G01L3/00
CPC分类号： B62D6/10 , G01L3/102 , G01L3/103
摘要： A magnetostrictive torque sensor comprising a first magnetostrictive film, a second magnetostrictive film, and a third magnetostrictive film formed over the entire circumferential periphery of a surface of a rotating shaft. A first sensor coil, a second sensor coil, and a third sensor coil for sensing changes in impedance are provided for the first, second, and third magnetostrictive films, respectively. Signals according to the changes in impedance outputted from the first through third sensor coils are inputted to a torque calculating unit. The torque calculating unit calculates the torque applied to the rotating shaft on the basis of the output signal from the first sensor coil and the output signal from the second sensor coil. Furthermore, the output signals from the first through third sensor coils are compared, and failures in the first magnetostrictive film or the second magnetostrictive film are detected by a failure detector.
摘要翻译：一种磁致伸缩扭矩传感器，包括在旋转轴的表面的整个圆周周围形成的第一磁致伸缩膜，第二磁致伸缩膜和第三磁致伸缩膜。分别为第一，第二和第三磁致伸缩膜提供第一传感器线圈，第二传感器线圈和用于感测阻抗变化的第三传感器线圈。根据从第一至第三传感器线圈输出的阻抗的变化的信号被输入到转矩计算单元。扭矩计算单元基于来自第一传感器线圈的输出信号和来自第二传感器线圈的输出信号来计算施加到旋转轴的扭矩。此外，比较来自第一至第三传感器线圈的输出信号，并且通过故障检测器检测第一磁致伸缩膜或第二磁致伸缩膜中的故障。

10. 发明授权

US5945601A Acceleration sensor with temperature resistor elements 失效
标题翻译：带温度电阻元件的加速度传感器
公开(公告)号：US5945601A
公开(公告)日：1999-08-31
申请号：US20999
申请日：1998-02-09
申请人： Takashi Hosoi , Satoshi Hiyama , Sukeyuju Shinotuka , Mizuho Doi , Hiroshi Yamakawa , Nariaki Kuriyama , Tomoyuki Nishio , Atsushi Inaba , Nobuhiro Fueki
发明人： Takashi Hosoi , Satoshi Hiyama , Sukeyuju Shinotuka , Mizuho Doi , Hiroshi Yamakawa , Nariaki Kuriyama , Tomoyuki Nishio , Atsushi Inaba , Nobuhiro Fueki
IPC分类号： G01P15/00 , G01P15/12 , G01P15/18
CPC分类号： G01P15/18 , G01P15/008 , G01P15/12
摘要： A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.
摘要翻译：一种非常小且经济的加速度传感器，其可以通过在半导体制造过程中通过使用照相雕刻技术精确地处理半导体衬底等来以高灵敏度和高精度检测作用加速度，以精确地形成元件本身，例如传感器外壳，空腔，加热器，温度感测电阻元件和热型温度感测电阻元件，以及每个元件的相对位置。加速度传感器的一个实施例可以检测从任何三维方向起作用的加速度。

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