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    • 4. 发明申请
    • Substrate processing apparatus
    • 基板加工装置
    • US20060090849A1
    • 2006-05-04
    • US11293257
    • 2005-12-05
    • Kazuyuki ToyodaAtsuhiko SudaIssei MakiguchiTsutomu TanakaSadayuki SuzukiShinichi NomuraMitsunori Takeshita
    • Kazuyuki ToyodaAtsuhiko SudaIssei MakiguchiTsutomu TanakaSadayuki SuzukiShinichi NomuraMitsunori Takeshita
    • C23F1/00
    • H01L21/67178C23C16/54H01L21/67766H01L21/67781
    • A substrate processing apparatus comprises a substrate transfer section, a plurality of modules and a first substrate transfer robot provided in the substrate transfer section and capable of transferring substrates to the plurality of modules. The plurality of modules are piled up, separately from one another, in a vertical direction. Each of the plurality of modules are detachably mounted to the substrate transfer section and includes a substrate processing chamber, an intermediate chamber, a first gate valve disposed between the substrate processing chamber and the intermediate chamber, a second gate valve disposed between the intermediate chamber and the substrate transfer section, and a second substrate transfer robot disposed in the intermediate chamber. Preferably, the substrate processing chamber further comprises a second intermediate chamber having a substrate holder therein and disposed between the intermediate chamber and the substrate transfer section, and a third gate valve disposed between the second intermediate chamber and the substrate transfer section.
    • 基板处理装置包括基板转印部,多个模块和设置在基板转印部中并能够将基板传送到多个模块的第一基板传送机械手。 多个模块在垂直方向彼此分开堆叠。 多个模块中的每一个可拆卸地安装到基板传送部分,并且包括基板处理室,中间室,设置在基板处理室和中间室之间的第一闸阀,设置在中间室和第二闸阀之间的第二闸阀 基板传送部分和设置在中间室中的第二基板传送机器人。 优选地,衬底处理室还包括第二中间室,其中具有衬底保持器,并设置在中间室和衬底转移部之间,以及设置在第二中间室和衬底转移部之间的第三闸阀。