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1. 发明授权

US06387810B2 Method for homogenizing device parameters through photoresist planarization 失效
标题翻译：通过光致抗蚀剂平坦化使器件参数均匀化的方法
公开(公告)号：US06387810B2
公开(公告)日：2002-05-14
申请号：US09340796
申请日：1999-06-28
申请人： Gary J. Beardsley , Zhong X. He , Cuc K. Huynh , Michael P. McMahon
发明人： Gary J. Beardsley , Zhong X. He , Cuc K. Huynh , Michael P. McMahon
IPC分类号： H01L21304
CPC分类号： H01L21/76224
摘要： In a fabrication process, photoresist is disposed over a semiconductor substrate (10), covering a front surface (11) of the substrate (10) and filling trenches (12, 14, 16, 18) therein. The photoresist is planarized in chemical mechanical polishing to achieve a uniform thickness throughout the substrate (10). An anisotropic etching process partially removes the photoresist in the trenches (12, 14, 16, 18), thereby creating recesses in the trenches (12, 14, 16, 18). Because the thickness of the photoresist is uniform throughout the substrate (10) before the etching process, the depths of the recesses in different trenches (12, 14, 16, 18) are substantially equal to each other. A uniform recess depth throughout the substrate (10) is thereby achieved. The uniform recess depth facilitates in ensuring the semiconductor devices fabricated on the substrate (10) to have consistent parameters, characteristics, and performances.
摘要翻译：在制造工艺中，将光致抗蚀剂设置在半导体衬底（10）上，覆盖衬底（10）的前表面（11）并在其中填充沟槽（12,14,16,18）。光致抗蚀剂在化学机械抛光中被平坦化，以在整个基底（10）上实现均匀的厚度。各向异性蚀刻工艺部分去除沟槽（12,14,16,18）中的光致抗蚀剂，从而在沟槽（12,14,16,18）中产生凹陷。由于在蚀刻工艺之前，光致抗蚀剂的厚度在整个基板（10）上是均匀的，所以不同沟槽（12,14,16,18）中的凹槽的深度基本相等。从而实现整个基板（10）的均匀凹陷深度。均匀凹陷深度有助于确保制造在基板（10）上的半导体器件具有一致的参数，特性和性能。

2. 发明授权

US06559030B1 Method of forming a recessed polysilicon filled trench 有权
标题翻译：形成凹陷多晶硅填充沟槽的方法
公开(公告)号：US06559030B1
公开(公告)日：2003-05-06
申请号：US10015987
申请日：2001-12-13
申请人： Thai Doan , Zhong-Xiang He , Michael P. McMahon
发明人： Thai Doan , Zhong-Xiang He , Michael P. McMahon
IPC分类号： H01L2176
CPC分类号： H01L21/763
摘要： A method of forming a recessed polysilicon contact is provided. The method includes: forming a trench in a substrate; overfilling the trench with polysilicon; removing the polysilicon outside of the trench to provide a substantially planar surface; oxidizing the surface of the polysilicon in the trench using plasma oxidation; and removing an upper portion of the polysilicon from the trench.
摘要翻译：提供一种形成凹陷多晶硅接触的方法。该方法包括：在衬底中形成沟槽; 用多晶硅填满沟槽; 去除沟槽之外的多晶硅以提供基本平坦的表面; 使用等离子体氧化来氧化沟槽中多晶硅的表面; 以及从沟槽去除多晶硅的上部。

3. 发明授权

US07366533B2 Methods for providing access to wireless resources in a trunked radio communication system 有权
标题翻译：提供对集群无线电通信系统中的无线资源的访问的方法
公开(公告)号：US07366533B2
公开(公告)日：2008-04-29
申请号：US09859175
申请日：2001-05-16
申请人： Robert A Biggs , Jeffrey S Anderson , Michael P McMahon , Leslie G Gustafson, Jr.
发明人： Robert A Biggs , Jeffrey S Anderson , Michael P McMahon , Leslie G Gustafson, Jr.
IPC分类号： H04B7/00 , H04Q7/20
CPC分类号： H04W74/0866 , H04W8/26 , H04W72/048 , H04W84/08
摘要： Methods are disclosed for providing requested access, network-initiated access and autonomous access to communication resources (101-105) by wireless communication unit(s) (112, 114), and for controlling the different types of access using access control identifier(s) assigned to the devices. Requested access requires a communication unit to send a call request (302) to a communication resource controller (106). The request (302) includes at least an identification of the communication unit and an access control identifier associated with the communication unit. Network-initiated access comprises a communication resource controller or other fixed network equipment sending a page request (502) to the communication unit which responds with a page response message (504) including the identification of the communication unit and an access control identifier. The communication resource controller (106) determines, based on the access control identifier, whether a communication resource is available to support the request. Autonomous access comprises the communication unit (112, 114) receiving a service advertisement message (402) identifying a communication resource and one or more access control identifiers associated with the communication resource. The communication unit determines its eligibility for autonomous access based on the service advertisement message. The service advertisement message may be used to indicate an availability status of communication resources as available for autonomous access or requested access or not available for selected user groups.
摘要翻译：公开了用于通过无线通信单元（112,114）提供所请求的访问，网络发起的访问和对通信资源（101-105）的自主访问的方法，并且用于使用访问控制标识符（s）控制不同类型的访问）分配给设备。请求的访问需要通信单元向通信资源控制器（106）发送呼叫请求（302）。请求（302）至少包括通信单元的标识和与通信单元相关联的访问控制标识符。网络发起的接入包括通信资源控制器或其他固定网络设备向通信单元发送寻呼请求（502），所述通信单元用包括通信单元的标识和访问控制标识符的寻呼响应消息（504）进行响应。通信资源控制器（106）基于访问控制标识符确定通信资源是否可用于支持请求。自主访问包括接收识别通信资源的服务通告消息（402）和与通信资源相关联的一个或多个访问控制标识符的通信单元（112,114）。通信单元基于服务广告消息确定其自主访问的资格。服务广告消息可以用于指示可用于自主访问或请求的访问的通信资源的可用性状态或对于所选择的用户组不可用。

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