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    • 3. 发明申请
    • ENHANCED OXYGEN NON-STOICHIOMETRY COMPENSATION FOR THIN FILMS
    • 用于薄膜的增强氧化物非晶体半导体补偿
    • US20090134015A1
    • 2009-05-28
    • US12365855
    • 2009-02-04
    • Michael Gene RACINEAnirban DasSteven Roger KennedyYuanda R. Cheng
    • Michael Gene RACINEAnirban DasSteven Roger KennedyYuanda R. Cheng
    • C23C14/34
    • G11B5/851G11B5/656
    • A method of manufacturing a magnetic recording medium, including the step of reactively or non-reactively sputtering at least a first data storing thin film layer over a substrate from a sputter target. The sputter target is comprised of cobalt (Co), platinum (Pt), a first metal oxide further comprised of a first metal and oxygen (O) and, when non-reactively sputtering, a second metal oxide. The first data storing thin film layer is comprised of cobalt (Co), platinum (Pt), and a stoichiometric third metal oxide comprising the first metal and oxygen (O). During sputtering, any non-stoichiometry of the third metal oxide in the first data storing thin film layer is compensated for using oxygen (O) from the second metal oxide in the sputter target, or using oxygen (O) from the oxygen-rich gas atmosphere. The first metal is selected from boron (B), silicon (Si), aluminum (Al), tantalum (Ta), niobium (Nb), hafnium (Hf), zirconium (Zr), titanium (Ti), tin (Sn), lanthanum (La), tungsten (W), cobalt (Co), yttrium (Y), chromium (Cr), cerium (Ce), europium (Eu), gadolinium (Gd), vanadium (V), samarium (Sm), praseodymium (Pr), manganese (Mn), iridium (Ir), rhenium (Re), nickel (Ni), and zinc (Zn). The sputter target is further comprised of chromium (Cr) and/or boron (B).
    • 一种制造磁记录介质的方法,包括从溅射靶在衬底上至少反射或非反应地溅射第一数据存储薄膜层的步骤。 溅射靶由钴(Co),铂(Pt),还包含第一金属和氧(O)的第一金属氧化物组成,并且当非反应溅射时形成第二金属氧化物。 第一数据存储薄膜层由钴(Co),铂(Pt)和包含第一金属和氧(O)的化学计量的第三金属氧化物组成。 在溅射期间,使用来自溅射靶中的第二金属氧化物的氧(O)或使用来自富氧气体的氧(O)来补偿第一数据存储薄膜层中的第三金属氧化物的任何非化学计量 大气层。 第一金属选自硼(B),硅(Si),铝(Al),钽(Ta),铌(Nb),铪(Hf),锆(Zr),钛(Ti) ,镧(La),钨(W),钴(Co),钇(Y),铬(Cr),铈(Ce),铕(Eu),钆(Gd),钒(V) ,镨(Pr),锰(Mn),铱(Ir),铼(Re),镍(Ni)和锌(Zn)。 溅射靶还包含铬(Cr)和/或硼(B)。
    • 4. 发明申请
    • Ni-X, Ni-Y, and Ni-X-Y alloys with or without oxides as sputter targets for perpendicular magnetic recording
    • 具有或不具有氧化物的Ni-X,Ni-Y和Ni-X-Y合金作为用于垂直磁记录的溅射靶
    • US20080131735A1
    • 2008-06-05
    • US11633576
    • 2006-12-05
    • Anirban DasSteven Roger KennedyMichael Gene Racine
    • Anirban DasSteven Roger KennedyMichael Gene Racine
    • G11B5/66C23C14/34
    • G11B5/8404C23C14/025C23C14/165C23C14/3414G11B5/656G11B5/7379G11B5/851
    • The various embodiments of the present invention generally relate to the deposition of a seedlayer for a magnetic recording medium used for perpendicular magnetic recording (PMR) applications, where the seedlayer provides for grain size refinement and reduced lattice mis-fit for a subsequently deposited underlayer or granular magnetic layer, and where the seedlayer is deposited using a nickel (Ni) alloy based sputter target. The nickel (Ni) alloy can be binary (Ni—X; Ni—Y) or ternary (Ni—X—Y). In addition, the binary (Ni—X; Ni—Y) or ternary (Ni—X—Y) nickel (Ni) based alloys can be further alloyed with metal oxides, thus forming seedlayer thin films with a granular microstructure containing metallic grains, surrounded by an oxygen rich grain boundary. The nickel-based alloys (with or without metal oxides) of the various exemplary embodiments can be made by powder metallurgical technique or by melt-casting techniques, with or without thermo-mechanical working.
    • 本发明的各种实施方案通常涉及用于垂直磁记录(PMR)应用的磁记录介质的种子层的沉积,其中种子层提供用于随后沉积的底层的晶粒尺寸细化和减小的晶格失配, 粒状磁性层,并且使用基于镍(Ni)合金的溅射靶材沉积种子层。 镍(Ni)合金可以是二元(Ni-X; Ni-Y)或三元(Ni-X-Y)。 此外,二元(Ni-X; Ni-Y)或三元(Ni-XY)镍(Ni)基合金可以与金属氧化物进一步合金化,从而形成具有包含金属颗粒的颗粒状微观结构的层状薄膜, 富氧晶界。 各种示例性实施例的镍基合金(具有或不具有金属氧化物)可以通过粉末冶金技术或通过熔体流延技术制造,具有或不具有热机械加工。
    • 5. 发明申请
    • Inductive devices with granular magnetic materials
    • 具有颗粒磁性材料的感应器件
    • US20080238601A1
    • 2008-10-02
    • US11822918
    • 2007-07-11
    • Anirban DasShinHwa LiMichael Gene Racine
    • Anirban DasShinHwa LiMichael Gene Racine
    • H01F5/00H01F27/28
    • H01F17/0006H01F1/24H01F3/14H01F27/255H01F2017/0053H01F2017/0066
    • An inductive device is provided, comprising a conductor configured in a spiral and a first layer of granular magnetic material having a plurality of magnetic grains embedded in an amorphous ceramic matrix. The amorphous ceramic matrix has a dielectric constant greater than 3. A transformer is also provided, comprising a core and a first inductor. The first inductor includes a first conductor configured in a spiral surrounding a first portion of the core, and a first layer of granular magnetic material. The transformer further comprises a second inductor. The second inductor includes a second conductor configured in a spiral surrounding a second portion of the core, and a second layer of granular magnetic material. The first and second layers of granular magnetic material have a plurality of magnetic grains embedded in an amorphous ceramic matrix. The amorphous ceramic matrix has a dielectric constant greater than 3.
    • 提供了一种电感器件,包括一个配置成螺旋形状的导体和一颗粒状磁性材料的第一层,具有嵌入非晶陶瓷基质中的多个磁性颗粒。 非晶陶瓷基体具有大于3的介电常数。还提供了一种变压器,其包括芯和第一电感器。 第一电感器包括构造成围绕芯的第一部分的螺旋构造的第一导体和第一粒状磁性材料层。 变压器还包括第二电感器。 第二电感器包括构造成围绕芯的第二部分的螺旋构造的第二导体和第二颗粒状磁性材料层。 粒状磁性材料的第一层和第二层具有嵌入非晶陶瓷基体中的多个磁性颗粒。 非晶陶瓷基体的介电常数大于3。